Optical device for enhancing resolution of an image or for reducing speckle noise

1. Optical device ( 1 ), comprising:

an optical element ( 21 ) configured to interact with a light beam (L) when the light beam impinges on the optical element ( 21 ),

a support structure ( 3 ) configured to support the optical element ( 21 ),

at least one elastic member ( 600 , 90 ) connected to the support structure ( 3 ) and to the optical element ( 21 ), so that the optical element ( 21 ) is movable with respect to the support structure ( 3 ),

an actuator ( 5 ) configured to move the optical element ( 21 ) by means of a Lorentz force, wherein the actuator ( 5 ) comprises a first coil ( 60 ) and a second coil ( 61 ), wherein each coil comprises multiple windings, wherein the windings of the respective coil ( 60 , 61 ) extend around a winding axis (W) of the respective coil ( 60 , 61 ), wherein said coils ( 60 , 61 ) are integrated into the support structure ( 3 ), and wherein the actuator ( 5 ) comprises a first magnet ( 70 ) facing the first coil ( 60 ) and a second magnet ( 71 ) facing the second coil ( 61 ), wherein the first and the second magnet ( 70 , 71 ) are connected to the optical element ( 21 ), and wherein the magnets ( 70 , 71 ) each comprise a magnetization (M 1 , M 2 ) oriented at an angle (α) between 80° and 100° with respect to a plane extending perpendicular to the winding axes (W) of the coils ( 60 , 61 ),

wherein the at least one elastic member is a first spring structure ( 600 ) connected to the front side ( 3 a ) of the support structure ( 3 ), wherein the first spring structure ( 600 ) comprises a first frame ( 607 ) to which the optical element ( 21 ) is connected, wherein the first frame is tiltable about a first axis (A) with respect to the support frame ( 3 ), and wherein the actuator is configured to tilt the optical element about the first axis (A), and wherein the first spring structure ( 600 ) comprises a first holding member ( 602 ) that is connected via a first torsion bar ( 601 ) to the first frame ( 607 ), and wherein the first spring structure ( 600 ) comprises a second holding member ( 604 ) that is connected via a second torsion bar ( 603 ) to the first frame ( 607 ), wherein the first holding member ( 602 ) is connected to the third arm ( 352 ) of the support frame ( 3 ) on the front side of the support frame ( 3 ) and wherein the second holding member ( 604 ) is connected to the fourth arm ( 353 ) of the support frame ( 3 ) on the front side of the support frame ( 3 ), wherein particularly the first torsion bar ( 601 ) and the second torsion bar ( 602 ) are aligned with the first axis (A).

2. Optical device according to claim 1 , characterized in that the support structure ( 3 ) comprises a printed circuit board.

3. Optical device according to claim 1 , characterized in that the support structure is a support frame ( 3 ) configured to support the optical element ( 21 ), wherein the support structure ( 3 ) surrounds an opening ( 31 ) of the support structure ( 3 ) that extends from a front side ( 3 a ) of the support structure ( 3 ) to a back side ( 3 b ) of the support structure ( 3 ) so that light can pass the support structure ( 3 ), and wherein particularly the support frame ( 3 ) comprises a first arm ( 350 ) that opposes a second arm ( 351 ) of the support frame ( 3 ), and wherein the first and the second arm ( 350 , 351 ) are connected by a third and a fourth arm ( 352 , 353 ) of the support frame ( 3 ), and wherein the first coil ( 60 ) is an L-shaped first coil ( 60 ) that comprises a first portion ( 60 a ) that is integrated into the first arm ( 350 ) of the support frame ( 3 ) and a second portion ( 60 b ) that runs perpendicular to the first portion ( 60 a ) of the first coil ( 60 ), wherein the second portion ( 60 b ) of the first coil ( 60 ) is integrated into the fourth arm ( 353 ) of the support frame ( 3 ), and wherein the second coil ( 61 ) is an L-shaped second coil ( 61 ) that comprises a first portion ( 61 a ) that is integrated into the second arm ( 351 ) of the support frame ( 3 ) and a second portion ( 61 b ) that runs perpendicular to the first portion ( 61 a ) of the second coil ( 61 ), wherein the second portion ( 61 b ) of the second coil ( 61 ) is integrated into the third arm ( 352 ) of the support frame ( 3 ).

