Display device
A display device includes a display panel configured to display an image, and an input sensing layer disposed on the display panel. The input sensing layer includes a sensing insulating layer disposed on the display panel and a conductive layer disposed on the sensing insulating layer. The conductive layer includes a barrier layer disposed directly on the sensing insulating layer and including metal nitride and a main conductive layer disposed on the barrier layer.
1. A display device comprising:
a display panel configured to display an image; and
an input sensing layer disposed on the display panel,
wherein the input sensing layer comprises:
an insulating layer having a contact hole disposed on the display panel; and
a conductive layer disposed on the insulating layer,
wherein the conductive layer comprises:
a barrier layer that is disposed directly on the insulating layer and comprises metal nitride; and
a main conductive layer disposed on the barrier layer,
wherein a part of the barrier layer and a part of the main conductive layer are disposed in the contact hole.
2. The display device of claim 1 , wherein the barrier layer contains titanium nitride (TiN).
3. The display device of claim 2 , wherein the main conductive layer comprises:
a first sub-conductive layer disposed on the barrier layer; and
a second sub-conductive layer disposed on the first sub-conductive layer.
4. The display device of claim 3 , wherein the first conductive layer and the second sub-conductive layer comprise different metallic materials.
5. The display device of claim 4 , wherein the first sub-conductive layer comprises aluminum or an aluminum alloy.
6. The display device of claim 4 , wherein the second sub-conductive layer comprises titanium or a titanium alloy.
7. The display device of claim 4 , wherein the second sub-conductive layer comprises titanium nitride (TiN).
8. The display device of claim 2 , wherein the main conductive layer comprises:
a first sub-conductive layer disposed on the barrier layer;
a second sub-conductive layer disposed on the first sub-conductive layer; and
a third sub-conductive layer disposed on the second sub-conductive layer.
9. The display device of claim 8 , wherein the second sub-conductive layer comprises a material different from those of the first sub-conductive layer and the third sub-conductive layer.
10. The display device of claim 9 , wherein:
the first sub-conductive layer comprises titanium or a titanium alloy; and
the second sub-conductive layer comprises aluminum or an aluminum alloy.
11. The display device of claim 9 , wherein the third sub-conductive layer comprises titanium or titanium nitride (TiN).
12. The display device of claim 1 , wherein the insulating layer is an organic layer comprising an organic material.
13. A display device comprising:
a display panel configured to display an image; and
an input sensing layer disposed on the display panel,
wherein the input sensing layer comprises:
a base insulating layer disposed on the display panel;
a first conductive layer disposed on the base insulating layer;
an insulating layer covering the first conductive layer; and
a second conductive layer disposed on the insulating layer,
wherein the second conductive layer comprises:
a second barrier layer comprising metal nitride; and
a second main conductive layer disposed on the second barrier layer.
14. The display device of claim 13 , wherein the insulating layer is an organic layer comprising an organic material.
15. The display device of claim 13 , wherein the second barrier layer comprises titanium nitride (TiN).
16. The display device of claim 13 , wherein the second main conductive layer comprises:
a first sub-conductive layer disposed on the second barrier layer; and
a second sub-conductive layer disposed on the first sub-conductive layer.
17. The display device of claim 16 , wherein the first sub-conductive layer and the second sub-conductive layer comprise different metallic materials.
18. The display device of claim 17 , wherein:
the first sub-conductive layer comprises aluminum or an aluminum alloy; and
the second sub-conductive layer comprises titanium or titanium nitride (TiN).
19. The display device of claim 13 , wherein the second main conductive layer comprises:
a first sub-conductive layer disposed on the second barrier layer;
a second sub-conductive layer disposed on the first sub-conductive layer; and
a third sub-conductive layer disposed on the second sub-conductive layer.
20. The display device of claim 19 , wherein the second sub-conductive layer comprises a metallic material different from those of the first sub-conductive layer and the third sub-conductive layer.
21. The display device of claim 20 , wherein:
the first sub-conductive layer comprises titanium or a titanium alloy;
the second sub-conductive layer comprises aluminum or an aluminum alloy; and
the third sub-conductive layer comprises titanium or titanium nitride (TiN).
22. The display device of claim 13 , wherein the base insulating layer is an organic layer comprising an organic material.
23. The display device of claim 22 , wherein the first conductive layer comprises:
a first barrier layer disposed on the base insulating layer and comprising metal nitride; and
a first main conductive layer disposed on the first barrier layer.
24. The display device of claim 23 , wherein each of the first barrier layer and the second barrier layer comprises titanium nitride (TiN).
25. The display device of claim 23 , wherein the first main conductive layer comprises:
a first sub-conductive layer disposed on the first barrier layer; and
a second sub-conductive layer disposed on the first sub-conductive layer.
26. The display device of claim 25 , wherein the first sub-conductive layer and the second sub-conductive layer comprise different metallic materials.