IC including standard cells and SRAM cells
Integrated circuits (IC) are provided. An IC includes a plurality of first cells arranged in a first line, and a plurality of second cells arranged in a second line. P-type fin field-effect transistors (FinFETs) of the plurality of first cells share a continuous fin. P-type FinFETs of two adjacent second cells share a discontinuous fin. The continuous fin and the discontinuous fin include different materials. The first line is parallel to the second line.
1. An integrated circuit (IC), comprising:
a plurality of first cells arranged in a first line, wherein P-type fin field-effect transistors (FinFETs) of the plurality of first cells share a continuous fin; and
a plurality of second cells arranged in a second line, wherein P-type FinFETs of two adjacent second cells share a discontinuous fin,
wherein the continuous fin and the discontinuous fin comprise different materials,
wherein the first line is parallel to the second line.
2. The IC as claimed in claim 1 , wherein in the first cell, source and drain regions of the P-type FinFET extending from the continuous fin of the P-type FinFET comprise a doping layer comprising silicon germanium (SiGe) and Boron, and the width of the doping layer is wider than that of a channel region in the P-type FinFET.
3. The IC as claimed in claim 2 , wherein in the first cell, Ge atomic concentration in the channel region of the P-type FinFET is in a range from about 10% to about 40%.
4. The IC as claimed in claim 1 , wherein in the second cell, source and drain regions of the P-type FinFET extending from the discontinuous fin of the P-type FinFET comprise a doping layer comprising SiGe and Boron, and width of the doping layer is wider than that of a channel region of the P-type FinFET.
5. The IC as claimed in claim 1 , wherein the continuous fin is a SiGe content fin, and the discontinuous fin is a Si content fin.
6. The IC as claimed in claim 1 , wherein the number of P-type FinFETs of the plurality of first cells that share the continuous fin is greater than or equal to 3.
7. An integrated circuit (IC), comprising:
a plurality of logic cells arranged in a first array, wherein channel regions of P-type fin field-effect transistors of the plurality of logic cells in the same column of the first array are formed by a silicon germanium (SiGe) fin, and channel regions of N-type FinFETs of the plurality of logic cells in the same column of the first array are formed by a first silicon (Si) fin; and
a plurality of SRAM cells arranged in a second array, wherein channel regions of P-type FinFETs of two adjacent SRAM cells in the same column of the second array are formed by a second Si fin, and N-type FinFETs of the plurality of SRAM cells in the same column of the second array are formed by a third Si fin,
wherein the SiGe fin and the first Si fin have the same length, and the third Si fin is longer than the second Si fin.
8. The IC as claimed in claim 7 , wherein in the logic cell, source and drain regions of the P-type FinFET extending from the SiGe fin of the P-type FinFET comprise a doping layer comprising SiGe and Boron, and width of the doping layer is wider than that of the channel region of the P-type FinFET.
9. The IC as claimed in claim 8 , wherein in the logic cell, Ge atomic concentration in the channel region of the P-type FinFET is in a range from about 10% to about 40%.
10. The IC as claimed in claim 7 , wherein in the SRAM cell, source and drain regions of the P-type FinFET extending from the second Si fin of the P-type FinFET comprise a doping layer comprising SiGe and Boron, and width of the doping layer is wider than that of the channel region of the P-type FinFET.
11. The IC as claimed in claim 7 , wherein Ge atomic concentration in source and drain regions of the P-type FinFETs of the logic cells and the SRAM cells is in a range from about 30% to about 75%.
12. The IC as claimed in claim 7 , wherein the plurality of logic cells in the same column of the first array comprise inverter, NAND, NOR, Flip-Flop or latch.
13. An integrated circuit (IC), comprising:
a plurality of P-type fin field-effect transistors (FinFETs), comprising:
at least one first P-type FinFET disposed in a logic cell, comprising a silicon germanium (SiGe) channel region; and
at least one second P-type FinFET disposed in a SRAM cell, comprising a Si channel region,
wherein a channel width of the Si channel region of the second P-type FinFET is narrower than a channel width of the SiGe channel region of the first P-type FinFET.
14. The IC as claimed in claim 13 , wherein in the logic cell, a sidewall depth of the SiGe channel region of the P-type FinFETs is in a range from about 35 nm to about 90 nm.
15. The IC as claimed in claim 13 , wherein source and drain regions of the first P-type FinFET extending from the SiGe channel region of the first P-type FinFET comprise a doping layer comprising SiGe and Boron, and width of the doping layer is wider than that of the SiGe channel region of the first P-type FinFET.
16. The IC as claimed in claim 15 , wherein in the first P-type FinFET, Ge atomic concentration in the SiGe channel region is in a range from about 10% to about 40% and is less than Ge atomic concentration in the doping layer.
17. The IC as claimed in claim 13 , wherein source and drain regions of the second P-type FinFET extending from the Si channel region of the second P-type FinFET comprise a doping layer comprising SiGe and Boron, and width of the doping layer is wider than that of the Si channel region of the second P-type FinFET.
18. The IC as claimed in claim 13 , wherein Ge atomic concentration in source and drain regions of the plurality of P-type FinFETs is in a range from about 30% to about 75%.
19. The IC as claimed in claim 13 , further comprising:
a plurality of N-type FinFETs,
wherein each of the plurality of N-type FinFET comprises a Si channel region, and source and drain regions of the N-type FinFET comprise SiP, SiC, SiPC, SiAs, Si, or a combination thereof.
20. The IC as claimed in claim 13 , wherein the logic cell comprises inverter, NAND, NOR, Flip-Flop or latch.