Semiconductor memory device
A semiconductor memory device is disclosed. The semiconductor memory device may include a data storage layer including data storage devices, an interconnection layer disposed on the data storage layer, and a selection element layer provided between the data storage layer and the interconnection layer. The interconnection layer may include bit lines extending in a first direction. The selection element layer may include a cell transistor connected between one of the data storage devices and one of the bit lines, and the cell transistor may include an active pattern and a word line, which crosses the active pattern and is extended in a second direction crossing the first direction.
1. A semiconductor memory device, comprising:
an interlayer insulating layer;
an active pattern on the interlayer insulating layer;
a first word line and a second word line on the interlayer insulating layer and crossing the active pattern, the first word line and the second word line enclosing a side surface of the active pattern and a top surface of the active pattern, and the first word line and the second word line extending in a first direction;
a first capacitor connected to a first end portion of the active pattern;
a second capacitor connected to a second end portion of the active pattern;
a bit line contact plug connected to the active pattern, the bit line contact plug being between the first word line and the second word line; and
a bit line connected to the bit line contact plug, the bit line extending in a second direction and crossing the first word line and the second word line.
2. The semiconductor memory device of claim 1 , wherein,
a third direction is perpendicular to the first direction and the second direction,
the active pattern is between the first capacitor and the bit line in the third direction, and
the active pattern is between the second capacitor and the bit line in the third direction.
3. The semiconductor memory device of claim 1 , wherein
each of the first word line and the second word line has a first thickness on the active pattern and has a second thickness on the interlayer insulating layer, and
the second thickness is larger than the first thickness.
4. The semiconductor memory device of claim 1 , further comprising:
a semiconductor substrate below the interlayer insulating layer, wherein
the interlayer insulating layer is on the semiconductor substrate,
the first capacitor and the second capacitor are located at a first level from the semiconductor substrate,
the active pattern is located at a second level, which is higher than the first level, from the semiconductor substrate, and
the bit line is located at a third level, which is higher than the second level, from the semiconductor substrate.
5. The semiconductor memory device of claim 1 , further comprising:
a lower insulating layer defining openings,
wherein each of the first capacitor and the second capacitor comprise a first electrode in a corresponding opening of the openings in the lower insulating layer, a second electrode in the corresponding opening of the lower insulating layer in which the first electrode is disposed, and a capacitor dielectric layer between the first electrode and the second electrode, and
wherein the interlayer insulating layer is between the active pattern and the lower insulating layer.
6. The semiconductor memory device of claim 5 , further comprising:
contact plugs penetrating the interlayer insulating layer, wherein
the contact plugs are coupled to the second electrode of the first capacitor and the second electrode of the second capacitor, respectively, and
the contact plugs contact a bottom surface of the active pattern.
7. The semiconductor memory device of claim 1 , further comprising:
a semiconductor substrate below the interlayer insulating layer, wherein
the interlayer insulating layer is on the semiconductor substrate,
the bit line is located at a first level from the semiconductor substrate,
the active pattern is located at a second level, which is higher than the first level, from the semiconductor substrate, and
the first capacitor and the second capacitor are located at a third level, which is higher than the second level, from the semiconductor substrate.
8. The semiconductor memory device of claim 1 , wherein
the bit line contact plug penetrates the interlayer insulating layer, and
the bit line contact plug contacts a bottom surface of the active pattern.
9. The semiconductor memory device of claim 1 , further comprising:
a first semiconductor substrate;
a second semiconductor substrate facing the first semiconductor substrate, the second semiconductor substrate including peripheral circuits integrated thereon;
first bonding pads; and
second bonding pads, wherein
the bit line is one of a plurality of bit lines,
the first bonding pads are connected to the bit lines,
the second bonding pads are connected to the peripheral circuits integrated on the second semiconductor substrate,
the first capacitor and the second capacitor are on the first semiconductor substrate,
the interlayer insulating layer covers the first capacitor and the second capacitor on the first semiconductor substrate, and
the first bonding pads are coupled to the second bonding pads.
10. The semiconductor memory device of claim 1 , further comprising:
a semiconductor substrate including peripheral circuits integrated on the semiconductor substrate; and
a lower insulating layer covering the peripheral circuits, wherein
the bit line is one of a plurality of bit lines,
the bit lines are connected to the peripheral circuits in the lower insulating layer, and
the interlayer insulating layer is between the active pattern and the lower insulating layer.