IP Library › Granted Patent US 11,791,437
Granted Patent B2
US 11,791,437 · App. 16/731,193 · Granted Oct 17, 2023

Amplified spontaneous emission semiconductor source

Inventors: Marcus Dülk (Schlieren, CH); Nicolai Matuschek (Schlieren, CH)
Assignee: EXALOS AG
H01L33/0045A61B1/0684A61B5/0066H01L33/10H01L33/32H01L33/60H01S5/50H04N9/315
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,791,437
App. No.
16/731,193
Granted
Oct 17, 2023
Kind
B2
Abstract

An amplified spontaneous emission, ASE, source device combining a superluminescent light emitting diode, SLED, with a semiconductor optical amplifier, SOA, the SLED and SOA being arranged in series so that the SLED acts as a seed and the SOA acts as a broadband amplifier for the SLED output. Both SLED and SOA have a structure made up of a succession of epitaxial semiconductor layers which form a waveguide comprising a core of active region layers and surrounding cladding layers. The SLED and SOA confinement factors of the SLED and SOA, wherein confinement factor is the percentage of the optical mode power in the active region layers, is designed so that the SLED confinement factor is greater than that of the SOA by at least 20%. This allow higher power outputs, because the SLED power limits imposed by the onset of non-linear effects and catastrophic optical damage can be circumvented.

Claims (42)

1. An amplified spontaneous emission, ASE, source device comprising:

a superluminescent light emitting diode, SLED, and a semiconductor optical amplifier, SOA, arranged in series, each having a structure made up of a succession of epitaxial semiconductor layers which form an optical mode confining waveguide comprising a core of a higher refractive index active region layer, and a cladding of lower refractive index cladding layers,

wherein the SLED and the SOA each have a confinement factor defined as the percentage of the power of the optical mode that lies within the active region layer, wherein the confinement factor of the SLED is greater than that of the SOA by a factor of at least 1.2,

wherein the SLED and the SOA each have a spectral bandwidth defined by their respective 10 dB power values, the spectral bandwidth of the SLED being greater than that of the SOA by at least 20% in wavelength terms.

2. The ASE source device of claim 1 , wherein the SLED and the SOA each have a confinement factor defined as the percentage of the power of the optical mode that lies within the active region layer, wherein the confinement factor of the SLED is greater than that of the SOA by a factor of at least 1.3.

3. The ASE source device of claim 1 , wherein the SLED and the SOA each have a vertical confinement factor component, defined as the percentage of the power of the optical mode in the vertical direction that lies within the active region layer, and wherein the vertical confinement factor component of the SLED is greater than that of the SOA by a factor of at least 1.2.

4. The ASE source device of claim 1 , wherein the SLED and the SOA each have a lateral confinement factor component, defined as the percentage of the power of the optical mode in the horizontal direction that lies within the active region layer, and wherein the lateral confinement factor component of the SLED is greater than that of the SOA by a factor of at least 1.2.

5. The ASE source device of claim 1 , wherein the thickness of the active region layer of the SLED is greater than that of the SOA by a factor of at least 1.2.

6. The ASE source device of claim 1 , wherein the SLED and the SOA each comprise a ridge to define the lateral extent of their respective optical modes, wherein the ridge of the SOA has an average width greater than that of the SLED by a factor of at least 1.2.

7. The ASE source device of claim 1 , wherein the SLED and the SOA each comprise an injection electrode operable to inject carriers into the active region layer, and wherein the injection electrode of the SOA has an average width greater than that of the SLED by a factor of at least 1.2.

8. The ASE source device of claim 1 , wherein the epitaxial semiconductor layers of the SLED and SOA are arranged on a common semiconductor substrate.

9. The ASE source device of claim 1 , wherein the SLED and SOA are arranged on separate semiconductor substrates, which are attached to a common submount.

