Digitally tunable acoustic wave resonators
View Patent ↗A digitally tunable acoustic wave resonator includes, in part, a first electrode positioned above a substrate, a composite stack positioned above the first electrode, and a second electrode positioned above the composite stack. The composite stack may include one or more alternate layers of a ferroelectric layer and a transition-metal nitride layer. The transition-metal nitride layer can be positioned above the ferroelectric layer, except the ferroelectric layer at the top of the composite stack. The ferroelectric layer comprises an aluminum scandium nitride layer Al 1-x Sc x N, where 0<x<1.
1. A digitally tunable acoustic wave resonator comprising:
a first electrode positioned above a substrate;
a composite stack positioned above the first electrode, the composite stack comprising a plurality of alternate layers of a ferroelectric layer and a transition-metal nitride layer; and
a second electrode positioned above the composite stack,
wherein the ferroelectric layer comprises an aluminum scandium nitride layer (Al 1-x Sc x N), and wherein 0<x<1.
2. The digitally tunable acoustic wave resonator of claim 1 , wherein the transition-metal nitride layer comprises a Titanium nitride layer (TiN).
3. The digitally tunable acoustic wave resonator of claim 1 , wherein the transition-metal nitride layer comprises a Tantalum nitride layer (TaN).
4. The digitally tunable acoustic wave resonator of claim 1 , wherein the first electrode and the second electrode comprise Molybdenum (Mo).
5. The digitally tunable acoustic wave resonator of claim 1 , wherein the substrate comprises a Bragg mirror on single crystal silicon.
6. The digitally tunable acoustic wave resonator of claim 1 , wherein the substrate comprises silicon.
7. The digitally tunable acoustic wave resonator of claim 1 , wherein the ferroelectric layer has a thickness of about 20 nanometers to about 100 nanometers.
8. The digitally tunable acoustic wave resonator of claim 1 , wherein the transition-metal nitride layer has a thickness of about 5 nanometers to about 20 nanometers.
9. The digitally tunable acoustic wave resonator of claim 1 , wherein the composite stack has a thickness of about 500 nanometers to about 1000 nanometers.
10. The digitally tunable acoustic wave resonator of claim 1 , wherein the transition-metal nitride layer is positioned above a corresponding ferroelectric layer except the topmost ferroelectric layer in the composite stack.
11. The digitally tunable acoustic wave resonator of claim 1 , wherein 0.27<x<0.3.
12. A method of fabricating a digitally tunable acoustic wave resonator, comprising:
forming a first electrode above a substrate;
forming a composite stack above the first electrode, the composite stack comprising a plurality of alternate layers of a ferroelectric layer and a transition-metal nitride layer; and
forming a second electrode above the composite stack,
wherein the ferroelectric layer comprises an aluminum scandium nitride layer (Al 1-x Sc x N), and wherein 0<x<1.
13. The method of claim 12 , wherein the transition-metal nitride layer comprises a Titanium nitride layer (TiN).
14. The method of claim 12 , wherein the transition-metal nitride layer comprises a Tantalum nitride layer (TaN).
15. The method of claim 12 , wherein the first electrode and the second electrode comprise Molybdenum (Mo).
16. The method of claim 12 , wherein the substrate comprises a Bragg mirror on single crystal silicon.
17. The method of claim 12 , wherein 0.27<x<0.3.
18. The method of claim 12 , wherein the ferroelectric layer has a thickness of about 20 nanometers to about 100 nanometers.
19. The method of claim 12 , wherein the transition-metal nitride layer has a thickness of about 5 nanometers to about 20 nanometers.
20. The method of claim 12 , wherein the transition-metal nitride layer is positioned above a corresponding ferroelectric layer except the topmost ferroelectric layer in the composite stack.