IP Library › Granted Patent US 11,982,824
Granted Patent B2
US 11,982,824 · App. 17/371,429 · Granted May 14, 2024

Integrated conductive apertures for optical devices

Inventors: Sage Toko Garrett Doshay (Saratoga, CA); Naamah Argaman (San Jose, CA)
Assignee: Applied Materials, Inc.
G02B5/00G02B5/005
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Quick Facts
Patent No.
US 11,982,824
App. No.
17/371,429
Granted
May 14, 2024
Kind
B2
Abstract

Embodiments of the present disclosure generally relate to optical devices. Specifically, embodiments of the present disclosure relate to optical devices with one or more optical component circuits. The optical devices including one or more optical component circuits prevent the user from exposure to light when a conductive pathway is interrupted via aperture breakage, for example, from the user dropping the substrate, or from the user dropping the optical device. The conductive pathway allows for current to flow from a power source through the apertures and to one or more light sources and, in some embodiments, one or more light detectors. Aperture breakage resulting in the interruption of the conductive pathway prevents current from being provided to the one or more light sources and/or one or more light detectors to prevent (e.g., automatically prevent) light exposure to the user.

Claims (37)

1. An optical device, comprising:

a plurality of structures disposed over a first surface of a substrate of the optical device;

an electrically conductive aperture surrounding and integrated with the plurality of structures, the electrically conductive aperture disposed over the first surface or over a second surface opposing the first surface, the electrically conductive aperture having a first aperture contact point and a second aperture contact point, wherein:

the first aperture contact point is operable to be connected to at least one of:

a light source; or

a light detector; and

the second aperture contact point is operable to be connected to a power source, the power source operable to be connected to the light source or the light detector at a power source contact point; and

a conductive pathway for a current to flow from the power source through the electrically conductive aperture wherein the conductive pathway is operable to be interrupted to prevent the flow to the current from the power source to the light source or the light detector.

2. The optical device of claim 1 , wherein the electrically conductive aperture is disposed on a peripheral structure of the plurality of structures.

3. The optical device of claim 2 , wherein the electrically conductive aperture is disposed on residual portions of a hardmask disposed on the peripheral structure of the plurality of structures.

4. The optical device of claim 1 , wherein an encapsulation layer is disposed over the plurality of structures and the first surface of the substrate and the electrically conductive aperture is disposed on the encapsulation layer.

5. The optical device of claim 1 , wherein aperture materials of the electrically conductive aperture include chromium (Cr), titanium nitride (TiN), a-Si, titanium (Ti), titanium oxide (TiO 2 ), indium tin oxide (ITO), gold (Au), copper (Cu), tungsten (W), aluminum (Al) containing materials, or combinations thereof.

6. An optical device, comprising:

a plurality of structures disposed over a first surface of a substrate of the optical device;

an electrically conductive aperture surrounding and integrated with the plurality of structures, the electrically conductive aperture disposed over the first surface or over a second surface opposing the first surface, the electrically conductive aperture having a first aperture contact point and a second aperture contact point, wherein:

the first aperture contact point is operable to be connected to at least one of:

a light source; or

a light detector; and

the second aperture contact point is operable to be connected to a power source, the power source operable to be connected to the light sources or the light detectors at a power source contact point such that power is disconnected from the light source and the light detector when at least a portion of the electrically conductive aperture is broken; and

a conductive pathway for a current to flow from the power source through the electrically conductive aperture wherein the conductive pathway is operable to be interrupted to prevent the flow to the current from the power source to the light source or the light detector.

7. The optical device of claim 6 , wherein the electrically conductive aperture is disposed on a peripheral structure of the plurality of structures.

8. The optical device of claim 7 , wherein the electrically conductive aperture is disposed on residual portions of a hardmask disposed on the peripheral structure of the plurality of structures.

9. The optical device of claim 7 , wherein an encapsulation layer is disposed over the plurality of structures and the first surface of the substrate and the electrically conductive aperture is disposed on the encapsulation layer.

10. The optical device of claim 7 , wherein the electrically conductive aperture has a circular, rectangular, square, circular, oval, triangular, or irregular shape.

11. The optical device of claim 7 , wherein aperture materials of the electrically conductive aperture include chromium (Cr), titanium nitride (TiN), a-Si, titanium (Ti), titanium oxide (TiO 2 ), indium tin oxide (ITO), gold (Au), copper (Cu), tungsten (W), aluminum (Al) containing materials, or combinations thereof.

12. The optical device of claim 7 , wherein structure materials of the plurality of structures include titanium dioxide (TiO 2 ), zinc oxide (ZnO), tin dioxide (SnO 2 ), aluminum-doped zinc oxide (AZO), fluorine-doped tin oxide (FTO), cadmium stannate (Cd 2 SnO 4 ), cadmium stannate (tin oxide) (CTO), zinc stannate (SnZnO 3 ), niobium oxide (Nb 2 O 5 ), Si, silicon nitride (Si 3 N 4 ), silicon oxynitride, silicon dioxide containing materials, or combinations thereof.

13. A device, comprising:

one or more optical devices, each optical device comprising:

a plurality of structures disposed over a first surface of a substrate; and

an electrically conductive aperture surrounding the plurality of structures, the electrically conductive aperture disposed over the first surface or over a second surface opposing the first surface, the electrically conductive aperture including a first aperture contact point and a second aperture contact point;

at least one of a light source or a detector connected to the first aperture contact point; and

a power source, the power source connected to the second aperture contact point and connected to the light source or the detector at a power source contact point; and

a conductive pathway for a current to flow from the power source through the electrically conductive aperture wherein the conductive pathway is operable to be interrupted to prevent the flow to the current from the power source to the light source or the detector.

14. The device of claim 13 , wherein each optical device further comprises a conductive pathway for current to flow from the power source through the electrically conductive aperture and to the light source or the detector.

15. The device of claim 13 , wherein the plurality of structures may be nanostructures having sub-micron dimensions less than 1 micrometer (μm).

16. The device of claim 13 , wherein a width of the electrically conductive aperture is between 10 μm and 1000 μm.

17. The device of claim 13 , wherein the one or more light sources include a display or a light emitting device.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 19, 2022
From: DOSHAY, SAGE TOKO GARRETT; ARGAMAN, NAAMAH
To: APPLIED MATERIALS, INC.
Reel/Frame 059955/0145 →
Continuity (2)
Provisional Application 63054037 · Jul 20, 2020
Related Publication 20220018998A1 · Jan 20, 2022