IP Library Granted Patent US 11,830,897
Granted Patent B2
US 11,830,897 · App. 17/141,141 · Granted Nov 28, 2023

Square-gate source-follower for CMOS image sensor pixel

Inventors: Yunfei Gao (San Diego, CA); Tae Seok Oh (San Diego, CA); Jinwen Xiao (San Diego, CA)
Assignee: SHENZHEN GOODIX TECHNOLOGY CO., LTD.
H01L27/14614H01L27/14603H01L27/14616H01L27/14643H04N25/76
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Quick Facts
Patent No.
US 11,830,897
App. No.
17/141,141
Granted
Nov 28, 2023
Kind
B2
Abstract

Techniques are described for implementing a square-gate source-follower (SGSF) transistor for integration with complementary metal-oxide semiconductor (CMOS) image sensor (CIS) pixels. The SGSF transistor can have an active layer with active regions, including a drain region separated from each of two source regions to form parallel current channels. A square-gate structure layer includes main-gate regions, each disposed above a corresponding one of the current channels, and a side-gate region to couple the main-gate regions. At a particular physical width (W) and current channel length (L), the parallel current channels can act similarly to a conventional linear source-follower having dimensions of 2W and the same L. SGSF implementations can provide a number of features, including higher frame rate, lower power consumption, and lower noise, as compared to those of a conventional source-follower transistor of comparable W and L dimensions.

Claims (38)

1. A source-follower transistor comprising:

an active layer comprising a drain-doped region separated from a first source-doped region by a first current channel, and separated from a second source-doped region by a second current channel, each of the drain-doped region, the first source-doped region, and the second source-doped region physically and electrically coupled with a respective contact;

a square-gate layer comprising:

a first main-gate region disposed above the first current channel to a first side of the drain-doped region;

a second main-gate region disposed above the second current channel to a second side of the drain-doped region opposite the first side of the drain-doped region; and

a side-gate region disposed to a third side of the drain-doped region to electrically couple the first main-gate region to the second main-gate region; and

a gate contact physically and electrically coupled with the first main-gate region, and electrically coupled with the second main-gate region via the side-gate region.

2. The source-follower transistor of claim 1 , further comprising:

an edge-isolation region running along a first edge of the source-follower transistor corresponding to the third side of the drain region, such that the side-gate region at least partially overlaps the edge-isolation region.

3. The source-follower transistor of claim 2 , wherein the edge-isolation region is a shallow trench isolation (STI) region.

4. The source-follower transistor of claim 1 , wherein the first current channel and the second current channel each has a same nominal channel length.

5. The source-follower transistor of claim 1 , wherein:

the source-follower transistor has a width of W; and

each of the first current channel and the second current channel has a nominal channel length (L); and

0.6 W≤L≤W.

6. The source-follower transistor of claim 1 , wherein:

the active layer is a substrate structure;

each of the drain-doped region, the first source-doped region, and the second source-doped region is a respective n-doped region of the substrate structure;

each of the first and second current channels corresponds to respective p-doped region of the substrate structure;

the square-gate layer is a polysilicon structure; and

the first and second main-gate regions of the polysilicon structure are isolated from the first and second current channels by a thin silicon dioxide layer.

7. A semiconductor image sensor comprising:

a pixel having:

a photodiode; and

a square-gate source-follower (SGSF) transistor comprising:

an active layer comprising a drain-doped region separated from a first source-doped region by a first current channel, and separated from a second source-doped region by a second current channel, each of the drain-doped region, the first source-doped region, and the second source-doped region physically and electrically coupled with a respective contact;

a square-gate layer comprising a first main-gate region disposed above the first current channel to a first side of the drain-doped region, a second main-gate region disposed above the second current channel to a second side of the drain-doped region opposite the first side of the drain-doped region, and a side-gate region disposed to a third side of the drain-doped region to electrically couple the first main-gate region to the second main-gate region; and

a gate contact physically and electrically coupled with the first main-gate region, and electrically coupled with the second main-gate region via the side-gate region,

wherein the square-gate layer is coupled with the photodiode.

8. The semiconductor image sensor of claim 7 , further comprising:

a select transistor to couple the pixel with a bus,

wherein the first and second source-doped regions are coupled with the select transistor.

9. The semiconductor image sensor of claim 7 , further comprising:

an array of instances of the pixel.

10. The semiconductor image sensor of claim 7 , wherein each pixel comprises a plurality of photodiodes, all coupled with the square-gate layer.

11. The semiconductor image sensor of claim 7 , wherein the SGSF transistor further comprises:

an edge-isolation region running along a first edge of the SGSF transistor that corresponds to the third side of the drain-doped region, such that the side-gate region at least partially overlaps the edge-isolation region.

12. The semiconductor image sensor of claim 7 , wherein the first current channel and the second current channel each has a same nominal channel length.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 15, 2021
From: GOODIX TECHNOLOGY INC.
To: SHENZHEN GOODIX TECHNOLOGY CO., LTD.
Reel/Frame 056554/0553 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 4, 2021
From: GAO, YUNFEI; OH, TAE SEOK; XIAO, JINWEN
To: GOODIX TECHNOLOGY INC.
Reel/Frame 054805/0122 →
Continuity (1)
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