Semiconductor device, semiconductor testing device, and semiconductor device testing method
An abnormality resulting from connection between a plurality of substrates is easily detected in a semiconductor device including a multilayer semiconductor substrate. The semiconductor device includes a plurality of semiconductor substrates, a connection member, a power supply terminal, and an observation terminal. The connection member is electrically connected on joint surfaces of the plurality of semiconductor substrates to form at least one connection line that extends over the plurality of semiconductor substrates. The power supply terminal is connected to one end of the connection line, and the observation terminal is connected to the other end of the connection line. Power is supplied to the power supply terminal. The observation terminal is used to observe a resistance state of the connection line.
1. A semiconductor device, comprising:
a first semiconductor substrate;
a second semiconductor substrate;
a connection member that is electrically connected on joint surfaces of the first semiconductor substrate and the second semiconductor substrate to form at least one connection line that extends over the first semiconductor substrate and the second semiconductor substrate,
wherein the first semiconductor substrate and the second semiconductor substrate are bonded together on the joint surfaces;
a power supply terminal connected to one end of the at least one connection line; and
an observation terminal connected to another end of the at least one connection line.
2. The semiconductor device according to claim 1 , wherein the connection member includes a metal electrode that is on the joint surfaces of the first semiconductor substrate and the second semiconductor substrate and that is brought into contact so as to be electrically connected.
3. The semiconductor device according to claim 1 , wherein the connection member includes a through-hole that penetrates at least one of the first semiconductor substrate or the second semiconductor substrate.
4. The semiconductor device according to claim 1 , wherein the connection line is in a vicinity of regions to be observed on the first semiconductor substrate and the second semiconductor substrate.
5. The semiconductor device according to claim 1 , wherein the connection member includes a plurality of the connection lines each of which has one end connected to the power supply terminal and which are formed in different regions on the first semiconductor substrate and the second semiconductor substrate.
6. The semiconductor device according to claim 5 , further comprising:
a selector configured to:
select that selects any one of other ends of the plurality of connection lines; and
connect the selected other end to the observation terminal.
7. A semiconductor testing device, comprising
a semiconductor device including:
a connection member that is electrically connected on joint surfaces of a first semiconductor substrate and a second semiconductor substrate to form at least one connection line that extends over the first semiconductor substrate and the second semiconductor substrate,
wherein the first semiconductor substrate and the second semiconductor substrate are bonded together on the joint surfaces;
a power supply terminal connected to one end of the at least one connection line, and
an observation terminal connected to another end of the at least one connection line;
a power supply configured to supply power to the power supply terminal; and
an observation instrument configured to:
connect to the observation terminal, and
observe a current-carrying state.
8. The semiconductor testing device according to claim 7 , wherein
the power supply includes a direct-current power supply, and
the observation instrument includes an ammeter that is configured to measure a current passed through the observation terminal from the power supply terminal.
9. The semiconductor testing device according to claim 7 , wherein the connection member includes a plurality of the connection lines each of which has one end connected to the power supply terminal and which are formed in different regions on the first semiconductor substrate and the second semiconductor substrate.
10. The semiconductor testing device according to claim 9 , further comprising:
a selector configured to:
select one of other ends of the plurality of connection lines; and
connect the selected other end to the observation terminal.
11. A testing method for a semiconductor device, including:
a connection member that is electrically connected on joint surfaces of a first semiconductor substrate and a second semiconductor substrate to form a plurality of connection lines that extend over the first semiconductor substrate and the second semiconductor substrate,
a power supply terminal connected to one end of each of the plurality of connection lines,
a selector configured to select one of other ends of the plurality of connection lines, and
an observation terminal connected to an output of the selector, the testing method comprising:
supplying power to the power supply terminal;
sequentially selecting the plurality of connection lines by the selector;
observing current-carrying states of the plurality of connection lines via the observation terminal; and
detecting a connection line indicating a resistance state higher than a threshold as a failure location.