Photo sensing device and method of fabricating the photo sensing device
View Patent ↗The present disclosure provides a photo sensing device including a substrate, including a silicon layer at a front surface, a photosensitive member extending into and at least partially surrounded by the silicon layer, wherein the silicon layer includes a first doped region adjacent to a first side of the photosensitive member, wherein the first doped region has a first conductivity type, and a second doped region adjacent to a second side of the photosensitive member opposite to the first side, wherein the second doped region has a second conductivity type different from the first conductivity type, and a composite layer disposed between the photosensitive member and the silicon layer and surrounding the photosensitive member, and a portion of the composite layer proximal to the first doped region is doped with a dopant having the first conductivity type.
1. A photo sensing device, comprising:
a substrate, comprising a silicon layer at a front surface;
a photosensitive member extending into and at least partially surrounded by the silicon layer, wherein the silicon layer comprises:
a first doped region adjacent to a first side of the photosensitive member, wherein the first doped region has a first conductivity type; and
a second doped region adjacent to a second side of the photosensitive member opposite to the first side, wherein the second doped region has a second conductivity type different from the first conductivity type; and
a composite layer disposed between the photosensitive member and the silicon layer and surrounding the photosensitive member,
wherein the composite layer includes a first material and a second material different from the first material, and a portion of the composite layer proximal to the first doped region is doped with a dopant having the first conductivity type, and
wherein the first doped region comprises a heavily doped region and a lightly doped region adjacent to the heavily doped region.
2. The photo sensing device of claim 1 , wherein the first material is silicon.
3. The photo sensing device of claim 1 , wherein the second material is germanium.
4. The photo sensing device of claim 1 , further comprising a conductive contact electrically coupled to the first doped region.
5. The photo sensing device of claim 1 , wherein the heavily doped region of the first doped region is apart from the second doped region.
6. The photo sensing device of claim 1 , wherein the composite layer comprises a first semiconductor layer contacting the silicon layer, and a second semiconductor layer between the first semiconductor layer and the photosensitive member, wherein the first semiconductor layer includes the first material, and the second semiconductor layer includes the second material.
7. The photo sensing device of claim 1 , further comprising a third doped region having a first conductivity type formed in the photosensitive member at a side adjacent to the lightly doped region.
8. A photo sensing device, comprising:
a substrate, comprising a silicon layer at a front surface;
a photosensitive member extending into and at least partially surrounded by the silicon layer, wherein the silicon layer comprises:
a first doped region adjacent to a first side of the photosensitive member, wherein the first doped region has a first conductivity type; and
a second doped region adjacent to a second side of the photosensitive member opposite to the first side, wherein the second doped region has a second conductivity type different from the first conductivity type; and
a composite layer disposed between the photosensitive member and the silicon layer and surrounding the photosensitive member,
wherein the composite layer includes a first material and a second material different from the first material, and a portion of the photosensitive member proximal to the first doped region is doped with a dopant having the first conductivity type, and
wherein the composite layer is configured to be lining along a sidewall of the photosensitive member and a bottom surface of the photosensitive member.
9. The photo sensing device of claim 8 , wherein a portion of the composite layer proximal to the first doped region is doped with a dopant having the first conductivity type.
10. The photo sensing device of claim 8 , wherein the first material is silicon.
11. The photo sensing device of claim 8 , wherein the second material is germanium.
12. The photo sensing device of claim 8 , wherein the composite layer comprises a first semiconductor layer contacting the silicon layer, and a second semiconductor layer between the first semiconductor layer and the photosensitive member, wherein the first semiconductor layer includes the first material, and the second semiconductor layer includes the second material.
13. The photo sensing device of claim 8 , wherein a portion of composite layer lining along the sidewall of the photosensitive member is doped with a dopant having the first conductivity type.
14. A photo sensing device, comprising:
a substrate, comprising a silicon layer at a front surface;
a photosensitive member extending into and at least partially surrounded by the silicon layer, wherein the silicon layer comprises:
a first doped region adjacent to a first side of the photosensitive member, wherein the first doped region has a first conductivity type, and the first doped region comprises:
a heavily doped region; and
a lightly doped region, wherein at least a portion of the lightly doped region is between the heavily doped region and the photosensitive member;
a second doped region adjacent to a second side of the photosensitive member opposite to the first side, wherein the second doped region has a second conductivity type different from the first conductivity type; and
a composite layer disposed between the photosensitive member and the silicon layer and surrounding the photosensitive member,
wherein the composite layer includes a first material and a second material different from the first material.
15. The photo sensing device of claim 14 , the second doped region comprises:
a heavily doped region; and
a lightly doped region, wherein at least a portion of the lightly doped region of the second doped region is between the heavily doped region of the second doped region and the photosensitive member.
16. The photo sensing device of claim 14 , wherein the first material is silicon and the second material is germanium.
17. The photo sensing device of claim 14 , further comprising an insulation layer extending over a portion of the silicon layer.
18. The photo sensing device of claim 17 , wherein at least a portion of the heavily doped region of the first doped region is exposed from the insulation layer.
19. The photo sensing device of claim 14 , further comprising a conductive contact electrically coupled to the heavily doped region of the first doped region.
20. The photo sensing device of claim 14 , further comprising a silicide layer disposed over the heavily doped region of the first doped region.