IP Library › Granted Patent US 11,791,356
Granted Patent B2
US 11,791,356 · App. 17/571,071 · Granted Oct 17, 2023

Image sensor device having a first lens and a second lens over the first lens

Inventor: Shih-Hsun Hsu (New Taipei, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H01L27/14627H01L27/1463H01L27/14621H01L27/14623H01L27/14629H01L27/14632H01L27/1464H01L27/14603H01L27/14645H01L27/14685H01L27/14689
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Quick Facts
Patent No.
US 11,791,356
App. No.
17/571,071
Granted
Oct 17, 2023
Kind
B2
Abstract

An image sensor device is provided. The image sensor device includes a substrate. The image sensor device includes a light-sensing region in the substrate. The image sensor device includes an isolation structure in the substrate. The isolation structure surrounds the light-sensing region. The image sensor device includes a grid layer over the substrate. The grid layer is over the isolation structure. The image sensor device includes a first lens over the light-sensing region and surrounded by the grid layer. The image sensor device includes a color filter layer over and in direct contact with the first lens. The first lens is embedded in the color filter layer. The image sensor device includes a second lens over the color filter layer.

Claims (44)

1. An image sensor device, comprising:

a substrate;

a light-sensing region in the substrate;

an isolation structure in the substrate, wherein the isolation structure surrounds the light-sensing region;

a grid layer over the substrate, wherein the grid layer is over the isolation structure;

a first lens over the light-sensing region and surrounded by the grid layer;

a color filter layer over and in direct contact with the first lens, wherein the first lens is embedded in the color filter layer; and

a second lens over the color filter layer.

2. The image sensor device as claimed in claim 1 , wherein a lower portion of the color filter layer is embedded in the grid layer.

3. The image sensor device as claimed in claim 2 , wherein the lower portion of the color filter layer surrounds the first lens.

4. The image sensor device as claimed in claim 1 , the second lens is in direct contact with the color filter layer.

5. The image sensor device as claimed in claim 1 , further comprising:

a spacer structure between the grid layer and the second lens, wherein the spacer structure surrounds the first lens.

6. The image sensor device as claimed in claim 5 , wherein the spacer structure and the first lens are made of a same material.

7. The image sensor device as claimed in claim 6 , wherein the color filter layer is in direct contact with the spacer structure.

8. The image sensor device as claimed in claim 6 , wherein the spacer structure surrounds the color filter layer.

9. The image sensor device as claimed in claim 1 , wherein the grid layer surrounds the color filter layer.

10. The image sensor device as claimed in claim 1 , wherein a first top surface of the first lens is lower than a second top surface of the grid layer.

11. An image sensor device, comprising:

a substrate;

a light-sensing region in the substrate;

an isolation structure in the substrate, wherein the isolation structure surrounds the light-sensing region;

a grid layer over the substrate, wherein the grid layer is over the isolation structure;

a first lens and a second lens over the light-sensing region and surrounded by the grid layer, wherein the first lens is adjacent to and connected with the second lens;

a third lens over the first lens, the second lens, and the grid layer; and

a color filter layer between the first lens and the third lens and between the second lens and the third lens, wherein a lower portion of the color filter layer separates a first top portion of the first lens from a second top portion of the second lens.

12. The image sensor device as claimed in claim 11 , wherein a width of the lower portion of the color filter layer increases toward the third lens.

13. The image sensor device as claimed in claim 11 , wherein the first lens is interposed between the grid layer and the second lens, and a first width of the first lens is greater than a second width of the second lens.

14. The image sensor device as claimed in claim 13 , wherein a first thickness of the first lens is different from a second thickness of the second lens.

15. The image sensor device as claimed in claim 14 , wherein the first thickness is greater than the second thickness.

16. An image sensor device, comprising:

a substrate;

a light-sensing region in the substrate;

an isolation structure in the substrate, wherein the isolation structure surrounds the light-sensing region;

a grid layer over the substrate, wherein the grid layer is over the isolation structure;

a first lens over the light-sensing region and surrounded by the grid layer;

a spacer structure over the grid layer, wherein the spacer structure surrounds the first lens;

a second lens over the first lens and the spacer structure; and

a color filter layer between the first lens and the second lens, wherein the color filter layer has a curved bottom surface, an upper portion of the color filter layer passes through the spacer structure, and a lower portion of the color filter layer is embedded in the grid layer.

17. The image sensor device as claimed in claim 16 , wherein the curved bottom surface is a concave curved surface.

18. The image sensor device as claimed in claim 16 , wherein the color filter layer is in direct contact with the first lens, the second lens and the spacer structure.

19. The image sensor device as claimed in claim 16 , wherein the spacer structure and the first lens are made of a same material, and a first top surface of the spacer structure is substantially level with a second top surface of the color filter layer.

20. The image sensor device as claimed in claim 16 , further comprising:

a third lens over the light-sensing region and surrounded by the grid layer, wherein the third lens is adjacent to and connected to the first lens, the first lens has a first curved top surface, the third lens has a second curved top surface, and the first curved top surface is connected to the second curved top surface.

Continuity (4)
Continuation 16881854 · May 22, 2020
Continuation 16049048 · Jul 30, 2018
Provisional Application 62586319 · Nov 15, 2017
Related Publication 20220130881A1 · Apr 28, 2022