Imaging element, imaging element driving method, and electronic device
An imaging element according to an embodiment includes: a unit pixel including a first pixel having a first photoelectric conversion element and including a second pixel having a second photoelectric conversion element, the second pixel being arranged adjacent to the first pixel; and an accumulation portion that accumulates a charge generated by the second photoelectric conversion element and converts the accumulated charge into a voltage. The accumulation portion is disposed at a boundary between the unit pixel and another unit pixel adjacent to the unit pixel.
1. A light detecting device, comprising:
a first photoelectric conversion region disposed in a substrate;
a second photoelectric conversion region disposed in the substrate, wherein in a first cross-sectional view the second photoelectric conversion region is adjacent to the first photoelectric conversion region;
a third photoelectric conversion region disposed in the substrate, wherein the third photoelectric conversion region is adjacent to the first photoelectric conversion region in the first cross-sectional view;
a first trench disposed between the first photoelectric conversion region and the second photoelectric conversion region in the first cross-sectional view;
a second trench disposed between the first photoelectric conversion region and the third photoelectric conversion region in the first cross-sectional view;
a first light-blocking film disposed over the first trench in the first cross-sectional view; and
a second light-blocking film disposed over the second trench in the first cross-sectional view;
wherein an area of the first photoelectric conversion region is greater than an area of the second photoelectric conversion region in the first cross-sectional view,
wherein an area of the first photoelectric conversion region is greater than an area of the third photoelectric conversion region in the first cross-sectional view,
wherein a center portion of the first light-blocking film is disposed between a center portion of the first photoelectric conversion region and a center portion of the first trench in the first cross-sectional view, and
wherein a center portion of the second light-blocking film is disposed between the center portion of the first photoelectric conversion region and a center portion of the second trench in the first cross-sectional view.
2. The light detecting device of claim 1 , further comprising:
a fourth photoelectric conversion region disposed in the substrate, wherein the first photoelectric conversion region is adjacent to the fourth photoelectric conversion region in a second cross-sectional view, and wherein the second photoelectric conversion region is adjacent to the fourth photoelectric conversion region in a third cross-sectional view;
a third trench disposed between the first photoelectric conversion region and the fourth photoelectric conversion region in the second cross-sectional view; and
a third light-blocking film disposed over the third trench in the second cross-sectional view,
wherein a center portion of the third light-blocking film is disposed over a center portion of the third trench in the second cross-sectional view.
3. The light detecting device of claim 2 , further comprising:
a fourth trench disposed between the second photoelectric conversion region and the fourth photoelectric conversion region in the third cross-sectional view; and
a fourth light-blocking film disposed over the fourth trench in the third cross-sectional view,
wherein an area of the fourth photoelectric conversion region is greater than an area of the second photoelectric conversion region in the third cross-sectional view, and
wherein a center portion of the fourth light-blocking film is disposed between a center portion of the fourth photoelectric conversion region and a center portion of the fourth trench in the third cross-sectional view.
4. The light detecting device of claim 1 , wherein an area of a light receiving surface of the first photoelectric conversion region is larger than an area of a light receiving surface of the second photoelectric conversion region.
5. The light detecting device of claim 4 , wherein an area of a light receiving surface of the first photoelectric conversion region is larger than an area of a light receiving surface of the third photoelectric conversion region.
6. The light detecting device of claim 5 , wherein a sensitivity of the first photoelectric conversion region is higher than a sensitivity of the second photoelectric conversion region, and wherein a sensitivity of the first photoelectric conversion region is higher than a sensitivity of the third photoelectric conversion region.
7. The light detecting device of claim 1 , wherein no portion of the first light-blocking films extends over any portion of the second photoelectric conversion region.
8. The light detecting device of claim 1 , wherein the first and second light-blocking films are formed from at least one of tungsten, titanium, titanium nitride, silicon oxide, and resin.
9. The light detecting device of claim 8 , wherein the first and second trenches are trench light shielding portions formed by embedding a material in grooves.
10. The light detecting device of claim 9 , wherein the material embedded in the grooves includes at least one of silicon oxide, tungsten, aluminum, titanium, titanium nitride, a magnesium-titanium alloy, a magnesium-nickel alloy, and tantalum oxide.
