IP Library › Granted Patent US 11,948,862
Granted Patent B2
US 11,948,862 · App. 17/188,707 · Granted Apr 2, 2024

Package structures and method of forming the same

Inventors: Chen-Hua Yu (Hsinchu, TW); Chih-Hua Chen (Zhubei, TW); Hao-Yi Tsai (Hsinchu, TW); Yu-Feng Chen (Hsinchu, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H01L23/481H01L21/4846H01L21/76898H01L23/13H01L23/5385H01L23/5389H01L24/19H01L24/20H01L24/97H10N10/01H01L21/561H01L21/568H01L23/49811H01L24/16H01L24/32H01L24/48H01L24/73H01L24/83H01L24/92H01L2224/0401H01L2224/04042H01L2224/04105H01L2224/12105H01L2224/16227H01L2224/32225H01L2224/48091H01L2224/48227H01L2224/73267H01L2224/83005H01L2224/83191H01L2224/83192H01L2224/92244H01L2224/97H01L2924/00014H01L2924/14H01L2924/1421H01L2924/1431H01L2924/1434H01L2924/1436H01L2924/1437H01L2924/1461
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Quick Facts
Patent No.
US 11,948,862
App. No.
17/188,707
Granted
Apr 2, 2024
Kind
B2
Abstract

Package structures and methods of forming package structures are described. A method includes placing a first package within a recess of a first substrate. The first package includes a first die. The method further includes attaching a first sensor to the first package and the first substrate. The first sensor is electrically coupled to the first package and the first substrate.

Claims (47)

1. A structure comprising:

a first package within a recess in a first substrate, the first package comprising:

a first die encapsulated with an encapsulant; and

a first redistribution structure over the first die and the encapsulant, the first redistribution structure being electrically coupled to the first die, the first die being between the first redistribution structure and a bottom surface of the recess in the first substrate;

a first sensor bonded to the first package and the first substrate by a first set of solder connectors, the first sensor spans across a gap between a sidewall of the recess of the first substrate and an exterior sidewall of the first package; and

a second sensor bonded to the first package by a second set of solder connectors.

2. The structure of claim 1 , wherein the encapsulant has a first surface and a second surface, the first die extending from the first surface to the second surface.

3. The structure of claim 2 , wherein both the first and second surfaces of the encapsulant are within the recess in the first substrate.

4. The structure of claim 1 further comprising:

a first bond pad in the recess of the first substrate, the first package being bonded to the first bond pad in the recess.

5. The structure of claim 4 further comprising:

a through via extending through the encapsulant from the first redistribution structure adjacent a sidewall the first die to a level of a back side of the first die, surfaces of the encapsulant and the through via being coplanar, the through via being electrically coupled to the first bond pad in the recess.

6. The structure of claim 1 , wherein the first sensor comprises a heart rate monitor, an ambient light sensor, an ultraviolet light sensor, an ambient temperature sensor, an accelerometer, a gyroscope, a magnetometer, a barometric pressure sensor, an oxymetry sensor, a global positioning system (GPS) sensor, a skin conductance sensor, a skin temperature sensor, or a blood-glucose monitor.

7. The structure of claim 1 further comprising:

a third sensor bonded to the first package and the first substrate, the third sensor having a first portion over the recess of the first substrate and a second portion over a portion of the first substrate outside of the recess.

8. The structure of claim 1 further comprising:

a second bond pad on a first surface of the first substrate, the first surface being outside of the recess of the first substrate, the first package being electrically coupled to the second bond pad of the first substrate with a wire bond.

9. A structure comprising:

a first package including in a recess of a first substrate, the first package a plurality of first dies encapsulated in an encapsulant, active sides of the plurality of first dies facing away from the first substrate;

a first sensor bonded to the first package and the first substrate by a first set of conductive connectors, the first sensor being electrically coupled to the first substrate and the first package; and

a second sensor bonded to the first package by a second set of conductive connectors, the second sensor being electrically couple to the first package.

10. The structure of claim 9 , wherein the first sensor spans across a gap between a sidewall of the recess of the first substrate and an exterior sidewall of the first package.

11. The structure of claim 9 , wherein the first package further comprises:

a first redistribution structure over the active sides of the plurality of first dies and the encapsulant, the first redistribution structure being electrically coupled to the active sides of the plurality of first dies; and

through vias extending through the encapsulant from the first redistribution structure to levels of back sides of the plurality first dies, the back sides being opposite the active sides.

12. The structure of claim 11 further comprising:

a bond pad in the recess of the first substrate, the first package being bonded to the bond pad with a conductive connector, the through via of the first package being electrically coupled to the bond pad in the recess of the first substrate.

13. The structure of claim 9 , wherein a topmost surface and a bottommost surface of the encapsulant being within the recess.

14. The structure of claim 9 further comprising:

a third sensor electrically coupled to the first package and the first substrate, the third sensor having a first portion directly over the recess of the first substrate and a second portion directly over a portion of the first substrate outside of the recess.

15. The structure of claim 9 , wherein the first sensor comprises a heart rate monitor, an ambient light sensor, an ultraviolet light sensor, an ambient temperature sensor, an accelerometer, a gyroscope, a magnetometer, a barometric pressure sensor, an oxymetry sensor, a global positioning system (GPS) sensor, a skin conductance sensor, a skin temperature sensor, a blood-glucose monitor, or a combination thereof.

16. A structure comprising:

a first package comprising:

a first die surrounded with an encapsulant, the first die having an active side and a back side, the back side being opposite the active side; and

a first redistribution structure over the first die and the encapsulant, the first redistribution structure being coupled to the active side of the first die;

a first substrate, the first package being in the first substrate;

a first sensor bonded to the first package and the first substrate with a first set of conductive connectors, the first sensor spanning across a gap between the first substrate and an exterior sidewall of the first package; and

a second sensor bonded to the first package with a second set of conductive connectors, the second sensor being electrically coupled to the first package.

17. The structure of claim 16 , wherein the first package further comprises:

a through via extending through the encapsulant from the first redistribution structure to a level of the back side of the first die, the through via being adjacent a sidewall of the first die and separated from the sidewall of the first die by the encapsulant.

18. The structure of claim 16 further comprising:

a first bond pad on a first surface of the first substrate, the first package being electrically coupled to the first bond pad with a first conductive connector.

19. The structure of claim 18 further comprising:

a second bond pad on a second surface of the first substrate, the second surface being at a different level than the first surface, the first package being electrically coupled to the second bond pad with a second conductive connector.

20. The structure of claim 16 further comprising:

a third sensor bonded to the first package, the third sensor being electrically coupled to the first package; and

a fourth sensor bonded to the first package, the fourth sensor being electrically coupled to the first package.

Continuity (3)
Continuation 15882360 · Jan 29, 2018
Division 14858955 · Sep 18, 2015
Related Publication 20210183745A1 · Jun 17, 2021