Substrate with water repellent oil repellent layer, vapor deposition material, and method for producing substrate with water repellent oil repellent layer
To provide a water/oil repellent layer-provided substrate having a water/oil repellent layer excellent in abrasion resistance, a deposition material and a method for producing a water/oil repellent layer-provided substrate. The water/oil repellent layer-provided substrate comprises a substrate, an undercoat layer and a water/oil repellent layer in this order. The water/oil repellent layer comprises a condensate of a fluorinated compound having a reactive silyl group, the undercoat layer contains an oxide contains silicon and at least one element of boron and phosphorus, and a ratio of the total molar concentration of boron and phosphorus in the undercoat layer to the molar concentration of silicon in the undercoat layer is from 0.003 to 9.
1. A water/oil repellent layer-provided substrate comprising a substrate, an undercoat layer and a water/oil repellent layer in this order,
wherein the water/oil repellent layer comprises a condensate of a fluorinated compound having a reactive silyl group,
the undercoat layer comprises an oxide comprising silicon and at least one element selected from the group consisting of boron and phosphorus, and
a ratio of a total molar concentration of boron and phosphorus in the undercoat layer to a molar concentration of silicon in the undercoat layer is from 0.6 to 9.
2. The water/oil repellent layer-provided substrate according to claim 1 , wherein the oxide comprises silicon, and boron or silicon and phosphorus.
3. The water/oil repellent layer-provided substrate according to claim 1 , wherein the oxide further comprises aluminum.
4. The water/oil repellent layer-provided substrate according to claim 3 , wherein a ratio of a molar concentration of aluminum to the molar concentration of silicon is 0.5 or less.
5. The water/oil repellent layer-provided substrate according to claim 1 , wherein the oxide further comprises an alkali metal element.
6. The water/oil repellent layer-provided substrate according to claim 5 , wherein a ratio of a molar concentration of the alkali metal element to the molar concentration of silicon is 1.0 or less.
7. The water/oil repellent layer-provided substrate according to claim 1 , wherein the fluorinated compound is a fluorinated ether compound having a poly(oxyfluoroalkylene) chain and a reactive silyl group.
8. A deposition material comprising an oxide comprising silicon and at least one element selected from the group consisting of boron and phosphorus,
wherein a ratio of a total molar concentration of boron and phosphorus to a molar concentration of silicon is from 0.6 to 9.
9. The deposition material according to claim 8 , wherein the oxide comprises silicon and boron.
10. The deposition material according to claim 8 , wherein the oxide further comprises aluminum.
11. The deposition material according to claim 8 , wherein the oxide further comprises an alkali metal element.
12. The deposition material according to claim 8 , wherein the oxide further comprises at least one metal element selected from the group consisting of nickel, iron, titanium, zirconium, molybdenum and tungsten, and
a ratio of a molar concentration of the metal element to the molar concentration of silicon is 0.01 or less.
13. The deposition material according to claim 8 , which is a molten body, a sintered body or granules.
14. A method for producing a water/oil repellent layer-provided substrate comprising a substrate, an undercoat layer and a water/oil-repellent layer in this order,
which comprises forming on the substrate the undercoat layer containing an oxide containing silicon and at least one element of boron and phosphorus, the ratio of the total molar concentration of boron and phosphorus to the molar concentration of silicon being from 0.6 to 9, by deposition method using the deposition material as defined in claim 8 , and
forming on the undercoat layer the water/oil repellent layer comprising a condensate of a fluorinated compound having a reactive silyl group.
15. A method for producing a water/oil repellent layer-provided substrate comprising a substrate, an undercoat layer and a water/oil-repellent layer in this order,
which comprises forming on the substrate the undercoat layer containing an oxide containing silicon and at least one element of boron and phosphorus, the ratio of the total molar concentration of boron and phosphorus to the molar concentration of silicon being from 0.6 to 9, by wet coating method using a coating fluid containing a compound containing silicon, at least one of a compound containing boron and a compound containing phosphorus, and a liquid medium, and
forming on the undercoat layer the water/oil repellent layer comprising a condensate of a fluorinated compound having a reactive silyl group.