Magnetic field calibration device and method of calibrating magnetism measurement device using the same

1. A magnetic field calibration device used to calibrate a magnetism measurement device having a plurality of magnetic sensors, the magnetic field calibration device comprising:

a first holder having a first holding surface;

a second holder having a second holding surface having a fixed relative positional relation with the first holding surface;

at least one first magnetism generating part fixed to the first holding surface; and

at least one second magnetism generating part fixed to the second holding surface

wherein each of the first and second magnetism generating parts includes a first coil wound in a first axis direction, a second coil wound in a second axis direction perpendicular to the first axis direction, and a third coil wound in a third axis direction perpendicular to both the first axis direction and second axis direction.

2. The magnetic field calibration device as claimed in claim 1 , wherein a plurality of the first magnetism generating parts are fixed to the first holding surface of the first holder, and a plurality of the second magnetism generating parts are fixed to the second holding surface of the second holder.

3. The magnetic field calibration device as claimed in claim 2 ,

wherein the plurality of first magnetism generating parts are arranged in an array, and

wherein the plurality of second magnetism generating parts and some of the plurality of magnetism generating parts are arranged in an array.

4. The magnetic field calibration device as claimed in claim 1 , wherein the first and second holding surfaces are perpendicular to each other.

5. A calibration method of a magnetism measurement device having first and second measurement surfaces each provided with a plurality of magnetic sensors, the calibration method comprising:

preparing a magnetic field calibration device comprising:

a first holder having a first holding surface;

a second holder having a second holding surface having a fixed relative positional relation with the first holding surface;

at least one first magnetism generating part fixed to the first holding surface; and

at least one second magnetism generating part fixed to the second holding surface; and

generating magnetic fields from the first and second magnetism generating parts in a state where the magnetic field calibration device is fixed to the magnetism measurement device such that the first holding surface of the first holder faces the first measurement surface and that the second holding surface of the second holder faces the second measurement surface to calibrate the plurality of magnetic sensors.

6. A magnetic field calibration device used to calibrate a magnetism measurement device having a plurality of magnetic sensors, the magnetic field calibration device comprising:

a first holder having a first holding surface;

a second holder having a second holding surface that is not parallel with the first holding surface;

a plurality of first coils fixed to the first holding surface; and

a plurality of second coils fixed to the second holding surface.

7. The magnetic field calibration device as claimed in claim 6 , wherein the plurality of first coils are arranged in an array on the first holding surface.

8. The magnetic field calibration device as claimed in claim 7 , wherein the plurality of second coils are arranged in an array on the second holding surface.

9. The magnetic field calibration device as claimed in claim 6 , wherein the first holding surface is substantially perpendicular to the second holding surface.

10. The magnetic field calibration device as claimed in claim 6 , wherein a coil axis direction of one of the plurality of first coils is different from a coil axis direction of one of the plurality of second coils.

11. The magnetic field calibration device as claimed in claim 6 , wherein a coil axis direction of one of the plurality of first coils is different from a coil axis direction of another one of the plurality of first coils.

12. The magnetic field calibration device as claimed in claim 11 , wherein a coil axis direction of one of the plurality of second coils is different from a coil axis direction of another one of the plurality of second coils.

13. The magnetic field calibration device as claimed in claim 6 , wherein a coil axis direction of one of the plurality of first coils and a coil axis direction of another one of the plurality of first coils are parallel with each other without coaxial.

14. The magnetic field calibration device as claimed in claim 13 , wherein a coil axis direction of one of the plurality of second coils and a coil axis direction of another one of the plurality of second coils are parallel with each other without coaxial.

15. The magnetic field calibration device as claimed in claim 6 , wherein a coil axis direction of one of the plurality of first coils and a coil axis direction of another one of the plurality of first coils are perpendicular to each other.

16. The magnetic field calibration device as claimed in claim 15 , wherein a coil axis direction of one of the plurality of second coils and a coil axis direction of another one of the plurality of second coils are perpendicular to each other.

17. The magnetic field calibration device as claimed in claim 6 , wherein each of the first and second holders has a plate-like shape.

18. The magnetic field calibration device as claimed in claim 6 , wherein selected one of the plurality of first and second coils is supplied with current.