Exhaust pipe device
An exhaust pipe device according to an embodiment includes a dielectric pipe; a radio-frequency electrode; a ground electrode; and a plasma generation circuit. The radio-frequency electrode is disposed on an outer periphery side of the dielectric pipe and a radio-frequency voltage is applied to the radio-frequency electrode. The ground electrode is disposed on an end portion side of the dielectric pipe such that a distance from the radio-frequency electrode is smaller on an inner side than on an outer side of the dielectric pipe, and a ground potential is applied to the ground electrode. The plasma generation circuit generates plasma inside the dielectric pipe. The exhaust pipe device functions as a part of an exhaust pipe disposed between a film forming chamber and a vacuum pump that exhausts gas inside the film forming chamber.
1. An exhaust pipe device functioning as a part of an exhaust pipe disposed between a film forming chamber and a vacuum pump that exhausts gas inside the film forming chamber, the device comprising:
a dielectric pipe;
a radio-frequency electrode which is disposed on an outer periphery side of the dielectric pipe and to which a radio-frequency voltage is applied;
a ground electrode which is disposed on an end portion side of the dielectric pipe such that a closest distance from the radio-frequency electrode is smaller on an inner side than on an outer side of the dielectric pipe, and to which a ground potential is applied; and
a plasma generation circuit that generates plasma inside the dielectric pipe.
2. The device according to claim 1 , wherein the ground electrode includes a ring-shaped first protrusion disposed on the inner side of the dielectric pipe.
3. The device according to claim 1 , wherein the ground electrode includes a flange disposed on the end portion side of the dielectric pipe.
4. The device according to claim 2 , wherein
the ground electrode further includes a flange disposed on the end portion side of the dielectric pipe, and
the first protrusion is electrically connected to the flange.
5. The device according to claim 4 , wherein the first protrusion is formed integrally with the flange.
6. The device according to claim 2 , wherein the ground electrode further includes a ring-shaped second protrusion disposed on the outer side of the dielectric pipe.
7. The device according to claim 6 , wherein a distance between a tip of the first protrusion and the radio-frequency electrode is smaller than a distance between a tip of the second protrusion and the radio-frequency electrode.
8. The device according to claim 1 further comprising an outer pipe disposed outside the dielectric pipe, wherein
the radio-frequency electrode is disposed between the outer pipe and the dielectric pipe.
9. The device according to claim 8 further comprising a seal mechanism disposed at the end portion of the dielectric pipe and an end portion of the outer pipe.
10. The device according to claim 1 further comprising a dielectric that covers the radio-frequency electrode outside the dielectric pipe.
11. The device according to claim 1 further comprising a dielectric that covers the ground electrode outside the dielectric pipe.
12. The device according to claim 1 , wherein
the ground electrode includes a first part overlapping with the dielectric pipe on the inner side of the dielectric pipe and forming the closest distance from the radio-frequency electrode on the inner side of the dielectric pipe.
13. The device according to claim 12 , wherein an overlapping length of the first part of the ground electrode with the dielectric pipe on the inner side of the dielectric pipe is larger than an overlapping length with the dielectric pipe of a second part of the ground electrode that forms the closest distance from the radio-frequency electrode on the outer side of the dielectric pipe.
14. The device according to claim 13 , wherein the second part of the ground electrode overlaps with the dielectric pipe on the outer side of the dielectric pipe.
15. An exhaust pipe device functioning as a part of an exhaust pipe disposed between a film forming chamber and a vacuum pump that exhausts gas inside the film forming chamber, the device comprising:
a dielectric pipe;
a radio-frequency electrode which is disposed on an outer periphery side of the dielectric pipe and to which a radio-frequency voltage is applied;
a ground electrode which is disposed on an end portion side of the dielectric pipe such that a closest distance from the radio-frequency electrode is smaller on an inner side than on an outer side of the dielectric pipe, and to which a ground potential is applied;
a dielectric that covers at least one of the radio-frequency electrode and the ground electrode outside the dielectric pipe; and
a plasma generation circuit that generates plasma inside the dielectric pipe.
16. The device according to claim 15 , wherein
the ground electrode includes a flange disposed on the end portion side of the dielectric pipe, and
a portion of the flange outside the dielectric pipe is covered with the dielectric.
17. The device according to claim 15 further comprising an outer pipe disposed outside the dielectric pipe, wherein
the radio-frequency electrode is disposed between the outer pipe and the dielectric pipe.
18. The device according to claim 17 further comprising a dielectric that covers a surface of the outer pipe made of a conductive material, the surface facing the radio-frequency electrode.
19. The device according to claim 15 , wherein the ground electrode includes a ring-shaped first protrusion disposed on an inner side of the dielectric pipe.
20. The device according to claim 19 , wherein
the ground electrode further includes a ring-shaped second protrusion disposed on an outer side of the dielectric pipe, and
the second protrusion is covered with the dielectric.