Biocompatible high aspect-ratio porous membrane
Porous membranes are provided according to the invention having desirable coefficient of thermal expansion and large surface area, for example at least about 4,000 mm 2 . These porous membranes may be made according to an exemplary process employing lithographic patterning of a photoresist followed by development of the photoresist and etching. In one aspect, the etch barrier layer is chosen from a material that does not react with or incorporate metal or other contaminants into the membrane layer.
1. A porous membrane, the porous membrane comprising a polymer layer having a contiguous surface area of at least 4,000 mm 2 , a thickness of between 5 and 25 microns, and a pattern of openings etched through the thickness of the polymer layer using a hard mask, wherein the median aspect ratio of the openings ranges from 0.5:1 to 20:1, and the porous membrane includes an amount of residual hard mask material on the surface of the polymer layer or within the polymer layer, wherein the hard mask is made from a non-metallic hydrogenated amorphous inorganic material.
2. The membrane of claim 1 , wherein the membrane has a deviation ratio of 0.2 or less wherein the deviation ratio is calculated as the ratio of maximum deviation from the flat plane when the membrane is self-supporting, divided by length of that membrane across the flat surface.
3. The membrane of claim 1 , wherein the pore diameter standard deviation is less than 0.70 microns.
4. The membrane of claim 1 , wherein the pore diameter standard deviation ranges from 0.15 to 0.40 microns.
5. The membrane of claim 1 , wherein the pore diameter standard deviation ranges from 0.15 to 0.30 microns.
6. The membrane of claim 1 , wherein the polymer layer comprises a polymer selected from polyimide, polyamide, polycarbonate, polyetherimide, polyether ketone, polyurethane, synthetic polymers, low-density polyethylene (LDPE), high-density polyethylene (HDPE), polypropylene (PP), polyvinyl chloride (PVC), polystyrene (PS), nylon, teflon (polytetrafluoroethylene), thermoplastic polyurethanes (TPU), polyethylene, acrylate polymers, acrylate monomers, or acrylate elastomers.
7. The membrane of claim 1 , wherein the polymer layer is polyimide.
8. The membrane of claim 1 , wherein the pores have an aspect ratio of 1:1 to 10:1.
9. A porous membrane, the porous membrane comprising polyimide having a contiguous surface area of at least 4,000 mm 2 , a thickness of between 5 and 25 microns, and a pattern of openings etched through the thickness of the polymer layer using a hard mask, wherein the median aspect ratio of the openings ranges from 0.5:1 to 20:1, and the polyimide includes an amount of residual hardmask material, wherein the hard mask is made from a non-metallic hydrogenated amorphous inorganic material.
10. The membrane of claim 1 , wherein the pore diameter standard deviation is less than 0.70 microns.
11. The membrane of claim 9 , wherein the hardmask is a hydrogenated amorphous silicon nitride (SiN:H) or a hydrogenated amorphous silicon oxide (SiO:H).
12. The membrane of claim 9 , wherein the hard mask is made from a non-metallic inorganic material that is free of potential metal contaminants such that the resulting porous membrane is free of metallic contaminants or has a level of metallic contaminants that is biologically insignificant.
13. The membrane of claim 9 , wherein the membrane exhibits a lower standard deviation in mean retention for beads larger than the pore size than track-etched membranes of the same nominal pore size.
14. The membrane of claim 9 , wherein the membrane exhibits a standard deviation in mean retention for beads larger than the pore size of less than 15%.
15. The membrane of claim 1 , wherein the hardmask is a hydrogenated amorphous silicon nitride (SiN:H) or a hydrogenated amorphous silicon oxide (SiO:H).
16. The membrane of claim 1 , wherein the hard mask is made from a non-metallic inorganic material that is free of potential metal contaminants such that the resulting porous membrane is free of metallic contaminants or has a level of metallic contaminants that is biologically insignificant.
17. The membrane of claim 1 , wherein the membrane exhibits a lower standard deviation in mean retention for beads larger than the pore size than track-etched membranes of the same nominal pore size.