4. Optical device according to claim 1 , characterized in that the optical device ( 1 ) comprises a third magnet ( 72 ) facing the second coil ( 61 ) and a fourth magnet ( 73 ) facing the first coil ( 60 ), wherein the third and the fourth magnet ( 72 , 73 ) are connected to the first frame ( 607 ), and wherein the first magnet ( 70 ) faces the first portion ( 60 a ) of the first coil ( 60 ), and wherein the second magnet ( 71 ) faces the first portion ( 61 a ) of the second coil ( 61 ), and wherein the third magnet ( 72 ) faces the second portion ( 61 b ) of the second coil ( 61 ), and wherein the fourth magnet ( 73 ) faces the second portion ( 60 b ) of the first coil ( 60 ), wherein particularly the third and fourth magnet ( 72 , 73 ) each comprise a magnetization (M 3 , M 4 ) that is oriented at an angle (α) between 80° and 100° with respect to said plane.

5. The optical device according to claim 1 , characterized in that the at least one elastic member is one of or comprises one of: an elastically deformable membrane, an elastically deformable string ( 90 ); an elastically deformable, particularly bendable, pillar ( 90 ).

6. Optical device according to claim 1 , wherein the magnetizations (M 1 , M 2 ) of the magnets ( 70 , 71 ) are oriented orthogonal to the first frame ( 607 ).

7. Optical device ( 1 ), comprising:

an optical element ( 21 ) configured to interact with a light beam (L) impinging on the optical element ( 21 ),

a support frame ( 3 ) configured to support the optical element ( 21 ),

a spring structure ( 900 ) connected to the support frame ( 3 ), wherein the spring structure ( 900 ) comprises a frame ( 909 ) to which the optical element ( 21 ) is connected, wherein the frame ( 909 ) is moveable with respect to the support frame ( 3 ), and wherein the spring structure ( 900 ) comprises a first holding member ( 902 ) that is connected via a first spring element ( 901 ) to the frame ( 909 ), and

an actuator ( 5 ) configured to move the frame ( 909 ) with respect to the support frame ( 3 ) by means of a Lorentz force,

wherein the spring structure ( 900 ) comprises a second holding member ( 904 ) that is connected via a second spring element ( 903 ) to the frame ( 909 ), and wherein the spring structure ( 900 ) comprises a third holding member ( 906 ) that is connected via a third spring element ( 905 ) to the frame ( 909 ).

8. Optical device according to claim 7 , characterized in that the spring structure ( 900 ) comprises a fourth holding member ( 908 ) that is connected via a fourth spring element ( 907 ) to the frame ( 909 ).

9. Optical device according to claim 7 , characterized in that the respective spring element ( 901 , 903 , 905 , 907 ) comprises one of: a curved portion with at least one inflection point, an angled portion.

10. Optical device according to claim 7 , characterized in that the support frame ( 3 ) is formed by or comprises a printed circuit board.

11. Optical device according to claim 7 , characterized in that the support frame ( 3 ) comprises a first arm ( 350 ) that opposes a second arm ( 351 ) of the support frame ( 3 ), and wherein the first and the second arm ( 350 , 351 ) are connected by a third and a fourth arm ( 352 , 353 ) of the support frame ( 3 ).

12. Optical device according to claim 11 , characterized in that the first and the third arm ( 350 , 352 ) are joined at a first corner portion ( 910 ) of the support frame ( 3 ), and wherein the third and the second arm ( 352 , 351 ) are joined at a second corner portion ( 911 ) of the support frame ( 3 ), and wherein the second and the fourth arm ( 351 , 353 ) are joined at a third corner portion ( 912 ) of the support frame ( 3 ), and wherein the fourth and the first arm ( 353 , 350 ) are joined at a fourth corner portion ( 913 ) of the support frame ( 3 ).