10. An amplified spontaneous emission, ASE, source module comprising:

a first ASE source device operable to emit a first beam having a first wavelength range, the first ASE source device comprising a first superluminescent light emitting diode, SLED, and a first semiconductor optical amplifier, SOA, arranged in series to form a first SLED-SOA pair, each having a structure made up of a succession of epitaxial semiconductor layers which form an optical mode confining waveguide comprising a core of a higher refractive index active region layer, and a cladding of lower refractive index cladding layers, wherein the first SLED and the first SOA each have a confinement factor defined as the percentage of the power of the optical mode that lies within the active region layer, wherein the confinement factor of the first SLED is greater than that of the first SOA by a factor of at least 1.2;

a second ASE source device operable to emit a second beam having a second wavelength range, the second ASE source device comprising a second superluminescent light emitting diode, SLED, and a second semiconductor optical amplifier, SOA, arranged in series to form a second SLED-SPA pair, each having a structure made up of a succession of epitaxial semiconductor layers which form an optical mode confining waveguide comprising a core of a higher refractive index active region layer, and a cladding of lower refractive index cladding layers, wherein the second SLED and the second SOA each have a confinement factor defined as the percentage of the power of the optical mode that lies within the active region layer, wherein the confinement factor of the second SLED is greater than that of the second SOA by a factor of at least 1.2; and

a beam combiner arranged to receive the first and second beams and to combine them into an output beam,

wherein for each of the first and second SLED-SOA pairs, the SLED and the SOA have respective spectral bandwidths defined by their respective 10 dB power values, the spectral bandwidth of the SLED being greater than that of the SOA by at least 20% in wavelength terms.

11. The ASE source module of claim 10 , wherein the first and second wavelength ranges are substantially the same.

12. The ASE source module of claim 10 , wherein the first and second beams are linearly polarized along respective polarization axes, and

the beam combiner is arranged to receive the first and second beams with their polarization axes orthogonal to each other and to combine them into a substantially unpolarized output beam.

13. The ASE source module of claim 10 , wherein the first and second wavelength ranges are different, and overlap at their ends to produce an output beam having power across a continuous range of wavelengths made up of the combined first and second wavelength ranges.

14. The ASE source module of claim 10 , further comprising:

a third ASE source device operable to emit a third beam having a third wavelength range, the third ASE source device comprising a third superluminescent light emitting diode, SLED, and a third semiconductor optical amplifier, SOA, arranged in series, each having a structure made up of a succession of epitaxial semiconductor layers which form an optical mode confining waveguide comprising a core of a higher refractive index active region layer, and a cladding of lower refractive index cladding layers, wherein the third SLED and the third SOA each have a confinement factor defined as the percentage of the power of the optical mode that lies within the active region layer, wherein the confinement factor of the third SLED is greater than that of the third SOA by a factor of at least 1.2; and

a further beam combiner arranged to receive the already combined first and second beams and the third beam and to combine them into an output beam.

15. The ASE source module of claim 14 , wherein the first, second and third wavelength ranges are different, and overlap at their ends to produce an output beam having power across a continuous range of wavelengths made up of the combined first, second and third wavelength ranges.

16. An optical coherence tomography system comprising:

an ASE source device arranged to direct its output into a light guide, the ASE source device comprising a superluminescent light emitting diode, SLED, and a semiconductor optical amplifier, SOA, arranged in series, each having a structure made up of a succession of epitaxial semiconductor layers which form an optical mode confining waveguide comprising a core of a higher refractive index active region layer, and a cladding of lower refractive index cladding layers, wherein the SLED and the SOA each have a confinement factor defined as the percentage of the power of the optical mode that lies within the active region layer, wherein the confinement factor of the SLED is greater than that of the SOA by a factor of at least 1.2, wherein the SLED and the SOA each have a spectral bandwidth defined by their respective 10 dB power values, the spectral bandwidth of the SLED being greater than that of the SOA by at least 20% in wavelength terms; and

a beam splitter arranged to receive light output from the ASE source device and to direct one component into a first, sample arm to a sample position and another component to a second, reference arm, and to recombine light received back from the first and second arms and direct the recombined light to a detector.

17. A fundus imaging system comprising:

an ASE source device arranged to direct its output into a light guide, the ASE source device comprising a superluminescent light emitting diode, SLED, and a semiconductor optical amplifier, SOA, arranged in series, each having a structure made up of a succession of epitaxial semiconductor layers which form an optical mode confining waveguide comprising a core of a higher refractive index active region layer, and a cladding of lower refractive index cladding layers, wherein the SLED and the SOA each have a confinement factor defined as the percentage of the power of the optical mode that lies within the active region layer, wherein the confinement factor of the SLED is greater than that of the SOA by a factor of at least 1.2, wherein the SLED and the SOA each have a spectral bandwidth defined by their respective 10 dB power values, the spectral bandwidth of the SLED being greater than that of the SOA by at least 20% in wavelength terms; and

an optical arrangement configured to direct light output from the ASE source device to a sample position and collect light received back from the sample position into a fundus imaging unit.

