Sensor device
A sensor device includes a sensor element, a substrate, and a bonding wire. Over the substrate, provided is the sensor element. The bonding wire forms at least part of a connection path that electrically connects the sensor element and the substrate together. The bonding wire is provided to connect two connection surfaces that intersect with each other.
1. A sensor device comprising:
a sensor element;
a substrate over which the sensor element is provided; and
a bonding wire forming at least part of a connection path that electrically connects the sensor element and the substrate together, the bonding wire being provided to connect two connection surfaces that intersect with each other;
a supporting member installed over the substrate with the sensor element provided on the supporting member; and
a coupling member that couples the supporting member to the substrate,
wherein
the sensor element is electrically connected to the substrate via the supporting member,
one of the two connection surfaces is one surface of the supporting member,
the supporting member is installed indirectly over the substrate via the coupling member, and
an adhesive layer bonding the coupling member and the substrate together has a larger Young's modulus than an adhesive layer bonding the coupling member and the supporting member together.
2. The sensor device of claim 1 , wherein
the substrate has an installation surface over which the supporting member is installed,
the supporting member has a supporting surface on which the sensor element is provided,
a normal to the supporting surface is aligned with the installation surface, and
one of the two connection surfaces is the supporting surface.
3. The sensor device of claim 2 , wherein
the supporting member has, on the supporting surface, a supporting-end electrode, to which one end portion of the bonding wire is connected, and
the supporting-end electrode is located closer to the substrate than the sensor element is, when viewed from the sensor element on the supporting surface.
4. The sensor device of claim 2 , wherein
the supporting member has, on the supporting surface, a supporting-end electrode, to which one end portion of the bonding wire is connected, and
the supporting-end electrode is located opposite from the substrate with respect to the sensor element, when viewed from the sensor element on the supporting surface.
5. The sensor device of claim 1 , wherein one of the two connection surfaces is one surface of the substrate.
6. The sensor device of claim 1 , wherein
the bonding wire includes a plurality of bonding wires,
each of the two connection surfaces is provided with a plurality of electrodes, to which the plurality of bonding wires are respectively connected, and
the plurality of electrodes are arranged along a virtual line that is parallel to both of the two connection surfaces.
7. The sensor device of claim 1 , wherein
the sensor element includes an element electrode,
the element electrode includes: an Au electrode layer; and a UBM layer stacked on the Au electrode layer, and
a coefficient of thermal expansion of the UBM layer has a value between a coefficient of thermal expansion of AuSn and a coefficient of thermal expansion of SiO 2 .