Gas sensor
According to one embodiment, a gas sensor includes a fixed electrode, and a film structure which covers the fixed electrode, forms a cavity inside the film structure, and includes a sensitive layer formed of an amorphous material containing a metal element, and a cap layer provided on the sensitive layer. The film structure is allowed to be deformed when the sensitive layer absorbs a predetermined gas.
1. A gas sensor comprising:
a first electrode; and
a first structure that is spaced apart from the first electrode, covers the first electrode and comprises a base layer, a sensitive layer and a cap layer, the sensitive layer being disposed between the base layer and the cap layer, the cap layer being disposed on the sensitive layer, the sensitive layer being configured to absorb a first gas, and the first structure being capable of deforming when the sensitive layer absorbs the first gas; and
a second structure on which the first electrode is provided, the second structure being connected to the first structure;
the sensitive layer including an amorphous material that includes at least one metal element and at least one non-metal element, and
the cap layer including the at least one metal element.
2. The gas sensor of claim 1 , wherein
the cap layer does not include the at least one non-metal element.
3. The gas sensor of claim 1 , wherein
the first structure further includes an intermediate layer provided between the sensitive layer and the base layer.
4. The gas sensor of claim 1 , further comprising a second electrode provided on the first structure and facing the first electrode, the second electrode being movable with respect to the first electrode,
a shape or a position of the second electrode being changeable in accordance with deformation of the first structure.
5. The gas sensor of claim 1 , wherein
the sensitive layer functions as a second electrode that is movable with respect to the first electrode.
6. The gas sensor of claim 1 , wherein
the at least one metal element includes an element that brings about catalysis to dissociate a hydrogen molecule into hydrogen atoms.
7. The gas sensor of claim 1 , wherein
the amorphous material is a metallic glass material.
8. The gas sensor of claim 1 , wherein
the at least one metal element includes at least one element selected from palladium (Pd), platinum (Pt) and gold (Au), and the at least one non-metal element includes at least one element selected from silicon (Si), phosphorous (P) and boron (B).
9. The gas sensor of claim 8 , wherein
the at least one metal element further includes at least one element selected from copper (Cu), silver (Ag), nickel (Ni), iron (Fe) and chromium (Cr).
10. The gas sensor of claim 1 , wherein the first gas includes hydrogen.
11. The gas sensor of claim 3 , wherein the base layer is disposed between the first electrode and the intermediate layer, and covers the first electrode.
12. The gas sensor of claim 1 , wherein
the base layer includes silicon nitride or silicon oxide.
13. The gas sensor of claim 3 , wherein
the intermediate layer includes at least one of titanium (Ti) and tantalum (Ta).
14. The gas sensor of claim 3 , wherein
the intermediate layer further contains nitrogen (N).
15. The gas sensor of claim 14 , wherein
the intermediate layer comprises a titanium layer, a titanium nitride layer, a tantalum layer, or a tantalum nitride layer.
16. The gas sensor of claim 1 , wherein
the cap layer is thinner than the sensitive layer.
17. The gas sensor of claim 1 , wherein
the sensitive layer is configured to deform when the sensitive layer absorbs the first gas.
18. A system, comprising:
the gas sensor of claim 1 ;
a capacitance detection unit configured to detect a capacitance between the first electrode and the second electrode; and
a gas concentration calculation unit configured to calculate a concentration of the first gas based on the capacitance detected by the capacitance detection unit.