Bonded body and acoustic wave element
A bonded body includes a supporting substrate; a piezoelectric material substrate; a first bonding layer provided on the supporting substrate and having a composition of Si (1-x) O x (0.008≤x≤0.408); a second bonding layer provided on the piezoelectric material substrate and having a composition of Si (1-y) O y (0.008≤y≤0.408); and an amorphous layer provided between the first bonding layer and second bonding layer. The oxygen ratio of the amorphous layer is higher than the oxygen ratio of the first bonding layer and oxygen ratio of the second bonding layer.
1. A bonded body comprising:
a supporting substrate;
a piezoelectric material substrate;
a first bonding layer provided on said supporting substrate and having a composition of Si (1-x) O x (0.008≤x≤0.408);
a second bonding layer provided on said piezoelectric material substrate and having a composition of Si (1-y) O y (0.008≤y≤0.408); and
an amorphous layer provided between said first bonding layer and said second bonding layer,
wherein an oxygen ratio of said amorphous layer is higher than an oxygen ratio of said first bonding layer and an oxygen ratio of said second bonding layer.
2. The bonded body of claim 1 , wherein a difference of said oxygen ratio of said amorphous layer and of said oxygen ratio of said first bonding layer and a difference of said oxygen ratio of said amorphous layer and of said oxygen ratio of said second bonding layer are 0.5 atom % or larger, respectively.
3. The bonded body of claim 1 , wherein an argon ratio of said amorphous layer is higher than an argon ratio of said first bonding layer and an argon ratio of said second bonding layer.
4. The bonded body of claim 3 , wherein a difference of said argon ratio of said amorphous layer and of said argon ratio of said first bonding layer and a difference of said argon ratio of said amorphous layer and of said argon ratio of said second bonding layer are 1 atom % or larger, respectively.
5. The bonded body of claim 1 , wherein a material of said supporting substrate is selected from the group consisting of silicon, sialon, sapphire, cordierite, mullite and alumina.
6. The bonded body of claim 1 , wherein a material of said piezoelectric material substrate is selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate solid solution.
7. The bonded body of claim 1 , further comprising an intermediate layer provided between said supporting substrate an said first bonding layer.
8. The bonded body of claim 1 , further comprising an intermediate layer provided between said piezoelectric material substrate and said second bonding layer.
9. An acoustic wave device comprising:
said bonded body of claim 1 ; and
an electrode provided on said piezoelectric material substrate.