Magnetically guided material handling robot

1. An apparatus comprising:

a first device configured to support a substrate thereon;

a first transport having the first device connected thereto, where the first transport is configured to support the first device for movement along a horizontal path, where the first transport comprises:

at least two guides;

a magnetic system configured to vertically space the first device over the at least two guides with a gap between the first device and the at least two guides, where the magnetic system comprises a first electromagnetic actuator at a first corner of a first side of the first device, a second electromagnetic actuator at a second corner of the first side of the first device, and a third electromagnetic actuator at a second opposite side of the first device, where the third electromagnetic actuator is not located proximate a corner of three sides of the first device; and

a linear actuator configured to move the first device in the path along the at least two guides;

where the first and second electromagnetic actuators are each configured to produce opposing horizontal forces between the first device and the first guide.

2. The apparatus as in claim 1 where the first, second and third electromagnetic actuators are the sole actuators spacing the first device vertically above the at least two guides.

3. The apparatus as in claim 1 where the third electromagnetic actuator is not configured to produce horizontal forces between the first device and the second guide.

4. The apparatus as in claim 1 where the first and second electromagnetic actuators are each configured to produce horizontal forces between the first device and the first guide in a first direction, and the apparatus further comprises a fourth electromagnetic actuator and a fifth electromagnetic actuator proximate respective third and fourth corners of three sides of the first device, where the fourth and fifth electromagnetic actuators are each configured to produce horizontal forces between the first device and the second guide in an opposite second direction.

5. The apparatus as in claim 1 further comprising a fourth electromagnetic actuator located proximate the first side of the first device configured to produce a horizontal force between the first device and the first guide in a first direction, and a fourth electromagnetic actuator and a fifth electromagnetic actuator proximate respective third and fourth corners of three sides of the first device, where the fourth and fifth electromagnetic actuators are each configured to produce horizontal forces between the first device and the second guide in an opposite second direction.

6. The apparatus as in claim 1 where the at least two guides comprises a third guide between the first and second guides, where the apparatus further comprises a fourth electromagnetic actuator and a fifth electromagnetic actuator at the third guide, where the fourth and fifth electromagnetic actuators are each configured to produce opposite horizontal forces between the first device and the third guide.

7. The apparatus as in claim 1 further comprising a wireless communication device configured to communicate with a controller separate from the apparatus.

8. An apparatus comprising:

a first device configured to support a substrate thereon;

a first transport having the first device connected thereto, where the first transport is configured to support the first device for movement along a horizontal path, where the first transport comprises:

at least two guides;

a magnetic system configured to vertically space the first device over the at least two guides with a gap between the first device and the at least two guides, where the magnetic system comprises a first electromagnetic actuator at a first corner of a first side of the first device, a second electromagnetic actuator at a second corner of the first side of the first device, and a third electromagnetic actuator at a second opposite side of the first device, where the third electromagnetic actuator is not located proximate a corner of three sides of the first device; and

a linear actuator configured to move the first device in the path along the at least two guides;

where the first and second electromagnetic actuators are each configured to produce horizontal forces between the first device and the first guide in a first direction, and the apparatus further comprises a fourth electromagnetic actuator and a fifth electromagnetic actuator proximate respective third and fourth corners of three sides of the first device, where the fourth and fifth electromagnetic actuators are each configured to produce horizontal forces between the first device and the second guide in an opposite second direction.

9. An apparatus comprising:

a first device configured to support a substrate thereon;

a first transport having the first device connected thereto, where the first transport is configured to support the first device for movement along a horizontal path, where the first transport comprises:

at least two guides;

a magnetic system configured to vertically space the first device over the at least two guides with a gap between the first device and the at least two guides, where the magnetic system comprises a first electromagnetic actuator at a first corner of a first side of the first device, a second electromagnetic actuator at a second corner of the first side of the first device, and a third electromagnetic actuator at a second opposite side of the first device, where the third electromagnetic actuator is not located proximate a corner of three sides of the first device; and

a linear actuator configured to move the first device in the path along the at least two guides;

where the at least two guides comprises a third guide between the first and second guides, where the apparatus further comprises a fourth electromagnetic actuator and a fifth electromagnetic actuator at the third guide, where the fourth and fifth electromagnetic actuators are each configured to produce opposite horizontal forces between the first device and the third guide.