Forming metal contacts on metal gates
A method for forming a semiconductor device includes forming a metal gate stack having a gate dielectric layer and a gate electrode disposed over the gate dielectric layer. The gate electrode includes a first metal layer and a second metal layer. The method further includes performing a plasma treatment to a top surface of the metal gate stack and forming a conductive layer over the treated top surface of the metal gate stack. A top portion of the conductive layer is formed above a top surface of the gate dielectric layer, and a bottom portion of the conductive layer penetrates into the first and the second metal layers of the gate electrode at different distances.
1. A method, comprising:
forming a metal gate stack having a gate dielectric layer and a gate electrode disposed over the gate dielectric layer, wherein the gate electrode includes a first metal layer and a second metal layer;
performing a plasma treatment onto a top surface of the metal gate stack; and
forming a conductive layer over the treated top surface of the metal gate stack, such that a top portion of the conductive layer is formed above a top surface of the gate dielectric layer, and a bottom portion of the conductive layer is formed below the top surface of the gate dielectric layer, the bottom portion extends into the first and the second metal layers of the gate electrode at different distances.
2. The method of claim 1 , wherein the metal gate stack further includes a capping layer disposed between the gate dielectric layer and the gate electrode, wherein the top portion of the conductive layer is also formed above a top surface of the capping layer.
3. The method of claim 1 , wherein the forming of the conductive layer includes cyclic deposition of a first and a second gaseous precursors.
4. The method of claim 3 , wherein the first gaseous precursor includes a metal element and a halogen, and the second gaseous precursor includes hydrogen or silane.
5. The method of claim 4 , wherein the metal element includes tungsten, cobalt, titanium, aluminum, copper, or gold.
6. The method of claim 1 , wherein the bottom portion of the conductive layer includes an interfacial layer in direct contact with the gate electrode, the interfacial layer having chemical elements included in both the gate electrode and the conductive layer.
7. The method of claim 1 , further comprising:
forming a gate contact feature on the conductive layer, wherein the forming of the conductive layer includes continuous deposition of a single gaseous precursor.
8. The method of claim 7 , wherein the forming of the conductive layer is by atomic layer deposition, and the forming of the gate contact feature is by chemical vapor deposition.
9. The method of claim 1 , wherein a portion of the conductive layer extending into the first metal layer or the second metal layer has a conical profile.
10. A method, comprising:
forming a metal gate structure, wherein the metal gate structure includes a gate dielectric layer and a gate electrode; and
selectively depositing a conductive layer on a top surface of the gate electrode to form a top portion of the conductive layer above a top surface of the gate dielectric layer and a bottom portion of the conductive layer below the top surface of the gate dielectric layer,
wherein the bottom portion of the conductive layer includes a penetrating portion penetrating into a first metal layer of the gate electrode without penetrating into a second metal layer of the gate electrode.
11. The method of claim 10 , wherein the first metal layer is sandwiched between two portions of the second metal layer.
12. The method of claim 10 , wherein the second metal layer is sandwiched between two portions of the first metal layer.
13. The method of claim 12 , wherein the penetrating portion penetrates into top surfaces of each of the two portions of the first metal layer.
14. The method of claim 10 , further comprising:
forming an interlayer dielectric (ILD) layer over the conductive layer;
forming a contact opening in the ILD layer to expose the top portion of the conductive layer; and
forming a metal contact in the contact opening to contact the top portion of the conductive layer.
15. The method of claim 14 , wherein the conductive layer includes tungsten.
16. The method of claim 15 , wherein the metal contact includes tungsten, cobalt, or aluminum.
17. A method, comprising:
forming a metal gate structure, wherein the metal gate structure includes a gate dielectric layer and a gate electrode, and wherein a top surface of the gate dielectric layer and a top surface of the gate electrode are coplanar; and
selectively depositing a conductive layer on the top surface of the gate electrode, thereby forming a top portion of the conductive layer above a top surface of the gate dielectric layer and a bottom portion of the conductive layer below the top surface of the gate dielectric layer, wherein the bottom portion has a greater vertical distance than the top portion.
18. The method of claim 17 , wherein before the selectively depositing, further comprising:
performing a plasma treatment onto a top surface of the metal gate structure, the plasma treatment includes bombarding the top surface of the metal gate structure with plasma comprising argon or ammonia.
19. The method of claim 17 ,
wherein the gate electrode further includes a first and a second metal layer,
wherein the bottom portion includes a penetrating portion that preferentially penetrates into the first metal layer without preferentially penetrating into the second metal layer.
20. The method of claim 19 , wherein the first metal layer is a work function metal layer, and the second metal layer is a bulk conductive layer.