ESD protection circuit and semiconductor device
An electro-static discharge (ESD) protection circuit is electrically connected to a first pad and a second pad. The ESD protection circuit includes an ESD transistor having a control terminal, a first terminal electrically connected to the first pad, a second terminal electrically connected to the second pad, and a substrate end; and an electro-static pulse detection circuit having an upper terminal electrically connected to the first pad, a lower terminal electrically connected to the second pad, and an output terminal electrically connected to the control terminal and the substrate end of the ESD transistor.
1. An Electro-Static Discharge (ESD) protection circuit electrically connected to a first pad and a second pad, the ESD protection circuit comprising:
an ESD transistor having a control terminal, a first terminal electrically connected to the first pad, a second terminal electrically connected to the second pad, and a substrate end; and
an electro-static pulse detection circuit having an upper terminal electrically connected to the first pad, a lower terminal electrically connected to the second pad, and an output terminal electrically connected to the control terminal and the substrate end,
wherein the electro-static pulse detection circuit comprises:
a capacitor having a first terminal serving as the upper terminal of the electro-static pulse detection circuit, and a second terminal; and
a diode group having a first terminal serving as the lower terminal of the electro-static pulse detection circuit, and a second terminal serving as the output terminal of the electro-static pulse detection circuit together with the second terminal of the capacitor,
wherein the first pad is connected to a power supply, and the second pad is grounded.
2. The ESD protection circuit of claim 1 , wherein the ESD transistor is a Negative channel Metal Oxide Semiconductor (NMOS) transistor.
3. The ESD protection circuit of claim 1 , wherein the diode group is formed by multiple diodes connected in series.
4. The ESD protection circuit of claim 3 , wherein the diode group is formed by a transistor with a gate and a drain which are short-circuited.
5. The ESD protection circuit of claim 4 , wherein the transistor is an NMOS transistor or a Positive channel Metal Oxide Semiconductor (PMOS) transistor.
6. The ESD protection circuit of claim 5 , wherein the diode group is formed by at least one NMOS transistor with a gate and a drain being short-circuited, which is connected in series with at least one PMOS transistor with a gate and a drain being short-circuited.
7. A semiconductor device, comprising an Electro-Static Discharge (ESD) protection circuit electrically connected to a first pad and a second pad, wherein the ESD protection circuit comprises:
an ESD transistor having a control terminal, a first terminal electrically connected to the first pad, a second terminal electrically connected to the second pad, and a substrate end; and
an electro-static pulse detection circuit having an upper terminal electrically connected to the first pad, a lower terminal electrically connected to the second pad, and an output terminal electrically connected to the control terminal and the substrate end of the ESD transistor,
wherein the electro-static pulse detection circuit comprises:
a capacitor having a first terminal serving as the upper terminal of the electro-static pulse detection circuit, and a second terminal; and
a diode group having a first terminal serving as the lower terminal of the electro-static pulse detection circuit, and a second terminal serving as the output terminal of the electro-static pulse detection circuit together with the second terminal of the capacitor,
wherein the first pad is connected to a power supply, and the second pad is grounded.
8. The semiconductor device of claim 7 , wherein a semiconductor structure that forms the ESD transistor comprises:
a semiconductor substrate;
a well region disposed in the semiconductor substrate;
a source region and a drain region which are arranged alternately at intervals and arranged in the well region; and
a gate disposed on the semiconductor substrate and located between the source region and the drain region, the gate being electrically connected to the semiconductor substrate.
9. The semiconductor device of claim 8 , wherein the well region is a P-type region, and the source region and the drain region are N-type regions.
10. The semiconductor device of claim 8 , wherein the semiconductor structure comprises a first source region, a second source region, a first drain region, a first gate, and a second gate, wherein the first drain region is located between the first source region and the second source region; the first gate is located between the first source region and the first drain region; and the second gate is located between the first drain region and the second source region.
11. The semiconductor device of claim 8 , wherein the semiconductor structure comprises a plurality of source regions, a plurality of drain regions and a plurality of gates, wherein the plurality of source regions and the plurality of drain regions are arranged alternately at intervals, and the gate is arranged between two adjacent source region and drain region.
12. The semiconductor device of claim 7 , wherein the ESD transistor is a Negative channel Metal Oxide Semiconductor (NMOS) transistor.
13. The semiconductor device of claim 7 , wherein the diode group is formed by multiple diodes connected in series.
14. The semiconductor device of claim 13 , wherein the diode group is formed by a transistor with a gate and a drain which are short-circuited.
15. The semiconductor device of claim 14 , wherein the transistor is an NMOS transistor or a Positive channel Metal Oxide Semiconductor (PMOS) transistor.
16. The semiconductor device of claim 15 , wherein the diode group is formed by at least one NMOS transistor with a gate and a drain being short-circuited, which is connected in series with at least one PMOS transistor with a gate and a drain being short-circuited.