Overlay measurement targets design
A device area includes at least a first layer of photoresist and a second layer of photoresist. First layer metrology targets are positioned at an edge of one of the sides of the first layer of the mat. The first layer metrology targets have a relaxed pitch less than a device pitch. Secondary electron and back-scattered electron images can be simultaneously obtained.
1. A device comprising:
a mat in a device area having four sides, wherein the mat includes at least a first layer of photoresist and a second layer of photoresist disposed on the first layer;
a plurality of extensions in the first layer that extend beyond the sides of the mat, wherein each of the extensions in the first layer includes a first layer metrology target, and wherein the first layer metrology targets have a relaxed pitch less than a device pitch in the second layer of the mat; and
wherein the second layer defines a pattern of apertures and the second layer covers at least part of each of the first layer metrology targets.
2. The device of claim 1 , wherein the device area is part of a DRAM device.
3. The device of claim 1 , wherein the relaxed pitch is larger than 40 nm.
4. The device of claim 1 , further comprising a plurality of extensions of the second layer, wherein each of the extensions of the second layer is part of the second layer at an edge of one of the four sides of the mat.
5. The device of claim 4 , wherein the extensions in the second layer extend beyond the sides of the mat.
6. The device of claim 1 , wherein the mat is smaller than 60 μm in height and width, and wherein the extensions of the first layer are smaller than the mat.
7. The device of claim 1 , further comprising a third layer disposed on an opposite side of the second layer from the first layer, wherein the third layer includes a plurality of extensions of the third layer, wherein each of the extensions of the third layer is at an edge of one of the four sides of the mat.
8. The device of claim 7 , wherein the third layer defines a plurality of apertures.
9. The device of claim 1 , wherein the relaxed pitch is four times less than the device pitch.
10. The device of claim 9 , wherein the relaxed pitch is eight times less than the device pitch.
11. A method comprising:
providing a device that includes:
a mat in a device area having four sides, wherein the mat includes at least a first layer of photoresist and a second layer of photoresist disposed on the first layer;
a plurality of extensions in the first layer that extend beyond the sides of the mat, wherein each of the extensions in the first layer includes a first layer metrology target, and wherein the first layer metrology targets have a relaxed pitch less than a device pitch in the second layer of the mat; and
wherein the second layer defines a pattern of apertures and the second layer covers at least part of each of the first layer metrology targets;
obtaining an image of at least one of the first layer overlay targets with an electron beam metrology tool, wherein the obtaining includes simultaneously obtaining a secondary electron image of the second layer and obtaining a back-scattered electron image of the first layer with the relaxed pitch; and
performing, using a processor, metrology with the image.
12. The method of claim 11 , wherein the metrology is overlay or critical dimension.
13. The method of claim 11 , wherein the secondary electron image of the second layer is a non-zero distance from the back-scattered electron image of the first layer, and wherein the secondary image of the second layer is a non-zero distance from a closest of the sides.
14. The method of claim 11 , wherein the relaxed pitch is unresolved by the electron beam metrology tool and the device pitch is resolved by the electron beam metrology tool.
15. The method of claim 11 , wherein the device area is part of a DRAM device.
16. The method of claim 11 , wherein the relaxed pitch is larger than 40 nm.
17. The method of claim 11 , wherein the device further comprises a plurality of extensions of the second layer, wherein each of the extensions of the second layer is part of the second layer at an edge of one of the four sides of the mat, wherein the extensions of the second layer extend beyond the sides of the mat.
18. The method of claim 17 , wherein the device further comprises a third layer disposed on an opposite side of the second layer from the first layer, wherein the third layer includes a plurality of extensions of the third layer, wherein each of the extensions of the third layer is part of the third layer at an edge of one of the four sides of the mat, and wherein the third layer defines a plurality of apertures, and wherein the method further comprises:
obtaining a secondary electron image of the third layer with the pattern of apertures; and
obtaining a back-scattered electron image of the first layer.
19. The method of claim 11 , wherein the mat is smaller than 60 μm in height and width, and wherein the extensions of the first layer are smaller than the mat.