Semiconductor device and manufacturing method of semiconductor device
A semiconductor device includes a stacked body including a conductive pattern and an insulating pattern, a cell plug passing through the stacked body, a semiconductor layer, a peripheral transistor arranged on the semiconductor layer, a first conductor coupling the peripheral transistor to the cell plug, a second conductor coupled to the conductive pattern, a pass plug coupled to the second conductor, and a pass gate surrounding the pass plug, wherein the pass gate is arranged at substantially a same level as the semiconductor layer.
1. A semiconductor device, comprising:
a stacked body including a conductive pattern and an insulating pattern;
a cell plug passing through the stacked body;
a semiconductor layer;
a peripheral transistor coupled to the semiconductor layer;
a first conductor coupling the peripheral transistor to the cell plug;
a second conductor coupled to the conductive pattern;
a pass plug coupled to the second conductor; and
a pass gate surrounding the pass plug,
wherein the pass gate is arranged at substantially a same level as the semiconductor layer.
2. The semiconductor device of claim 1 , wherein the semiconductor layer and the pass gate include a same material.
3. The semiconductor device of claim 2 , wherein the semiconductor layer and the pass gate include doped silicon.
4. The semiconductor device of claim 1 , wherein:
the semiconductor layer includes a first surface on which the peripheral transistor is arranged, and
the pass gate includes a third surface arranged at substantially a same level as the first surface of the semiconductor layer.
5. The semiconductor device of claim 4 , wherein a level of a second surface of the semiconductor layer opposing the first surface of the semiconductor layer is at substantially a same as a level of a fourth surface of the pass gate opposing the third surface of the pass gate.
6. The semiconductor device of claim 1 , further comprising a separating structure electrically insulating the semiconductor layer from the pass gate.
7. The semiconductor device of claim 6 , wherein:
the separating structure includes a first separating layer and a second separating layer in the first separating layer, and
the first separating layer includes an insulating material.
8. The semiconductor device of claim 7 , wherein the second separating layer includes a semiconductor material.
9. A semiconductor device, comprising:
a stacked body including a conductive pattern and an insulating pattern;
a cell plug passing through the stacked body;
a semiconductor layer;
a peripheral transistor coupled to the semiconductor layer;
a first conductor coupling the peripheral transistor to the cell plug;
a second conductor coupled to the conductive pattern;
a pass plug coupled to the second conductor; and
a pass gate surrounding the pass plug,
wherein the pass gate includes a same material as the semiconductor layer.
10. The semiconductor device of claim 9 , wherein the pass gate and the semiconductor layer include a semiconductor material.
11. The semiconductor device of claim 10 , wherein the pass gate and the semiconductor layer include silicon doped with P type impurities.
12. The semiconductor device of claim 9 , wherein the first conductor comprises a bit line.
13. The semiconductor device of claim 9 , further comprising a separating structure separating the pass gate from the semiconductor layer.
14. The semiconductor device of claim 9 , wherein:
the pass plug includes a first pass layer and a second pass layer surrounding the first pass layer, and
the first pass layer is spaced apart from the pass gate by the second pass layer.
15. The semiconductor device of claim 14 , wherein:
the first pass layer includes a semiconductor material, and
the second pass layer includes an insulating material.
16. The semiconductor device of claim 15 , wherein the first pass layer comprises:
a first portion adjacent to the pass gate;
a second portion arranged above the first portion; and
a third portion arranged under the first portion,
wherein the first portion includes undoped polysilicon, and
wherein the second and third portions include doped polysilicon.
17. A semiconductor device, comprising:
a stacked body including alternately stacked conductive patterns and insulating patterns;
a cell plug passing through the stacked body;
pass plugs electrically coupled to the conductive patterns, respectively, the pass plugs including first pass plugs arranged in a first direction and second pass plugs arranged in the first direction;
a first pass gate surrounding the first pass plugs;
a second pass gate surrounding the second pass plugs; and
a separating structure separating the first pass gate from the second pass gate.
18. The semiconductor device of claim 17 , wherein the first pass plugs are spaced apart from the second pass plugs with the separating structure interposed between the first pass plugs and the second pass plugs.
19. The semiconductor device of claim 17 , wherein the separating structure includes:
a first separator extending in the first direction; and
a second separator extending in a second direction crossing the first direction.
20. The semiconductor device of claim 17 , wherein the conductive patterns include:
a first conductive pattern, wherein the first conductive pattern is coupled to one of the first pass plugs;
a second conductive pattern adjacent to the first conductive pattern, wherein the second conductive pattern is coupled to one of the second pass plugs; and
a third conductive pattern adjacent to the first conductive pattern, wherein the third conductive pattern is coupled to a second pass plug different from the second pass plug coupled to the second conductive pattern.
21. The semiconductor device of claim 20 , wherein the first pass plug coupled to the first conductive pattern is arranged between the second pass plug coupled to the second conductive pattern and the second pass plug coupled to the third conductive pattern.