11. A light detecting device, comprising:
a first photoelectric conversion region disposed in a substrate;
a second photoelectric conversion region disposed in the substrate, wherein the second photoelectric conversion region is adjacent to the first photoelectric conversion region in a first cross-sectional view taken along a first line;
a third photoelectric conversion region disposed in the substrate, wherein the third photoelectric conversion region is adjacent to the first photoelectric conversion region in the first cross-sectional view;
a first light-blocking film disposed along a boundary between the first photoelectric conversion region and the second photoelectric conversion region in the first cross-sectional view; and
a second light-blocking film disposed along a boundary between the first photoelectric conversion region and the third photoelectric conversion region in the first cross-sectional view;
wherein the first, second, and third photoelectric conversion regions are disposed along the first line;
wherein a first portion of the first light-blocking film extends over a portion of the first photoelectric conversion region in the first cross-sectional view and has a first width,
wherein the first width is measured along the first line from a point corresponding to the boundary between the first photoelectric conversion region and the second photoelectric conversion region to an edge of an opening formed over the first photoelectric conversion region;
wherein a second portion of the first light-blocking film extends over a portion of the second photoelectric conversion region in the first cross-sectional view and has a second width,
wherein the second width is measured along the first line from the point corresponding to the boundary between the first photoelectric conversion region and the second photoelectric conversion region to an edge of an opening formed over the second photoelectric conversion region, and
wherein the first width is greater than the second width.
12. The light detecting device of claim 11 , wherein a first portion of the second light-blocking film extends over a portion of the first photoelectric conversion region in the first cross-sectional view and has a third width,
wherein the third width is measured along the first line from a point corresponding to the boundary between the first photoelectric conversion region and the third photoelectric conversion region to an edge of an opening formed over the first photoelectric conversion region;
wherein a second portion of the second light-blocking film extends over a portion of the third photoelectric conversion region in the first cross-sectional view and has a fourth width,
wherein the fourth width is measured along the first line from the point corresponding to the boundary between the first photoelectric conversion region and the third photoelectric conversion region to an edge of an opening formed over the third photoelectric conversion region, and
wherein the third width is greater than the fourth width.
13. The light detecting device of claim 12 , further comprising:
a fourth photoelectric conversion region disposed in the substrate, wherein the first photoelectric conversion region is adjacent to the fourth photoelectric conversion region in a second cross-sectional view taken along a second line, and wherein the second photoelectric conversion region is adjacent to the fourth photoelectric conversion region in a third cross-sectional view taken along a third line; and
a third light-blocking film disposed along a boundary between the first photoelectric conversion region and the fourth photoelectric conversion region in the second cross-sectional view, wherein a center line of the third light-blocking film is disposed over the boundary between the first photoelectric conversion region and the fourth photoelectric conversion region in the second cross-sectional view.
14. The light detecting device of claim 13 , further comprising:
a fourth light-blocking film disposed along a boundary between the second photoelectric conversion region and the fourth photoelectric conversion region in the third cross-sectional view,
wherein a first portion of the fourth light-blocking film extends over a portion of the fourth photoelectric conversion portion in the third cross-sectional view and has a third width,
wherein the third width is measured along the third line from a point corresponding to the boundary between the second photoelectric conversion region and the fourth photoelectric conversion region to an edge of an opening formed over the fourth photoelectric conversion region;
wherein a second portion of the fourth light-blocking film extends over a portion of the second photoelectric conversion region in the third cross-sectional view and has a fourth width,
wherein the fourth width is measured along the third line from the point corresponding to the boundary between the second photoelectric conversion region and the fourth photoelectric conversion region to an edge of an opening formed over the second photoelectric conversion region, and
wherein the third width is greater than the fourth width.
15. The light detecting device of claim 11 , wherein an area of a light receiving surface of the first photoelectric conversion region is larger than an area of a light receiving surface of the second photoelectric conversion region.
16. The light detecting device of claim 15 , wherein an area of a light receiving surface of the first photoelectric conversion region is larger than an area of a light receiving surface of the third photoelectric conversion region.
17. The light detecting device of claim 16 , wherein a sensitivity of the first photoelectric conversion region is higher than a sensitivity of the second photoelectric conversion region, and wherein a sensitivity of the first photoelectric conversion region is higher than a sensitivity of the third photoelectric conversion region.
18. The light detecting device of claim 14 , wherein an area of a light receiving surface of the first photoelectric conversion region is larger than an area of a light receiving surface of the second photoelectric conversion region, wherein the area of a light receiving surface of the first photoelectric conversion region is larger than an area of a light receiving surface of the third photoelectric conversion region, and wherein the area of a light receiving surface of the first photoelectric conversion region is equal to an area of a light receiving surface of the fourth photoelectric conversion region.
19. The light detecting device of claim 14 , wherein the first width is equal to the third width, and wherein the second width is equal to the fourth width.
20. The light detecting device of claim 11 , wherein the first and second light-blocking films are formed from at least one of tungsten, titanium, titanium nitride, silicon oxide, and resin.