Hybrid panel method of manufacturing electronic devices and electronic devices manufactured thereby
A hybrid panel method of (and apparatus for) manufacturing electronic devices, and electronic devices manufactured thereby. As non-limiting examples, various aspects of this disclosure provide an apparatus for manufacturing an electronic device, where the apparatus is operable to, at least, receive a panel to which a subpanel is coupled, cut around a subpanel through a layer of material, and remove such subpanel from the panel. The apparatus may also, for example, be operable to couple to an upper side of the subpanel, and remove the subpanel from the panel by, at least in part, operating to rotate the subpanel relative to the panel.
1. An apparatus for manufacturing an electronic device, wherein the apparatus is operable to at least:
receive a panel to which a plurality of subpanels are coupled, the plurality of subpanels comprising a first subpanel;
couple to an upper side of the first subpanel; and
remove the first subpanel from the panel by, at least in part, operating to rotate the first subpanel relative to the panel and lift the first subpanel from the panel in a direction mostly orthogonal to an upper side of the panel.
2. The apparatus of claim 1 , wherein said apparatus is operable to rotate the first subpanel relative to the panel and lift the first subpanel from the panel simultaneously.
3. The apparatus of claim 1 , wherein said apparatus is operable to remove the first subpanel from the panel by, at least in part, operating to cut a layer of a material holding the first subpanel to the panel.
4. The apparatus of claim 1 , wherein the panel is rectangular and the first subpanel comprises a wafer.
5. The apparatus of claim 3 , wherein the material comprises a first dielectric layer that is on the upper side of the panel and on the upper side of the first subpanel.
6. The apparatus of claim 3 , wherein the material comprises an adhesive layer that is on the upper side of the panel and on a lower side of the first subpanel.
7. An apparatus for manufacturing an electronic device, wherein the apparatus is operable to at least:
receive a panel to which a plurality of subpanels are coupled, the plurality of subpanels comprising a first subpanel;
couple to an upper side of the first subpanel; and
remove the first subpanel from the panel by, at least in part, operating to rotate the first subpanel relative to the panel and slide the first subpanel from the panel in a direction mostly parallel to an upper side of the panel.
8. The apparatus of claim 7 , wherein the apparatus is operable to cut around the first subpanel through a layer of a material by, at least in part, operating to move a first blade around at least a first partial perimeter of the first subpanel.
9. The apparatus of claim 8 , wherein the first partial perimeter comprises a portion of a circle.
10. The apparatus of claim 8 , wherein the material comprises a first dielectric layer that is on the upper side of the panel and on the upper side of the first subpanel.
11. The apparatus of claim 8 , wherein the material comprises an adhesive layer that is on the upper side of the panel and on a lower side of the first subpanel.
12. The apparatus of claim 7 , wherein the apparatus is operable to simultaneously rotate the first subpanel relative to the panel and to slide the first subpanel from the panel, to remove the first subpanel from the panel.
13. The apparatus of claim 7 , wherein the panel is rectangular and the first subpanel is circular.
14. The apparatus of claim 7 , wherein the first subpanel comprises a wafer.
15. The apparatus of claim 7 , wherein said apparatus is operable to rotate the first subpanel relative to the panel and slide the first subpanel from the panel simultaneously.
16. A method of manufacturing a semiconductor device, the method comprising:
receiving a panel to which a plurality of subpanels are coupled, the plurality of subpanels comprising a first subpanel;
coupling to an upper side of the first subpanel; and
removing the first subpanel from the panel by, at least in part:
rotating the first subpanel relative to the panel; and
lifting the first subpanel from the panel in a first direction mostly orthogonal to an upper side of the panel or sliding the first subpanel from the panel in a second direction mostly parallel to the upper side of the panel.
17. The method of claim 16 , comprising:
cutting around the first subpanel through a layer of a material; and
wherein said cutting comprises moving a first blade around at least a first partial perimeter of the first subpanel.
18. The method of claim 17 , wherein the layer of the material is on an upper side of the panel outside a footprint of the first subpanel and on an upper side of the first subpanel.
19. The method of claim 16 , wherein said removing the first subpanel from the panel comprises sliding the first subpanel from the panel in the second direction mostly parallel to the upper side of the panel.
20. The method of claim 16 , wherein said removing the first subpanel from the panel comprises lifting the first subpanel from the panel in the first direction mostly orthogonal to the upper side of the panel.