High electron mobility transistor and method for forming the same
View Patent ↗A method for forming a high electron mobility transistor (HEMT) includes forming a buffer layer on a transparent substrate. The method further includes forming a barrier layer on the buffer layer. A channel region is formed in the buffer layer adjacent to the interface between the buffer layer and the barrier layer. The method further includes forming a dielectric layer on the barrier layer. The method further includes forming source/drain electrodes through the dielectric layer and the barrier layer and disposed on the buffer layer. The method further includes forming a shielding layer conformally covering the dielectric layer and the source/drain electrodes. The method further includes performing a thermal process on the source/drain electrodes.
1. A high electron mobility transistor (HEMT), comprising:
a buffer layer disposed on a transparent substrate;
a barrier layer disposed on the buffer layer, wherein a channel region is disposed in the buffer layer adjacent to an interface between the buffer layer and the barrier layer;
a dielectric layer disposed on the barrier layer;
source/drain electrodes through the dielectric layer and the barrier layer disposed on the buffer layer, wherein bottom surfaces of the source/drain electrodes are in physical contact with the channel region, wherein the bottom surfaces of the source/drain electrodes and a top surface of the channel region constitute an interface;
a shielding layer covering an upper surface and two sidewalls of the source/drain electrodes, wherein the shielding layer comprises light blocking materials; and
an etch stop layer conformally covering the dielectric layer and the source/drain electrodes and disposed under the shielding layer.
2. The high electron mobility transistor as claimed in claim 1 , wherein the shielding layer is further disposed on the dielectric layer discontinuously, and the shielding layer covers the two sidewalls of the source/drain electrodes.
3. The high electron mobility transistor as claimed in claim 1 , wherein the etch stop layer and the dielectric layer are both oxides.
4. The high electron mobility transistor as claimed in claim 1 , further comprising:
a gate electrode disposed on the barrier layer and disposed between the source/drain electrodes.
5. The high electron mobility transistor as claimed in claim 4 , further comprising:
a band adjustment layer disposed on the barrier layer and under the gate electrode;
wherein the band adjustment layer is a P-type doped III-V semiconductor.
6. The high electron mobility transistor as claimed in claim 1 , wherein the shielding layer comprises TiN, Al, Ag, Cu, AlCu, Pt, W, Ru, Ni, TaN, TiAlN, TiW, TiO, TiO 2 , or a combination thereof.