18. An endoscopic imaging system comprising:

an ASE source device arranged to direct its output into a light guide, the ASE source device comprising a superluminescent light emitting diode, SLED, and a semiconductor optical amplifier, SOA, arranged in series, each having a structure made up of a succession of epitaxial semiconductor layers which form an optical mode confining waveguide comprising a core of a higher refractive index active region layer, and a cladding of lower refractive index cladding layers, wherein the SLED and the SOA each have a confinement factor defined as the percentage of the power of the optical mode that lies within the active region layer, wherein the confinement factor of the SLED is greater than that of the SOA by a factor of at least 1.2, wherein the SLED and the SOA each have a spectral bandwidth defined by their respective 10 dB power values, the spectral bandwidth of the SLED being greater than that of the SOA by at least 20% in wavelength terms; and

an insertion tube adapted for insertion into a bodily orifice in which is arranged at least a part of the light guide, wherein the light guide terminates proximal a distal end of the insertion tube.

19. A projection system comprising an amplified spontaneous emission, ASE, source module comprising:

a first ASE source device operable to emit a first beam having a first wavelength range, the first ASE source device comprising a first superluminescent light emitting diode, SLED, and a first semiconductor optical amplifier, SOA, arranged in series to form a first SLED-SOA pair, each having a structure made up of a succession of epitaxial semiconductor layers which form an optical mode confining waveguide comprising a core of a higher refractive index active region layer, and a cladding of lower refractive index cladding layers, wherein the first SLED and the first SOA each have a confinement factor defined as the percentage of the power of the optical mode that lies within the active region layer, wherein the confinement factor of the first SLED is greater than that of the first SOA by a factor of at least 1.2;

a second ASE source device operable to emit a second beam having a second wavelength range, the second ASE source device comprising a second superluminescent light emitting diode, SLED, and a second semiconductor optical amplifier, SOA, arranged in series to form a second SLED-SOA pair, each having a structure made up of a succession of epitaxial semiconductor layers which form an optical mode confining waveguide comprising a core of a higher refractive index active region layer, and a cladding of lower refractive index cladding layers, wherein the second SLED and the second SOA each have a confinement factor defined as the percentage of the power of the optical mode that lies within the active region layer, wherein the confinement factor of the second SLED is greater than that of the second SOA by a factor of at least 1.2;

a beam combiner arranged to receive the first and second beams and to combine them into an output beam;

a third ASE source device operable to emit a third beam having a third wavelength range, the third ASE source device comprising a third superluminescent light emitting diode, SLED, and a third semiconductor optical amplifier, SOA, arranged in series to form a third SLED-SOA pair, each having a structure made up of a succession of epitaxial semiconductor layers which form an optical mode confining waveguide comprising a core of a higher refractive index active region layer, and a cladding of lower refractive index cladding layers, wherein the third SLED and the third SOA each have a confinement factor defined as the percentage of the power of the optical mode that lies within the active region layer, wherein the confinement factor of the third SLED is greater than that of the third SOA by a factor of at least 1.2; and

a further beam combiner arranged to receive the already combined first and second beams and the third beam and to combine them into an output beam,

wherein the first, second and third wavelength ranges represent three complementary colors of a color palette for additive mixing,

wherein for each of the first, second and third SLED-SOA pairs, the SLED and the SOA have respective spectral bandwidths defined by their respective 10 dB power values, the spectral bandwidth of the SLED being grater than that of the SOA by at least 20% in wavelength terms.

Assignments (2)
CHANGE OF NAME Recorded Feb 26, 2026
From: EXALOS AG
To: INDIE TECHNOLOGIES SWITZERLAND AG
Reel/Frame 074956/0828 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 31, 2019
From: DÜLK, MARCUS
To: EXALOS AG
Reel/Frame 051391/0214 →
Priority Claims (1)
GB 1901385.3 · Jan 31, 2019 · national
Continuity (1)
Related Publication 20200251610A1 · Aug 6, 2020