Semiconductor device
View Patent ↗A highly integrated semiconductor device is provided. The semiconductor device includes a substrate, a prism-like insulator, a memory cell string including a plurality of transistors connected in series. The prism-like insulator is provided over the substrate. The memory cell string is provided on the side surface of the prism-like insulator. The plurality of transistors each include a gate insulator and a gate electrode. The gate insulator includes a first insulator, a second insulator, and a charge accumulation layer. The charge accumulation layer is positioned between the first insulator and the second insulator.
1. A semiconductor device comprising:
a substrate;
a first insulator;
a first conductor over the first insulator;
a second conductor over the first insulator;
an oxide semiconductor over and in contact with the first conductor and the second conductor;
a first gate insulator including a region facing a side of the oxide semiconductor;
a first gate electrode including a region facing the side of the oxide semiconductor with the first gate insulator therebetween;
a second gate insulator including a region facing the side of the oxide semiconductor;
a second gate electrode including a region facing the side of the oxide semiconductor with the second gate insulator therebetween;
a third conductor over and in contact with the oxide semiconductor;
a fourth conductor over and in contact with the oxide semiconductor; and
a fifth conductor over and in contact with the third conductor and the fourth conductor,
wherein the second gate electrode is over the first gate electrode.
2. The semiconductor device according to claim 1 ,
wherein a direction of a current flowing through the oxide semiconductor is perpendicular to a top surface of the substrate.
3. The semiconductor device according to claim 1 ,
wherein the substrate includes a first silicon transistor and a second silicon transistor,
wherein the first silicon transistor is electrically connected to the first conductor, and
wherein the second silicon transistor is electrically connected to the second conductor.
4. The semiconductor device according to claim 1 , wherein the oxide semiconductor includes indium and zinc.
5. The semiconductor device according to claim 1 , wherein the oxide semiconductor includes a nanocrystal.
6. The semiconductor device according to claim 5 , wherein a size of the nanocrystal is greater than or equal to 1 nm and less than or equal to 10 nm.