Packaged bulk acoustic wave resonator on acoustic wave device
A packaged acoustic wave filter component can include an acoustic wave device including a first piezoelectric layer and an interdigital transducer electrode on the first piezoelectric layer. A support layer may be included over the acoustic wave device, and the packaged hybrid filter component can also include a bulk acoustic wave resonator over the support layer. A cap layer may extend over and encapsulate the bulk acoustic wave resonator. One or more external vias may extend through the support layer and the underlying layers of the acoustic wave device to provide electrical communication with the packaged bulk acoustic wave generator.
1. A packaged hybrid filter component comprising:
an acoustic wave device including a piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer;
a support layer located over the interdigital transducer electrode;
a bulk acoustic wave resonator supported by the support layer, the bulk acoustic wave resonator being included in an acoustic wave filter arranged to filter a radio frequency signal;
a cap layer encapsulating the bulk acoustic wave resonator; and
an external via in electrical communication with the bulk acoustic wave resonator, the external via extending through the support layer and the piezoelectric layer.
2. The packaged hybrid filter component of claim 1 wherein the acoustic wave device is included in the acoustic wave filter.
3. The packaged hybrid filter component of claim 1 wherein the acoustic wave device is included in a second acoustic wave filter.
4. The packaged hybrid filter component of claim 1 wherein the acoustic wave device is included in a cancellation circuit coupled to the filter.
5. The packaged hybrid filter component of claim 1 further comprising an external connection pad in electrical communication with the external via.
6. The packaged hybrid filter component of claim 5 wherein the external connection pad is supported by a side of the piezoelectric layer opposite the side of the piezoelectric layer on which the interdigital transducer electrode is located.
7. The packaged hybrid filter component of claim 5 wherein the external connection pad serves as an input contact or an output contact of the packaged hybrid filter.
8. The packaged hybrid filter component of claim 5 further comprising a support substrate, the piezoelectric layer located between the support substrate and the interdigital transducer electrode, and the external connection pad is supported by a side of the support substrate opposite the side of the support substrate on which the piezoelectric layer is located.
9. The packaged hybrid filter component of claim 8 further comprising a functional layer located between the piezoelectric layer and the support substrate.
10. The packaged hybrid filter component of claim 1 further comprising an internal via extending through the support layer, the internal via in electrical communication with the bulk acoustic wave resonator and the interdigital transducer electrode.
11. The packaged hybrid filter component of claim 10 wherein the internal via is electrically connected to a bulk acoustic wave interconnect electrode supported by the support layer and extending between the bulk acoustic wave resonator and the internal via.
12. The packaged hybrid filter component of claim 10 wherein the internal via is electrically connected to an acoustic wave interconnect electrode supported by the piezoelectric layer and extending between the interdigital transducer electrode and the internal via.
13. The packaged hybrid filter component of claim 10 wherein the internal via includes a conformal layer of conductive material formed over an aperture in the support layer, or a conductive material filling an aperture in the support layer.
14. A packaged hybrid filter component comprising:
a surface acoustic wave device including a piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer;
an additional layer located over the interdigital transducer electrode, the additional layer configured such that a surface acoustic wave of the surface acoustic wave device propagates along the additional layer;
a bulk acoustic wave resonator supported by the additional layer, the bulk acoustic wave resonator being included in an acoustic wave filter arranged to filter a radio frequency signal;
a cap layer encapsulating the bulk acoustic wave resonator; and
an external via in electrical communication with the bulk acoustic wave resonator, the external via extending through the support layer and the piezoelectric layer.
15. The packaged hybrid filter component of claim 14 wherein the bulk acoustic wave resonator includes an air cavity having a shape that is impacted by the additional layer.
16. The packaged hybrid filter component of claim 14 wherein the bulk acoustic wave resonator includes an air cavity in physical contact with the additional layer.
17. The packaged hybrid filter component of claim 16 wherein the air cavity is shared with the interdigital transducer electrode of the surface acoustic wave device.
18. The packaged hybrid filter component of claim 14 wherein the bulk acoustic wave resonator is in contact with a portion of the additional layer.
19. The packaged hybrid filter component of claim 14 wherein the bulk acoustic wave resonator includes a solid acoustic mirror on the additional layer.
20. The packaged hybrid filter component of claim 19 wherein the solid acoustic mirror is in physical contact with the additional layer.