Annealed workpiece manufacturing method, laser anneal base stage, and laser anneal processing apparatus

1. An annealed workpiece manufacturing method of irradiating a workpiece with laser light and annealing the workpiece, the method comprising:

a support step of supporting the workpiece, wherein in the support step, at least in a laser light irradiation area of the workpiece on which laser light having a line beam shape is irradiated, the workpiece is supported by a plurality of cam members arranged along a long axis direction of the laser light;

an irradiation step of irradiating the supported workpiece with the laser light;

a measurement step of measuring a height position of the workpiece along the long axis direction of the laser light in the laser light irradiation area; and

a height position adjustment step of determining a rotation position of each cam member, based on the measured height position,

wherein:

an upper end height position of each of the cam members is adjustable according to the rotation position thereof,

the rotation position of each of the cam members or of each group including a plurality of the cam members is independently controllable,

each cam member includes a blower that causes gas blown from the cam member to come into contact with a lower surface of the workpiece on an immediately upper side of the cam member, irrespective of the rotation position of the cam member,

in the irradiation step, the workpiece is irradiated, while relatively being scanned, with the laser light, and

in the support step, accompanied by relative scanning with the laser light, the workpiece, at least in the laser light irradiation area, is supported by gas floating caused by the cam members.

2. A laser anneal base stage comprising:

a plurality of supports that support a workpiece to be irradiated with laser light having a line beam shape, wherein the supports include a plurality of cam members that are arranged along a long axis direction of the laser light and support the workpiece from a lower surface thereof in correspondence to at least an irradiation area where the workpiece is irradiated with the laser light, wherein each cam member includes a cam rotational driver that rotates the cam member, and wherein each cam member includes a blower that causes gas blown from the cam member to come into contact with a lower surface of the workpiece on an immediately upper side of the cam member, irrespective of a rotation position of the cam member;

a scanning apparatus that relatively moves the workpiece with respect to the laser light, and performs scanning with the laser light, wherein, accompanied by scanning with the laser light, the workpiece, at least in the laser light irradiation area, is supported by gas floating caused by the cam members;

a meter that measures a height position of the workpiece along the long axis direction of the laser light in the irradiation area irradiated with the laser light; and

a controller that controls the cam rotational driver,

wherein:

the rotation position of each of the cam members or of each group including a plurality of the cam members is independently controllable by the controller, and

the controller receives a measured result of the meter, and performs control of adjusting a rotation position of each cam member, based on the measured result, and of adjusting the workpiece to a predefined height position.

3. The laser anneal base stage according to claim 2 , wherein an installation position of each of the cam members is fixed with respect to the irradiation position of the laser light, and other supports not including the cam members are movable together with the workpiece.

4. The laser anneal base stage according to claim 2 , wherein each cam member includes a porous material at least on a gas blowing surface side thereof.

5. A laser anneal processing apparatus comprising:

the laser anneal base stage according to claim 2 ;

a laser light source that outputs laser light; and

an optical system that guides the laser light, and irradiates the workpiece supported by the laser anneal base stage with the laser light.