Substrate processing apparatus
A holding mechanism holds a substrate horizontally. A rotation mechanism rotates the holding mechanism holding the substrate. A nozzle supplies a processing liquid to the substrate. A nozzle arm holds the nozzle. An arm actuation mechanism moves the nozzle arm between a processing position overlapping the substrate in plan view and a retracted position displaced from the substrate in plan view. A cup portion is disposed around the holding mechanism, and receives the processing liquid from the substrate. A cup actuation mechanism moves the cup portion up and down between an upper position and a lower position. A first container is fixed to the cup portion to be movable up and down integrally with the cup portion, and can accommodate the nozzle at the retracted position.
1. A substrate processing apparatus for processing a substrate using a processing liquid, the substrate processing apparatus comprising:
a holder that holds the substrate horizontally;
a rotator that rotates the holder holding the substrate;
a nozzle that supplies the processing liquid to the substrate;
a nozzle arm that holds the nozzle;
an arm actuator that moves the nozzle arm between a processing position overlapping the substrate in plan view and a retracted position displaced from the substrate in plan view;
a cup portion that is disposed around the holder, and receives the processing liquid from the substrate;
a cup actuator that moves the cup portion up and down between an upper position and a lower position;
a first container that is fixed to the cup portion to be movable up and down integrally with the cup portion, and is capable of accommodating the nozzle at the retracted position; and
a controller that is configured to have a first control mode in which the cup actuator is controlled to move the cup portion from the lower position to the upper position when the nozzle is at the retracted position,
wherein the upper position is set so that an upper surface of the first container is above a tip of the nozzle when the cup portion is moved to the upper position in the first control mode.
2. The substrate processing apparatus according to claim 1 , wherein
the first container overlaps the cup portion in plan view.
3. The substrate processing apparatus according to claim 1 , wherein
the controller that is configured to have a second control mode in which the nozzle is maintained at an intermediate position when the cup portion is at the upper position, the intermediate position being displaced from the substrate in plan view and being inward of the retracted position.
4. The substrate processing apparatus according to claim 1 , further comprising
a second container that is capable of accommodating the nozzle at a position different from the retracted position.
5. The substrate processing apparatus according to claim 1 , wherein
the arm actuator moves the nozzle arm so that the nozzle moves horizontally along a straight line.
6. The substrate processing apparatus according to claim 1 , wherein the arm actuator moves the nozzle arm so that the nozzle moves horizontally along an arc.