13. Optical device according to claim 12 , characterized in that, the first holding member ( 902 ) is connected to the first corner portion ( 910 ) of the support frame ( 3 ), and wherein a second holding member ( 904 ) is connected to the second corner portion ( 911 ) of the support frame ( 3 ), and wherein a third holding member ( 906 ) is connected to the third corner portion ( 912 ) of the support frame ( 3 ), and wherein a fourth holding member ( 908 ) is connected to the fourth corner portion ( 913 ) of the support frame ( 3 ).

14. Optical device according to claim 7 , characterized in that the actuator ( 5 ) comprises a first coil ( 60 ), a second coil ( 61 ), a third coil ( 62 ) and a fourth coil ( 63 ), wherein said coils ( 60 , 61 , 62 , 63 ) are integrated into the support frame ( 3 ), and wherein the actuator ( 5 ) comprises a first magnet ( 70 ) facing the first coil ( 60 ), a second magnet ( 71 ) facing the second coil ( 61 ), a third magnet ( 72 ) facing the third coil ( 62 ), and a fourth magnet ( 73 ) facing the fourth coil ( 63 ), wherein the magnets ( 70 , 71 , 72 , 73 ) are connected to the frame ( 909 ).

15. Optical device according to claim 14 , characterized in that the first coil ( 60 ) is integrated into the first arm ( 350 ) of the support frame ( 3 ), and wherein the second coil ( 61 ) is integrated into the second arm ( 351 ) of the support frame ( 3 ), and wherein the third coil ( 62 ) is integrated into the third arm ( 352 ) of the support frame ( 3 ), and wherein the fourth coil ( 63 ) is integrated into the fourth arm ( 353 ) of the support frame ( 3 ).

16. Optical device according to claim 14 , characterized in that the first magnet ( 70 ) comprises a first magnetization (M 1 ), and wherein the second magnet ( 71 ) comprises a second magnetization (M 2 ), and wherein the third magnet ( 72 ) comprises a third magnetization (M 3 ), and wherein the fourth magnet ( 73 ) comprises a fourth magnetization (M 4 ), and wherein the respective magnetization (M 1 , M 2 , M 3 , M 4 ) extends orthogonal to the frame ( 909 ).

17. Optical device according to claim 14 , characterized in that the respective magnet ( 70 , 71 , 72 , 73 ) faces the respective coil ( 60 , 61 , 62 , 63 ) such that a magnetic field (B) generated by the respective magnet ( 70 , 71 , 72 , 73 ) comprises a vector component parallel to the support frame ( 3 ) and perpendicular to a current (I) flowing through the respective coil ( 60 , 61 , 62 , 63 ) at the location of the respective coil ( 60 , 61 , 62 , 63 ) such that a Lorentz force is generated when an electrical current is applied to the respective coil ( 60 , 61 , 62 , 63 ) that pushes the respective magnet ( 70 , 71 , 72 , 73 ) away from the respective coil ( 60 , 61 , 62 , 63 ) or pulls the respective magnet ( 70 , 71 , 72 , 73 ) towards the respective coil ( 60 , 61 , 62 , 63 ) depending on the direction of the electrical current (I) in the respective coil ( 60 , 61 , 62 , 63 ).

18. Optical device ( 1 ), comprising:

an optical element ( 21 ) configured to interact with a light beam (L) impinging on the optical element ( 21 ),

a support frame ( 3 ) configured to support the optical element ( 21 ),

a spring structure ( 900 ) connected to the support frame ( 3 ), wherein the spring structure ( 900 ) comprises a frame ( 909 ) to which the optical element ( 21 ) is connected, wherein the frame ( 909 ) is moveable with respect to the support frame ( 3 ), and wherein the spring structure ( 900 ) comprises a first holding member ( 902 ) that is connected via a first spring element ( 901 ) to the frame ( 909 ), and

an actuator ( 5 ) configured to move the frame ( 909 ) with respect to the support frame ( 3 ) by means of a Lorentz force,

