IP Library › Granted Patent US 11,832,528
Granted Patent B2
US 11,832,528 · App. 17/717,518 · Granted Nov 28, 2023

Magnetic memory device

Inventors: Kazuya Sawada (Seoul, KR); Young Min Eeh (Seongnam-si, KR); Eiji Kitagawa (Seoul, KR); Taiga Isoda (Seoul, KR); Tadaaki Oikawa (Seoul, KR); Kenichi Yoshino (Seongnam-si, KR)
Assignee: Kioxia Corporation
H10N50/80G11C11/161G11C11/1659G11C11/1675H10B61/10H10N50/85
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Quick Facts
Patent No.
US 11,832,528
App. No.
17/717,518
Granted
Nov 28, 2023
Kind
B2
Abstract

A magnetic memory device includes a substrate; a first magnetoresistive effect element; and a second magnetoresistive effect element provided at a side of the first magnetoresistive effect element opposite to a side of the first magnetoresistive effect element at which the substrate is provided. A heat absorption rate of the first magnetoresistive effect element is lower than a heat absorption rate of the second magnetoresistive effect element.

Claims (49)

1. A magnetic memory device comprising:

a substrate;

a first magnetoresistive effect element; and

a second magnetoresistive effect element provided at a side of the first magnetoresistive effect element opposite to a side of the first magnetoresistive effect element at which the substrate is provided,

wherein each of the first magnetoresistive effect element and the second magnetoresistive effect element includes:

a first ferromagnetic layer;

a second ferromagnetic layer;

a first nonmagnetic layer between the first ferromagnetic layer and the second ferromagnetic layer; and

a second nonmagnetic layer provided at a side of the first ferromagnetic layer opposite to a side of the first ferromagnetic layer at which the first nonmagnetic layer is provided, and

wherein a heat absorption rate of the second nonmagnetic layer of the first magnetoresistive effect element is lower than a heat absorption rate of the second nonmagnetic layer of the second magnetoresistive effect element.

2. The device of claim 1 , wherein the second nonmagnetic layer of the first magnetoresistive effect element includes an element different from any element of the second nonmagnetic layer of the second magnetoresistive effect element.

3. The device of claim 2 , wherein:

the second nonmagnetic layer of the first magnetoresistive effect element includes ruthenium (Ru), and

the second nonmagnetic layer of the second magnetoresistive effect element includes tantalum (Ta).

4. The device of claim 1 , wherein the second nonmagnetic layer of the first magnetoresistive effect element has a film thickness different from a film thickness of the second nonmagnetic layer of the second magnetoresistive effect element.

5. The device of claim 4 , wherein the film thickness of the second nonmagnetic layer of the first magnetoresistive effect element is smaller than the film thickness of the second nonmagnetic layer of the second magnetoresistive effect element.

6. The device of claim 1 , wherein:

each of the first magnetoresistive effect element and the second magnetoresistive effect element further includes a third ferromagnetic layer and a third nonmagnetic layer,

the third ferromagnetic layer is provided at a side of the second ferromagnetic layer opposite a side of the second ferromagnetic layer at which the first nonmagnetic layer is provided, and

the third nonmagnetic layer is provided between the second ferromagnetic layer and the third ferromagnetic layer, the third nonmagnetic layer including at least one element selected from ruthenium (Ru), osmium (Os), iridium (Ir), vanadium (V), and chrome (Cr).

7. The device of claim 6 , wherein each of the first magnetoresistive effect element and the second magnetoresistive effect element further includes:

a fourth nonmagnetic layer between the first ferromagnetic layer and the second nonmagnetic layer, the fourth nonmagnetic layer including an oxide; and

a fifth nonmagnetic layer between the second nonmagnetic layer and the fourth nonmagnetic layer, the fifth nonmagnetic layer including at least one element selected from ruthenium (Ru), iridium (Ir), rhodium (Rh), molybdenum (Mo), iron (Fe), and cobalt (Co).

8. The device of claim 7 , wherein:

each of the first magnetoresistive effect element and the second magnetoresistive effect element further includes a sixth nonmagnetic layer including a metal, and

the sixth nonmagnetic layer is farther than the first ferromagnetic layer, the second ferromagnetic layer, the third ferromagnetic layer, the first nonmagnetic layer, the second nonmagnetic layer, the third nonmagnetic layer, the fourth nonmagnetic layer, and the fifth nonmagnetic layer from the substrate.

9. The device of claim 6 , wherein the first ferromagnetic layer has:

a first resistance value in response to a first current from the first ferromagnetic layer to the second ferromagnetic layer, and

a second resistance value in response to a second current from the second ferromagnetic layer to the first ferromagnetic layer.

10. The device of claim 9 , wherein the first resistance value is smaller than the second resistance value.

11. The device of claim 1 , wherein:

each of the first magnetoresistive effect element and the second magnetoresistive effect element further includes a third ferromagnetic layer and a third nonmagnetic layer,

the third ferromagnetic layer is provided between the first ferromagnetic layer and the second nonmagnetic layer, and

the third nonmagnetic layer is provided between the first ferromagnetic layer and the third ferromagnetic layer, the third nonmagnetic layer including at least one element selected from ruthenium (Ru), osmium (Os), iridium (Ir), vanadium (V), and chrome (Cr).

12. The device of claim 11 , wherein each of the first magnetoresistive effect element and the second magnetoresistive effect element further includes:

a fourth nonmagnetic layer provided at a side of the second ferromagnetic layer opposite to a side of the second ferromagnetic layer at which the first nonmagnetic layer is provided, the fourth nonmagnetic layer including an oxide; and

a fifth nonmagnetic layer provided at a side of the fourth nonmagnetic layer opposite to a side of the fourth nonmagnetic layer at which the second ferromagnetic layer is provided, the fifth nonmagnetic layer including at least one element selected from ruthenium (Ru), iridium (Ir), rhodium (Rh), molybdenum (Mo), iron (Fe), and cobalt (Co).

13. The device of claim 12 , wherein:

each of the first magnetoresistive effect element and the second magnetoresistive effect element further includes a sixth nonmagnetic layer including a metal, and

the sixth nonmagnetic layer is farther than the first ferromagnetic layer, the second ferromagnetic layer, the third ferromagnetic layer, the first nonmagnetic layer, the second nonmagnetic layer, the third nonmagnetic layer, the fourth nonmagnetic layer, and the fifth nonmagnetic layer from the substrate.

14. The device of claim 11 , wherein the second ferromagnetic layer has:

a first resistance value in response to a first current from the second ferromagnetic layer to the first ferromagnetic layer, and

a second resistance value in response to a second current from the first ferromagnetic layer to the second ferromagnetic layer.

15. The device of claim 14 , wherein the first resistance value is smaller than the second resistance value.

16. The device of claim 1 , wherein the first ferromagnetic layer and the second ferromagnetic layer includes at least one element selected from iron (Fe), cobalt (Co), and nickel (Ni).

17. The device of claim 1 , further comprising a first switching element and a second switching element,

wherein:

the first switching element is coupled in series to the first magnetoresistive effect element, and

the second switching element is coupled in series to the second magnetoresistive effect element.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 11, 2022
From: SAWADA, KAZUYA; EEH, YOUNG MIN; KITAGAWA, EIJI; ISODA, TAIGA; OIKAWA, TADAAKI; YOSHINO, KENICHI
To: KIOXIA CORPORATION
Reel/Frame 059560/0816 →
Priority Claims (1)
JP 2019-166174 · Sep 12, 2019 · national
Continuity (2)
Continuation 16816961 · Mar 12, 2020
Related Publication 20220238792A1 · Jul 28, 2022