Transfer carrier and manufacturing method thereof, and method for transferring light-emitting diode chip
Disclosed are a transfer carrier and a manufacturing method thereof, and a method for transferring a light-emitting diode chip. The transfer carrier includes: a substrate having a plurality of via holes penetrating a thickness of the substrate, the substrate having a first surface and second surface which are opposite to each other; and thermoplastic structures filling corresponding ones of the via holes, one end of the thermoplastic structures protruding from the second surface of the substrate, and the other end covering a surrounding area on the first surface, of the corresponding via holes.
1. A transfer carrier, comprising:
a substrate having a plurality of via holes penetrating the substrate in a thickness direction of the substrate, the substrate having a first surface and a second surface, wherein the first surface and the second surface are opposite to each other;
a plurality of thermoplastic structures configured to fill the via holes, wherein one end of the thermoplastic structures protrudes from the second surface, and the other end of the thermoplastic structures covers a surrounding area on the first surface, of corresponding via holes; and
a plurality of heating wires between the first surface of the substrate and the thermoplastic structures;
wherein the heating wires are uniformly distributed in an area of the substrate excluding the via holes.
2. The transfer carrier according to claim 1 , wherein parts of the thermoplastic structures are connected to each other as an integrated structure, wherein the parts cover the first surface.
3. The transfer carrier according to claim 1 , wherein a heat conductivity coefficient of the substrate is greater than a heat conductivity coefficient of the thermoplastic structures.
4. The transfer carrier according to claim 3 , wherein a material of the substrate is metal or ceramic.
5. The transfer carrier according to claim 1 , further comprising a plurality of heating wires on the second surface of the substrate, wherein,
the heating wires are uniformly distributed in an area of the substrate excluding the via holes.
6. The transfer carrier according to claim 1 , wherein a material of the thermoplastic structures is wax, rubber, or silica gel.
7. The transfer carrier according to claim 1 , further comprising a plurality of light-emitting diode chips, wherein the light-emitting diode chips correspond to the thermoplastic structures in an one-to-one manner, and are embedded in corresponding thermoplastic structures respectively.
8. A manufacturing method of the transfer carrier according to claim 1 , comprising:
providing a substrate;
forming a plurality of via holes penetrating the substrate;
forming a thermoplastic film layer on a first surface of the substrate;
heating the thermoplastic film layer and extruding the thermoplastic film layer after softening the thermoplastic film layer to make parts of the thermoplastic film layer fill the via holes and overflow out of a second surface of the substrate; and
cooling the thermoplastic film layer to form thermoplastic structures.
9. The manufacturing method according to claim 8 , wherein the extruding the thermoplastic film layer comprises:
applying a pressure to a side far away from the substrate, of the thermoplastic film layer, or applying a pressure to a side far away from the thermoplastic film layer, of the substrate.
10. The manufacturing method according to claim 8 , wherein the extruding the thermoplastic film layer comprises:
applying a pressure to a side far away from the substrate, of the thermoplastic film layer, a side far away from the thermoplastic film layer, of the substrate.