Metal magnetic particle, inductor, method for manufacturing metal magnetic particle, and method for manufacturing metal magnetic core
A metal magnetic particle provided with an oxide layer on a surface of an alloy particle containing Fe and Si. The oxide layer has a first oxide layer, a second oxide layer, a third oxide layer, and a fourth oxide layer. Also, in line analysis of element content by using a scanning transmission electron microscope-energy dispersive X-ray spectroscopy, the first oxide layer is a layer where Fe content takes a local maximum value, the second oxide layer is a layer where Fe content takes a local maximum value, the third oxide layer is a layer where Si content takes a local maximum value, and the fourth oxide layer is a layer where Fe content takes a local maximum value.
1. A metal magnetic particle comprising:
an oxide layer formed on a surface of an alloy particle containing Fe and Si, the oxide layer including a first oxide layer, a second oxide layer, a third oxide layer, and a fourth oxide layer from a side of the alloy particle, and
wherein
in line analysis of element content by using a scanning transmission electron microscope-energy dispersive X-ray spectroscopy,
the first oxide layer is a layer in which Si content takes a local maximum value,
the second oxide layer is a layer in which Fe content takes a local maximum value,
the third oxide layer is a layer in which Si content takes a local maximum value,
the fourth oxide layer is a layer in which Fe content takes a local maximum value, and
in the third oxide layer, the Fe content is greater than the Si content.
2. The metal magnetic particle according to claim 1 , wherein
a weight percentage of Si in the alloy particle is from 1.5 parts by weight to 8.0 parts by weight with respect to 100 parts by weight of a total weight of the Fe and the Si.
3. The metal magnetic particle according to claim 1 , wherein
the alloy particle contains smaller than 1.0 part by weight of Cr with respect to 100 parts by weight of a total weight of the Fe and the Si.
4. An inductor comprising:
the metal magnetic particles according to claim 1 .
5. The metal magnetic particle according to claim 2 , wherein
the alloy particle contains smaller than 1.0 part by weight of Cr with respect to 100 parts by weight of a total weight of the Fe and the Si.
6. An inductor comprising:
the metal magnetic particles according to claim 2 .
7. An inductor comprising:
the metal magnetic particles according to claim 3 .
8. A metal magnetic core in which the metal magnetic particles of claim 1 are joined to each other by the oxide layer.
9. The metal magnetic particle according to claim 1 , wherein a local maximum value of Si content in the first oxide layer is greater than a local maximum value of Si content in the third oxide layer.