Electrode arrangement for a pMUT and pMUT transducer array
Provided in accordance with the herein described exemplary embodiments are piezo micro-machined ultrasonic transducers (pMUTs) each having a first electrode that includes a first electrode portion and a second electrode portion. The second electrode portion is separately operable from the first electrode portion. A second electrode is spaced apart from the first electrode and defines a space between the first electrode and the second electrode. A piezoelectric material is disposed in the space. Also provided are arrays of pMUTs wherein individual pMUTs have first electrode portions operably associated with array rows and second electrode portions operably associated with array columns.
1. A piezoelectric micro-machined ultrasonic transducer (pMUT) comprising:
a first electrode having a first electrode portion and a second electrode portion, the second electrode portion being separately operable from the first electrode portion, wherein, the first electrode portion is symmetric with the second electrode portion;
a second electrode spaced apart from the first electrode and defining a space between the first electrode and the second electrode;
a silicon passive membrane layer disposed under the second electrode; and
a piezoelectric material disposed in the space,
wherein the first electrode is circular, and the first electrode portion comprises a first semi-circular portion of the electrode and a first semi-annular portion of the electrode and the second electrode portion comprises a second semi-circular portion of the electrode and a second semi-annular portion of the electrode.
2. The transducer of claim 1 , wherein the first electrode portion and the second electrode portion are used to correspondingly transmit an ultrasonic wave and to receive a reflected portion of the ultrasonic wave.
3. The transducer of claim 1 , wherein the first electrode portion and the second electrode portion being separately addressable comprises the first electrode portion and the second electrode portion may be separately excited or sensed.
4. The transducer of claim 1 , wherein the first electrode portion is row addressable as part of a transducer array and the second electrode portion is column addressable as part of the transducer array.
5. The transducer of claim 1 , wherein the transducer is piezoelectric micro-machined ultrasonic transducer (pMUT).
6. An array comprising a first transducer in accordance with claim 1 and a second transducer in accordance with claim 1 .
7. The array of claim 6 , wherein the first transducer comprises a first piezoelectric micro-machined ultrasonic transducer (pMUT) having a first configuration of respective first and second electrodes, and the second transducer is a second pMUT having a second configuration of first and second electrodes, different than the first configuration.
8. The array of claim 7 , wherein the first pMUT had a first configuration of the respective first and second electrodes selected from a group of at least five possible configurations of the first and second electrodes and the second pMUT has a second configuration of the first and second electrodes selected from the group of at least five possible configurations of the first and second electrodes, different than the first configuration.
9. The array of claim 7 , wherein the first electrodes of the first and second transducers are selectively row addressable and the second electrodes of the first and second transducers are selectively column addressable.
10. The array of claim 7 , wherein the first electrodes of the first and second transducers are drivable with a first excitation signal of a first polarity of excitation signals and the second electrodes of the first and the second transducers are drivable with a second excitation signal of equal and opposite polarity to the first excitation signal.
11. The array of claim 7 , comprising a two-dimensional beam forming ultrasonic array.
12. An ultrasonic sensing device comprising an array in accordance with claim 7 .