Widened conductive line structures and staircase structures for semiconductor devices
Systems, methods, and apparatuses for widened conductive line structures and staircase structures for semiconductor devices are described herein. One memory device includes an array of vertically stacked memory cells, the array including a vertical stack of horizontally oriented conductive lines. Each conductive line comprises a first portion extending in a first horizontal direction and a second portion extending in a second horizontal direction, wherein the second portion of each conductive line is of a width greater than the first portion of each conductive line.
1. A semiconductor memory device, comprising:
an array of vertically stacked memory cells, having:
a vertical stack of horizontally oriented multi-directional conductive lines, each multi-directional conductive line comprising:
a first portion extending in a first horizontal direction;
a plurality of second portions, wherein each second portion of the plurality of second portions extends from the first portion in a second horizontal direction, and wherein each second portion of the plurality of second portions is wider than the first portion; and
a plurality of conductive line contacts that are formed between the second portions to allow for a direct contact with conductive layers of a staircase contact structure, wherein the conductive layers are in direct contact with conductive lines formed within the staircase contact structure.
2. The semiconductor memory device of claim 1 , wherein the second horizontal direction is at an angle approximately perpendicular to the first horizontal direction.
3. The semiconductor memory device of claim 1 , wherein the staircase contact structure includes a decreasing vertical height along the first horizontal direction and the second horizontal direction.
4. The semiconductor memory device of claim 3 , wherein lengths of the plurality of second portions ascend from a bottom to a top of the staircase contact structure.
5. The semiconductor memory device of claim 4 , wherein the plurality of conductive line contacts form doped body contacts to the conductive layers of the staircase contact structure.
6. The semiconductor memory device of claim 1 , wherein the memory device is a three-dimensional (3D) dynamic random-access memory device.
7. The semiconductor memory device of claim 1 , further comprising a number of vertical openings configured to allow contact with a dielectric layer beneath the vertical stack of horizontally oriented multi-directional conductive lines.
8. The semiconductor memory device of claim 1 , further comprising:
a number of layers wherein the horizontally oriented multi-directional conductive lines are formed, each layer comprising at least one of:
a conductive material; and
a dielectric material; and
an additional number of vertical openings, each vertical opening being configured to allow contact with at least one of the number of layers.
9. The semiconductor memory device of claim 8 , wherein the additional number of vertical openings are formed between the second portions.
10. The semiconductor memory device of claim 8 , wherein the conductive layers of the staircase contact structure are formed using the vertical openings.
11. The semiconductor memory device of claim 1 , wherein the vertical stack of horizontally oriented multi-directional conductive lines decreases in vertical height along the first horizontal direction and along the second horizontal direction.