IP Library Granted Patent US 11,837,543
Granted Patent B2
US 11,837,543 · App. 17/006,695 · Granted Dec 5, 2023

Frontside-to-backside intermixing architecture for coupling a frontside network to a backside network

Inventors: Andy Wangkun Chen (Austin, TX); Sriram Thyagarajan (Austin, TX); Yew Keong Chong (Austin, TX); Sony (Noida, IN); Ettore Amirante (Nice, FR); Ayush Kulshrestha (New Delhi, IN)
Assignee: Arm Limited
H01L23/5286H01L27/0688
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Quick Facts
Patent No.
US 11,837,543
App. No.
17/006,695
Granted
Dec 5, 2023
Kind
B2
Abstract

Various implementations described herein are related to various devices having a frontside power network with frontside supply rails and a backside power network with backside supply rails. The device may include intermixing architecture with transition vias that couple the frontside power network to the backside power network. The intermixing architecture may transition the frontside supply rails of the frontside power network to the backside supply rails of the backside power network.

Claims (38)

1. A device, comprising:

a frontside power network having frontside supply rails that supply core voltage in multiple different domains including multiple core voltage domains that are separate and distinct from ground voltage;

a backside power network having backside supply rails; and

frontside-to-backside intermixing architecture having transition vias that couple the frontside supply rails of the frontside power network to the backside supply rails of the backside power network,

wherein the transition vias are used to provide a direct power tap between the backside supply rails to the frontside supply rails.

2. The device of claim 1 , wherein:

the frontside-to-backside intermixing architecture transitions the frontside supply rails of the frontside power network to the backside supply rails of the backside power network using only the transition vias so as to provide the direct power tap to core circuitry from the backside power network.

3. The device of claim 2 , wherein:

the frontside-to-backside intermixing architecture is configured to operate as memory power domain architecture that uses backside buried metal of the backside power network for the backside supply rails and uses frontside metal of the frontside power network for the frontside supply rails.

4. The device of claim 3 , wherein:

the backside buried metal is disposed underneath the frontside metal, and

only the transition vias are disposed between the backside buried metal and the frontside metal.

5. The device of claim 4 , wherein the frontside-to-backside intermixing architecture refers to backside-to-frontside transition cells with the transition vias that couple the frontside metal of the frontside power network to the backside buried metal of the backside power network.

6. The device of claim 1 , wherein:

a core array is coupled to the frontside supply rails,

the backside power network supplies one or more periphery voltages and ground,

the transition vias refer to buried transition vias, and

only the buried transition vias are used to provide a direct power tap between the backside supply rails to the frontside supply rails.

7. The device of claim 1 , wherein the frontside power network includes frontside metal layers that supply the core voltage in the multiple different domains including the multiple core voltage domains that are separate and distinct from the ground voltage.

8. The device of claim 1 , wherein the multiple different domains of the core voltage include an internal core voltage domain (VDDC) and an external core voltage domain (VDDCE).

9. The device of claim 1 , wherein the backside power network includes one or more buried metal layers that supply a periphery voltage in multiple domains.

10. The device of claim 9 , wherein the multiple domains of the periphery voltage include an external core voltage domain (VDDCE), an internal periphery voltage domain (VDDP), and an external periphery voltage domain (VDDPE).

11. A power delivery architecture, comprising:

a frontside power network having frontside supply rails that supply core voltage in multiple different domains including multiple core voltage domains that are separate and distinct from ground voltage;

a backside power network having backside supply rails; and

frontside-to-backside intermixing architecture having transition vias that provide a coupling transition from the backside supply rails of the backside power network to the frontside supply rails of the frontside power network,

wherein the transition vias are used to provide a direct power tap between the backside supply rails to the frontside supply rails.

12. The architecture of claim 11 , wherein the frontside-to-backside intermixing architecture is configured to provide the coupling transition as a power delivery transition between the frontside supply rails and the backside supply rails using only the transition vias so as to provide the direct power tap to the frontside power network from the backside power network.

13. The architecture of claim 11 , wherein:

the frontside power network uses frontside metal for the frontside supply rails,

the backside power network uses backside buried metal for the backside supply rails that is disposed underneath the frontside metal of the frontside power network, and

the frontside-to-backside intermixing architecture is configured to operate as memory power domain architecture that provides the vias as buried transition vias disposed between the frontside metal of the frontside power network and the backside buried metal of the backside power network.

14. The architecture of claim 11 , wherein:

the frontside power network includes frontside metal layers that supply the core voltage in the multiple different domains including the multiple core voltage domains that are separate and distinct from the ground voltage, and

the multiple different domains of the core voltage include an internal core voltage domain (VDDC) and an external core voltage domain (VDDCE).

15. The architecture of claim 11 , wherein:

the backside power network includes one or more buried metal layers that supply a periphery voltage in multiple domains, and

the multiple domains include an external core voltage domain (VDDCE), an internal periphery voltage domain (VDDP), and an external periphery voltage domain (VDDPE).

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 28, 2020
From: CHEN, ANDY WANGKUN; THYAGARAJAN, SRIRAM; CHONG, YEW KEONG; SONY; AMIRANTE, ETTORE; KULSHRESTHA, AYUSH
To: ARM LIMITED
Reel/Frame 053635/0139 →
Continuity (1)
Related Publication 20220068813A1 · Mar 3, 2022