wherein the actuator ( 5 ) comprises a first coil ( 60 ), a second coil ( 61 ), a third coil ( 62 ) and a fourth coil ( 63 ), wherein said coils ( 60 , 61 , 62 , 63 ) are integrated into the support frame ( 3 ), and wherein the actuator ( 5 ) comprises a first magnet ( 70 ) facing the first coil ( 60 ), a second magnet ( 71 ) facing the second coil ( 61 ), a third magnet ( 72 ) facing the third coil ( 62 ), and a fourth magnet ( 73 ) facing the fourth coil ( 63 ), wherein the magnets ( 70 , 71 , 72 , 73 ) are connected to the frame ( 909 ).

19. Optical device according to claim 18 , characterized in that the first coil ( 60 ) is integrated into the first arm ( 350 ) of the support frame ( 3 ), and wherein the second coil ( 61 ) is integrated into the second arm ( 351 ) of the support frame ( 3 ), and wherein the third coil ( 62 ) is integrated into the third arm ( 352 ) of the support frame ( 3 ), and wherein the fourth coil ( 63 ) is integrated into the fourth arm ( 353 ) of the support frame ( 3 ).

20. Optical device according to claim 18 , characterized in that the first magnet ( 70 ) comprises a first magnetization (M 1 ), and wherein the second magnet ( 71 ) comprises a second magnetization (M 2 ), and wherein the third magnet ( 72 ) comprises a third magnetization (M 3 ), and wherein the fourth magnet ( 73 ) comprises a fourth magnetization (M 4 ), and wherein the respective magnetization (M 1 , M 2 , M 3 , M 4 ) extends orthogonal to the frame ( 909 ).

21. Optical device according to claim 18 , characterized in that the respective magnet ( 70 , 71 , 72 , 73 ) faces the respective coil ( 60 , 61 , 62 , 63 ) such that a magnetic field (B) generated by the respective magnet ( 70 , 71 , 72 , 73 ) comprises a vector component parallel to the support frame ( 3 ) and perpendicular to a current (I) flowing through the respective coil ( 60 , 61 , 62 , 63 ) at the location of the respective coil ( 60 , 61 , 62 , 63 ) such that a Lorentz force is generated when an electrical current is applied to the respective coil ( 60 , 61 , 62 , 63 ) that pushes the respective magnet ( 70 , 71 , 72 , 73 ) away from the respective coil ( 60 , 61 , 62 , 63 ) or pulls the respective magnet ( 70 , 71 , 72 , 73 ) towards the respective coil ( 60 , 61 , 62 , 63 ) depending on the direction of the electrical current (I) in the respective coil ( 60 , 61 , 62 , 63 ).

22. Optical device ( 1 ), comprising:

an optical element ( 21 ) configured to interact with a light beam (L) impinging on the optical element ( 21 ),

a support frame ( 3 ) configured to support the optical element ( 21 ),

a spring structure ( 900 ) connected to the support frame ( 3 ), wherein the spring structure ( 900 ) comprises a frame ( 909 ) to which the optical element ( 21 ) is connected, wherein the frame ( 909 ) is moveable with respect to the support frame ( 3 ), and wherein the spring structure ( 900 ) comprises a first holding member ( 902 ) that is connected via a first spring element ( 901 ) to the frame ( 909 ), and

an actuator ( 5 ) configured to move the frame ( 909 ) with respect to the support frame ( 3 ) by means of a Lorentz force,

wherein the actuator ( 5 ) comprises a first magnet ( 70 ), a second magnet ( 71 ), a third magnet ( 72 ), and a fourth magnet ( 73 ), wherein the first magnet ( 70 ) comprises a first magnetization (M 1 ), and wherein the second magnet ( 71 ) comprises a second magnetization (M 2 ), and wherein the third magnet ( 72 ) comprises a third magnetization (M 3 ), and wherein the fourth magnet ( 73 ) comprises a fourth magnetization (M 4 ), and wherein the respective magnetization (M 1 , M 2 , M 3 , M 4 ) extends orthogonal to the frame ( 909 ).