IP Library › