IP Library › Granted Patent US 11,935,938
Granted Patent B2
US 11,935,938 · App. 17/320,183 · Granted Mar 19, 2024

Devices and methods for creating ohmic contacts using bismuth

Inventors: Pin-Chun Shen (Changhua, TW); Jing Kong (Winchester, MA)
Assignee: Massachusetts Institute of Technology
H01L29/4983H01L29/45H01L29/66628
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Quick Facts
Patent No.
US 11,935,938
App. No.
17/320,183
Granted
Mar 19, 2024
Kind
B2
Abstract

Devices, such as transistors, that use bismuth to create ohmic contacts are provided, as are methods of manufacturing the same. The transistors, such as field-effect transistors, can include one or more two-dimensional materials, and electrical contact areas can be created on the two-dimensional material(s) using bismuth. The bismuth can help to provide energy-barrier free, ohmic contacts, and the resulting devices can have performance levels that rival or exceed state-of-the-art devices that utilize three-dimensional materials, like silicon. The two-dimensional materials can include transition metal dichalcogenides, such as molybdenum disulfide.

Claims (19)

1. A semiconductor device, comprising:

a two-dimensional material;

one or more electrical contacts, the at least one electrical contact of the one or more electrical contacts is disposed on the two-dimensional material;

a dielectric layer directly coupled to the two-dimensional material; and

a gate directly coupled to the dielectric layer, the two-dimensional material being located between the gate and the electrical contacts,

wherein at least one electrical contact of the one or more electrical contacts comprises one or more of: bismuth, antimony, or arsenic,

wherein the at least one electrical contact of the one or more electrical contacts comprises bismuth, is configured to induce gap-state saturation, and is disposed on the two-dimensional material forming an ohmic contact, and

wherein the two-dimensional material includes one or more of molybdenum disulfide, molybdenum diselenide, tungsten disulfide, tungsten diselenide, or heterostructures thereof, indium telluride, silicene, germanene, diamondene, gallium oxide, or combinations thereof.

2. The semiconductor device of claim 1 , wherein the one or more electrical contacts comprise a bismuth/2D material stack.

3. The semiconductor device of claim 1 , wherein the semiconductor device comprises a transistor.

4. The semiconductor device of claim 3 , wherein an ON-current of the transistor is approximately in the range of about 450 μAμm −1 to about 2 mAμm −1 .

5. The semiconductor device of claim 3 , wherein an ON-current of the transistor is approximately in the range of about 500 μAμm −1 to about 1135 μAμm −1 .

6. The semiconductor device of claim 3 , with the semiconductor device further comprising the two-dimensional material and the at least one electrical contact of the one or more electrical contacts being disposed on the two-dimensional material, wherein the transistor comprises:

a gate end;

a source end; and

a drain end,

wherein the source end and the drain end are located on the two-dimensional material and the gate end is located between the source end and the drain end.

7. The semiconductor device of claim 3 , wherein the transistor comprises a field-effect transistor.

8. The semiconductor device of claim 7 , wherein the field-effect transistor comprises at least one of a beyond Moore transistor, a metal-oxide-semiconductor field-effect transistor, a tunnel field-effect transistor, a ferroelectric negative capacitance field-effect transistor, a junction field-effect transistor, a fin field-effect transistor, a gate-all-around field effect transistor, a multi-bridge-channel field-effect transistor, a vertically-stacked field effect transistor, a spin field-effect transistor, or a photovoltage field-effect transistor.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 26, 2023
From: SHEN, PIN-CHUN; KONG, JING
To: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Reel/Frame 063450/0925 →
Continuity (2)
Provisional Application 63024141 · May 13, 2020
Related Publication 20210359099A1 · Nov 18, 2021