Monoalkyl tin compounds with low polyalkyl contamination, their compositions and methods
A pure composition comprises a monoalkyltin trialkoxide compound represented by the chemical formula RSn(OR′) 3 or a monoalkyl tin triamide compound represented by the chemical formula RSn(NR′ 2 ) 3 and no more than 4 mole % dialkyltin compounds relative to the total tin amount, where R is a hydrocarbyl group with 1-31 carbon atoms, and wherein R′ is a hydrocarbyl group with 1-10 carbon atoms. Methods are described for the formation of the pure compositions. A solid composition comprises a monoalkyl triamido tin compound represented by the chemical formula RSn—(NR′COR″) 3 , where R is a hydrocarbyl group with 1-31 carbon atoms, and where R′ and R″ are independently a hydrocarbyl group with 1-10 carbon atoms. The compositions are suitable for the formation of resist compositions suitable for EUV patterning in which the compositions have a high EUV absorption.
1. A high purity liquid composition comprising a mixture of a compound represented by the formula (CH 2 ) 5 CHSn(N(CH 3 ) 2 ) 3 and no more than 4 mole % dialkyltin compounds as an impurity relative to the total tin amount.
2. The composition according to claim 1 further comprising one or more alkyl-tin compounds with a different alkyl ligand relative to the cyclohexyl compound and no more than 4 mole % dialkyltin compounds as an impurity relative to the total tin amount.
3. The composition of claim 2 wherein the different alkyl ligand is methyl, ethyl, tert-butyl, tert-amyl, or a combination thereof.
4. A solution comprising an organic solvent and the high purity liquid composition according to claim 1 .
5. The solution of claim 4 having a concentration of the compound represented by the formula (CH 2 ) 5 CHSn(N(CH 3 ) 2 ) 3 of from about 0.01M to about 2M.
6. The solution of claim 4 wherein the organic solvent comprises an alkane, an aromatic hydrocarbon, an ether, an alcohol, or a mixture thereof.
7. The solution of claim 4 further comprising RSnO (3/2-x/2) (OH) x (0<x<3), where R is an alkyl, cycloalkyl, branched alkyl, or substituted alkyl moiety having from 1 to 31 carbon atoms.
8. A method to selectively form a monoalkyltin trialkoxide compound with low dialkyl tin contamination, the method comprising,
reacting a (CH 2 ) 5 CHSn(N(CH 3 ) 2 ) 3 compound with an alcohol represented by the formula HOR″ in an organic solvent to form (CH 2 ) 5 CHSn(OR″) 3 , wherein the (CH 2 ) 5 CHSn(N(CH 3 ) 2 ) 3 reagent comprises the high purity liquid composition according to claim 1 , wherein R″ is a hydrocarbyl group with 1-10 carbon atoms.
9. The method of claim 8 wherein the reaction is performed with a tetradentate chelating agent in an amount from about 0.5 mole % to about 15 mole % relative to the tin molar quantity.
10. A solution comprising an organic solvent and the (CH 2 ) 5 CHSn(OR″) 3 prepared according to the method of claim 8 .
11. The solution of claim 10 having a concentration of from about 0.01M to about 2M and wherein the solvent comprises an alcohol.