Semiconductor devices
A semiconductor device includes a plurality of semiconductor structures disposed on a substrate, a first conductive pattern, a first conductive pattern, a gate insulation pattern, a second conductive pattern and a second impurity region. Each of the semiconductor structures includes a first semiconductor pattern that has a linear shape that extends in a first direction and second semiconductor patterns that protrude from an upper surface of the first semiconductor pattern in a vertical direction. The semiconductor structures are spaced apart from each other in a second direction perpendicular to the first direction. The first conductive pattern is formed between the first semiconductor patterns. The first impurity region is formed in an opening in the first semiconductor pattern adjacent to a first sidewall of the second semiconductor pattern. The first impurity region includes an impurity diffusion harrier pattern and a polysilicon pattern doped with impurities.
1. A semiconductor device, comprising:
a plurality of semiconductor structures disposed on a substrate,
wherein each of the semiconductor structures includes a first semiconductor pattern that has a linear shape that extends in a first direction and second semiconductor patterns that protrude in a vertical direction from an upper surface of the first semiconductor pattern, wherein the semiconductor structures are spaced apart from each other in a second direction perpendicular to the first direction;
a first conductive pattern formed in a first trench between the first semiconductor patterns, wherein the first conductive pattern extends in the first direction;
a first impurity region formed in the opening in the first semiconductor pattern adjacent to a first sidewall of the second semiconductor pattern, wherein the first impurity region includes an impurity diffusion barrier pattern and a polysilicon pattern doped with impurities;
a gate insulation pattern disposed on the first sidewall of each of the second semiconductor pattern;
a second conductive pattern that extends in the second direction on the gate insulation pattern; and
a second impurity region disposed on each of the second semiconductor patterns,
wherein the impurity diffusion barrier pattern surrounds sidewalls and a bottom of the polysilicon pattern.
2. The semiconductor device of claim 1 , wherein the impurity diffusion harrier pattern includes graphene.
3. The semiconductor device of claim 1 , wherein a sidewall of the first impurity region and a sidewall or the first conductive pattern contact each other.
4. The semiconductor device of claim 3 , wherein the impurity diffusion barrier pattern of the first impurity region and the sidewall of the first conductive pattern contact each other.
5. The semiconductor device of claim 1 , wherein the first impurity region extends from a position spaced apart from a lower portion of the first sidewall of the second semiconductor pattern to a position that overlaps a partial lower surface of the second semiconductor pattern.
6. The semiconductor device of claim 1 , wherein the first semiconductor pattern is connected to a lower surface of the second semiconductor pattern and is disposed on a side of the first impurity region.
7. The semiconductor device of claim 1 , wherein the second impurity region is formed on an uppermost surface of the second semiconductor pattern, and the second impurity region includes a second polysilicon pattern doped with impurities.
8. The semiconductor device of claim 1 , wherein the second impurity region is an upper portion of the second semiconductor pattern that is doped with impurities.
9. The semiconductor device of claim 1 , further comprising a first insulation pattern that extends in the first direction, wherein the first insulation pattern contacts a sidewall of the first conductive pattern in the first trench.
10. The semiconductor device of claim 1 , further comprising a capacitor that is electrically connected to the second impurity region.
11. A semiconductor device, comprising:
a plurality of semiconductor structures disposed on a substrate, wherein each of the semiconductor structures includes a first semiconductor pattern that has a linear shape that extends in a first direction and second semiconductor patterns that protrude in a vertical direction from an upper surface of the semiconductor pattern, wherein the semiconductor structures are spaced apart from each other in a second direction perpendicular to the first direction;
a first conductive pattern formed in a first trench between the first semiconductor patterns, wherein the first conductive pattern extends in the first direction;
a first insulation pattern formed in the first trench between the first semiconductor patterns, wherein the first insulation pattern contacts a sidewall of the first conductive pattern, and the first insulation pattern extends in the first direction;
a first impurity region formed in the opening and that extends from a position spaced apart from a lower portion of a first sidewall of the second semiconductor pattern to a position that overlaps a partial lower surface of the second semiconductor pattern, wherein the first impurity region includes an impurity diffusion barrier pattern and a polysilicon pattern doped with impurities;
a gate insulation pattern disposed on the first sidewall of each of the second semiconductor patterns;
a second conductive pattern that extends in the second direction on the gate insulation pattern; and
a second impurity region formed on each of the second semiconductor patterns,
wherein a sidewall of the first impurity region and a sidewall of the first conductive pattern contact each other, and
wherein the impurity diffusion barrier pattern surrounds sidewalls and a bottom of the polysilicon pattern.
12. The semiconductor device of claim 11 , wherein-the first impurity region is formed in an opening in the first semiconductor pattern is adjacent to a first sidewall of the second semiconductor pattern.
13. The semiconductor device of claim 11 , wherein the impurity diffusion barrier pattern includes graphene.
14. The semiconductor device of claim 11 , wherein the impurity diffusion barrier pattern of the first impurity region and the sidewall of the first conductive pattern contact each other.
15. The semiconductor device of claim 11 , wherein the first semiconductor pattern is connected to a lower surface of the second semiconductor pattern and is disposed on a side of the first impurity region.
16. A semiconductor device, comprising:
a semiconductor structure disposed on a substrate, wherein the semiconductor structure includes a first semiconductor pattern that has a linear shape that extends in a first direction and second semiconductor patterns that protrude in a vertical direction from an upper surface of the first semiconductor pattern;
a first impurity region that extends from a position spaced apart from a lower portion of a first sidewall of the second semiconductor pattern to a position that overlaps a partial lower surface of the second semiconductor pattern, wherein the first impurity region includes an impurity diffusion barrier pattern and a polysilicon pattern doped with impurities;
a gate insulation pattern disposed on the first sidewall of the second semiconductor pattern;
a second conductive pattern formed on the gate insulation pattern; and
a second impurity region formed on the second semiconductor patterns,
wherein the impurity diffusion barrier pattern surrounds sidewalls and a bottom of the polysilicon pattern.
17. The semiconductor device of claim 16 , wherein the impurity diffusion barrier pattern includes grapheme.
18. The semiconductor device of claim 16 , wherein the first impurity region is formed in an opening in the first semiconductor pattern adjacent to the first sidewall of the second semiconductor pattern.