Photodetector
A photodetector comprising: a separation region that is provided in a semiconductor substrate and defines a pixel region; a hole accumulation region that is provided in the semiconductor substrate of the pixel region along a side surface of the separation region; a multiplication region that is provided in the semiconductor substrate of the pixel region and is configured by joining a first conductivity type region and a second conductivity type region from the surface side of the semiconductor substrate in the thickness direction of the semiconductor substrate; and an insulating region provided in the semiconductor substrate in a region between the multiplication region and the hole accumulation region, wherein a formation depth of the insulating region is larger than a formation depth of the first conductivity type region.
1. A photodetector comprising:
a separation region that is provided in a semiconductor substrate and defines a pixel region;
a hole accumulation region that is provided in the semiconductor substrate of the pixel region along a side surface of the separation region;
a multiplication region that is provided in the semiconductor substrate of the pixel region and is configured by joining a first conductivity type region and a second conductivity type region from a surface side of the semiconductor substrate in a thickness direction of the semiconductor substrate; and
an insulating region provided in the semiconductor substrate in a region between the multiplication region and the hole accumulation region, wherein
a formation depth of the insulating region is larger than a formation depth of the first conductivity type region.
2. The photodetector according to claim 1 , wherein the formation depth of the insulating region is smaller than a formation depth of the second conductivity type region.
3. The photodetector according to claim 1 , wherein the hole accumulation region is of a second conductivity type.
4. The photodetector according to claim 3 , wherein the semiconductor substrate on an inner side with respect to the insulating region is further provided with a sub-accumulation region of the same conductivity type as the hole accumulation region.
5. The photodetector according to claim 1 , wherein the insulating region is configured of a plurality of regions separated from each other.
6. The photodetector according to claim 5 , wherein
a planar shape of the pixel region is a polygonal shape, and
the plurality of regions of the insulating region are provided along each side of the pixel region.
7. The photodetector according to claim 1 , wherein the insulating region is provided over an entire circumference of the region between the multiplication region and the hole accumulation region.
8. The photodetector according to claim 7 , wherein
a planar shape of the pixel region is a polygonal shape, and
a width of the insulating region corresponding to each vertex of the pixel region is larger than a width of the insulating region corresponding to each side of the pixel region.
9. The photodetector according to claim 7 , wherein
a planar shape of the pixel region is a polygonal shape, and
a width of the insulating region corresponding to each vertex of the pixel region is smaller than a width of the insulating region corresponding to each side of the pixel region.
10. The photodetector according to claim 7 , wherein
a planar shape of the pixel region is a polygonal shape, and
an angle of each vertex of the polygonal shape is larger than 90 degrees.
11. The photodetector according to claim 1 , wherein a plurality of the insulating regions is arranged between the multiplication region and the hole accumulation region.
12. The photodetector according to claim 1 , wherein a shape of the insulating region in the thickness direction of the semiconductor substrate is reversely tapered from the surface side of the semiconductor substrate.
13. The photodetector according to claim 1 , wherein the hole accumulation region is provided to further extend to a back surface side opposite to a surface of the semiconductor substrate where the multiplication region is provided.
14. The photodetector according to claim 13 , wherein a microlens that collects light is further provided on the back surface side of the semiconductor substrate.
15. The photodetector according to claim 1 , wherein the hole accumulation region is electrically connected to an anode, and the first conductivity type region is electrically connected to a cathode.
16. The photodetector according to claim 1 , wherein the separation region is configured of a double structure of a metal film extending in the thickness direction of the semiconductor substrate and an insulating film covering the side surface of the metal film.
17. The photodetector according to claim 1 , wherein the second conductivity type region is provided in a projection region of the first conductivity type region when the surface of the semiconductor substrate is viewed in a plan view.