Semiconductor device
A device includes a semiconductive fin having source and drain regions and a channel region between the source and drain regions, a gate feature over the channel region of the semiconductive fin, a first spacer around the gate feature, source and drain features respectively in the source and drain regions of the semiconductive fin, an interlayer dielectric layer around the first spacer, and a void between the first spacer and the interlayer dielectric layer and spaced apart from the gate feature and the source and drain features.
1. A device, comprising:
a semiconductive fin having source and drain regions and a channel region between the source and drain regions;
an isolation dielectric layer surrounding a bottom of the semiconductive fin;
a gate feature over the channel region of the semiconductive fin;
a first spacer around the gate feature;
source and drain features respectively in the source and drain regions of the semiconductive fin;
a gate oxide layer extending from one of the source and drain features, through beneath the gate feature, to another one of the source and drain features;
an interlayer dielectric layer around the first spacer; and
a void between the first spacer and the interlayer dielectric layer and spaced apart from the gate feature and the source and drain features, wherein the void is directly above the gate oxide layer and has:
a first air gap portion directly above the semiconductive fin;
a second air gap portion directly above the isolation dielectric layer, wherein the first air gap portion and the second air gap portion have different heights; and
a contact etch stop layer between the first spacer and the interlayer dielectric layer, wherein a top surface of the contact etch stop layer is lower than a top surface of the interlayer dielectric layer.
2. The device of claim 1 , further comprising a second spacer around the first spacer, wherein a top surface of the second spacer is higher than the top surface of the contact etch stop layer.
3. The device of claim 2 , further comprising a third spacer around the second spacer.
4. The device of claim 1 , further comprising a second spacer around and spaced apart from the first spacer.
5. The device of claim 1 , further comprising a second spacer around the first spacer, wherein the void is between the second spacer and the interlayer dielectric layer.
6. The device of claim 5 , further comprising a third spacer around the second spacer, wherein a top surface of the third spacer is lower than a top surface of the second spacer and at least partially defines a bottom surface of the void.
7. The device of claim 5 , wherein the first spacer has a first portion extending along sidewalls of the gate feature and a second portion extending laterally from a bottom end of the first portion of the first spacer, the second spacer has a first portion extending along sidewalls of the first portion of the first spacer and a second portion extending along a top surface of the second portion of the first spacer, and at least a portion of a top surface of the second portion of the second spacer at least partially defines a bottom surface of the void.
8. The device of claim 1 , wherein the first spacer has a first portion extending along sidewalls of the gate feature and a second portion extending laterally from a bottom end of the first portion of the first spacer.
9. A device, comprising:
a semiconductive fin having source and drain regions and a channel region between the source and drain regions;
an isolation dielectric layer surrounding a bottom of the semiconductive fin;
a gate feature over the channel region of the semiconductive fin;
a first spacer around the gate feature;
a second spacer around the first spacer;
an interlayer dielectric layer around the second spacer;
a void between the second spacer and the interlayer dielectric layer;
source and drain features respectively in the source and drain regions of the semiconductive fin; and
a contact etch stop layer between the second spacer and the interlayer dielectric layer, wherein a top surface of the contact etch stop layer is lower than a top surface of the interlayer dielectric layer.
10. The device of claim 9 , further comprising a third spacer around the second spacer and defining the void.
11. The device of claim 10 , wherein the third spacer has a top surface lower than the top surface of the interlayer dielectric layer.
12. A device, comprising:
a semiconductive fin having source and drain regions and a channel region between the source and drain regions;
a gate feature over the channel region of the semiconductive fin;
a first spacer around and in contact with the gate feature;
source and drain features respectively in the source and drain regions of the semiconductive fin;
an interlayer dielectric layer around the first spacer;
a void between the first spacer and the interlayer dielectric layer; and
a contact stop layer having a first portion directly over the gate feature, a second portion directly over the first spacer, and a third portion directly over the void, wherein a bottom surface of the third portion of the contact stop layer is lower than a top surface of the first spacer; and
a contact etch stop layer between the first spacer and the interlayer dielectric layer, wherein a top surface of the contact etch stop layer is lower than a top surface of the interlayer dielectric layer.
13. The device of claim 12 , wherein the interlayer dielectric layer has a sidewall that faces the first spacer, and the contact stop layer is in contact with an upper portion of the sidewall of the interlayer dielectric layer.
14. The device of claim 12 , further comprising an isolation dielectric layer surrounding a bottom of the semiconductive fin and under the gate feature, wherein a part of the third portion of the contact stop layer is directly over the isolation dielectric layer.
15. The device of claim 12 , further comprising a second spacer over the first spacer and defining a bottom surface of the void, wherein the third portion of the contact stop layer is wider than the second spacer.
16. The device of claim 12 , wherein the void exposes a sidewall of the interlayer dielectric layer.
17. The device of claim 12 , wherein the void exposes the top surface of the contact etch stop layer.
18. The device of claim 1 , wherein the top surface of the contact etch stop layer at least partially defines a bottom surface of the void.
19. The device of claim 1 , wherein the interlayer dielectric layer has a side surface exposed in the void.
20. The device of claim 9 , wherein the top surface of the contact etch stop layer is lower than a top surface of the first spacer.