Semiconductor device and method of manufacturing semiconductor device
A method of manufacturing a semiconductor device may include forming a stack with alternately stacked first material layers and second material layers, forming an opening passing through the stack, forming a memory layer in the opening, forming a slit passing through the stack and exposing the first material layers and the second material layers, and forming first barrier patterns, without removing the second material layers, by partially oxidizing the memory layer through the second material layers.
1. A method of manufacturing a semiconductor device, the method comprising:
forming a stack with alternately stacked first material layers and second material layers;
forming an opening passing through the stack;
forming a memory layer in the opening;
forming a slit passing through the stack and exposing the first material layers and the second material layers; and
forming first barrier patterns, without removing the second material layers, by partially oxidizing the memory layer through the second material layers.
2. The method of claim 1 , wherein forming the first barrier patterns comprises selectively oxidizing portions of the memory layer that correspond to the second material layers.
3. The method of claim 1 , wherein forming the first barrier patterns comprises partially oxidizing a portion of the memory layer to a certain thickness.
4. The method of claim 3 , wherein each of the first barrier patterns includes a sidewall that faces the memory layer, and
wherein the sidewall includes a curved surface.
5. The method of claim 1 , wherein forming the first barrier patterns comprises forming memory patterns that are separated from each other by the first barrier patterns.
6. The method of claim 5 , wherein the first barrier patterns are positioned to correspond with the second material layers, and the memory patterns are positioned to correspond with the first material layers.
7. The method of claim 5 , wherein each of the first barrier patterns includes a sidewall that faces the memory patterns, and
wherein the sidewall includes a curved surface.
8. The method of claim 1 , wherein the first barrier patterns include silicon nitride oxide, silicon oxide, or a combination thereof.
9. The method of claim 1 , wherein forming the first barrier patterns comprises supplying an oxygen source gas through the slit.
10. The method of claim 9 , wherein the oxygen source gas includes H 2 O gas, O 2 gas, N 2 O gas, NO gas, or a combination thereof.
11. The method of claim 1 , further comprising:
forming second barrier patterns on a sidewall of the first material layers that are exposed through the slit.
12. The method of claim 11 , wherein the first barrier patterns and the second barrier patterns are formed by supplying an oxygen source gas through the slit.
13. The method of claim 11 , wherein the second barrier patterns include silicon nitride oxide, silicon oxide, or a combination thereof.
14. The method of claim 11 , further comprising:
removing the second barrier patterns; and
replacing the first material layers with third material layers.
15. The method of claim 1 , further comprising:
forming a blocking layer in the opening,
wherein, in forming the first barrier patterns, an oxygen source gas that is supplied through the slit is permeated through the second material layers and the blocking layer to oxidize the memory layer.