Plasma processing apparatus
View Patent ↗A plasma processing apparatus 100 including: a chamber 101 having a dielectric window; a coil 102 placed outside the chamber so as to face the dielectric window; a FS electrode 103 having a plate shape and placed on the chamber side of the coil; a first power source 104 for supplying a high-frequency power of a first frequency to the coil 102 ; a second power source 105 for supplying a high-frequency power of a second frequency which is different from the first frequency, to the FS electrode 103 ; a first matcher 106 placed between the first power source and the coil; a second matcher 107 placed between the second power source and the FS electrode; and a first frequency attenuation filter connected between the second matcher and the FS electrode, and configured to allow transmission of the high-frequency power of the second frequency and inhibit transmission of the high-frequency power of the first frequency.
1. A plasma processing apparatus, comprising:
a chamber having a dielectric window;
a coil placed outside the chamber so as to face the dielectric window;
a Faraday shield electrode having a plate shape and placed on a side of the chamber of the coil;
a first power source for supplying a high-frequency power of a first frequency to the coil;
a second power source for supplying a high-frequency power of a second frequency to the Faraday shield electrode, the second frequency being different from the first frequency;
a first matcher for matching a first impedance between the first power source and the coil;
a second matcher for matching a second impedance between the second power source and the Faraday shield electrode; and
a first frequency attenuation filter configured to allow transmission of the high-frequency power of the second frequency and inhibit transmission of the high-frequency power of the first frequency; and
a second frequency attenuation filter configured to allow transmission of the high-frequency power of the first frequency and inhibit transmission of the high-frequency power of the second frequency, wherein
the second matcher is connected to an output side of the second power source, and is connected to the Faraday shield electrode via the first frequency attenuation filter,
the second frequency attenuation filter is connected to an output side of the first power source, and
the first power source is connected to the coil via the first matcher placed on a coil side of the second frequency attenuation filter.
2. The plasma processing apparatus according to claim 1 , wherein the first matcher is directly connected to the coil.
3. The plasma processing apparatus according to claim 1 , wherein the first frequency attenuation filter is directly connected to the Faraday shield electrode.
4. The plasma processing apparatus according to claim 1 , wherein the first frequency is higher than the second frequency, the first frequency attenuation filter being a low pass filter which attenuates components of input signals of frequencies higher than a cutoff frequency, the cutoff frequency being at between the first frequency and the second frequency.
5. The plasma processing apparatus according to claim 1 , wherein the first frequency is lower than the second frequency, the first frequency attenuation filter being a high pass filter which attenuates components of input signals of frequencies lower than a cutoff frequency, the cutoff frequency being at between the first frequency and the second frequency.
6. The plasma processing apparatus according to claim 1 , wherein space exists between the coil and the Faraday shield electrode.
7. A plasma processing apparatus, comprising:
a chamber having a dielectric window;
a coil placed outside the chamber so as to face the dielectric window;
a Faraday shield electrode placed on a side of the chamber of the coil with space existing between the coil and the Faraday shield electrode;
a first power source for supplying a high-frequency power of a first frequency to the coil;
a second power source for supplying a high-frequency power of a second frequency to the Faraday shield electrode, the second frequency being different from the first frequency;
a first matcher for matching a first impedance between the first power source and the coil;
a second matcher for matching a first impedance between the second power source and the Faraday shield electrode; and
a first frequency attenuation filter configured to allow transmission of the high-frequency power of the second frequency and inhibit transmission of the high-frequency power of the first frequency; and
a second frequency attenuation filter configured to allow transmission of the high-frequency power of the first frequency and inhibit transmission of the high-frequency power of the second frequency, wherein
the first power source is connected to the coil via the second frequency attenuation filter so as to prevent the high-frequency power of the second frequency having entered the coil from the second power source via the space to enter into the first power source, and
the second power source is connected to the Faraday shield electrode via the first frequency attenuation filter so as to prevent the high-frequency power of the first frequency having entered the Faraday shield electrode from the first power source via the space to enter into the second power source.
8. The plasma processing apparatus according to claim 7 , wherein the coil is formed of a conductor expanding spirally, and
the second frequency attenuation filter is connected to an output side of the first power source, and
the first power source is connected to the coil via the first matcher placed on a coil side of the second frequency attenuation filter.
9. The plasma processing apparatus according to claim 7 , wherein the Faraday shield electrode has a plate shape, and
the second matcher is connected to an output side of the second power source and is connected to the Faraday shield electrode via the first frequency attenuation filter.
10. The plasma processing apparatus according to claim 7 , wherein the first matcher is directly connected to the coil.