Semiconductor device and manufacturing method of the semiconductor device
A semiconductor device and a manufacturing method of the semiconductor device are provided. The semiconductor device includes a stacked structure including a plurality of conductive patterns and a plurality of insulating patterns alternately stacked on each other, a cell plug passing through the stacked structure, a select plug coupled to the cell plug, and a select pattern surrounding the select plug, wherein the select pattern includes a first conductive portion and a second conductive portion covering a sidewall and a top surface of the first conductive portion, and wherein the conductive patterns, the first conductive portion, and the second conductive portion include different materials.
1. A semiconductor device, comprising:
a stacked structure including a plurality of conductive patterns and a plurality of insulating patterns alternately stacked on each other;
a cell plug passing through the stacked structure;
a select plug coupled to the cell plug; and
a select pattern surrounding the select plug,
wherein the select pattern includes a first conductive portion and a second conductive portion covering a sidewall and a top surface of the first conductive portion,
wherein the select plug includes a select channel layer coupled to the cell plug and a select capping pattern over the select channel layer, and
wherein the second conductive portion and the select capping pattern include a same material, and
wherein the first conductive portion including a protrusion passing through the second conductive portion and contacting a bottom surface of a spacer of the select plug.
2. The semiconductor device of claim 1 ,
wherein the first conductive portion, the second conductive portion, and the plurality of conductive patterns include different materials.
3. The semiconductor device of claim 1 ,
wherein the cell plug includes a cell channel layer and a cell capping pattern over the cell channel layer, and
wherein a lowermost portion of the select channel layer is disposed in the cell capping pattern.
4. The semiconductor device of claim 1 ,
wherein the second conductive portion and the select capping pattern include metal silicide.
5. The semiconductor device of claim 3 ,
wherein a top surface of the cell capping pattern contacts a bottom surface of the select channel layer, and
wherein the top surface of the cell capping pattern and the bottom surface of the select channel layer are curved.
6. The semiconductor device of claim 1 ,
wherein the cell plug includes a cell channel layer, a tunnel insulating layer surrounding the cell channel layer, a data storage layer surrounding the tunnel insulating layer, a cell capping pattern over the cell channel layer, and a blocking layer surrounding the data storage layer and the cell capping pattern, and
wherein the select channel layer contacts the cell capping pattern and the blocking layer.