Particle trapping apparatus for preventing an error of a pressure measurement
Provided is a particle trapping apparatus for preventing an error of a pressure measurement. A particle trapping apparatus for preventing an error of a pressure measurement includes a pressure-measuring means; a measuring pipe for connecting the pressure-measuring means to a processing chamber; and a trapping means for capturing particles in a gas flowing through the measuring pipe, wherein the trapping means is coupled to the measuring pipe or is a portion of the measuring pipe.
1. A particle trapping apparatus for preventing an error of a pressure measurement, comprising;
a pressure-measuring means;
a measuring pipe for connecting the pressure-measuring means to a processing chamber; and
a trapping means for capturing particles in a gas flowing through the measuring pipe, the trapping means comprising: a filtering block for capturing the particles,
wherein the trapping means is coupled to the measuring pipe or is a portion of the measuring pipe,
wherein the filtering block comprises:
a pair of filter cases having a hollow cylindrical shape;
a plurality of porous plates arranged within the pair of the filter cases; and
a plurality of fixing tabs formed on an inner surface of each filter case and arranged separately from each other and successively along a longitudinal direction of each filter case, and
wherein each of the porous plates contains a plurality of holes and is secured within the filter cases with the fixing tabs, and the holes formed in adjacent porous plates are located on different straight lines according to a flowing direction of the gas.
2. The apparatus according to claim 1 , wherein the trapping means further comprises a heat regulating means for regulating a temperature of the gas.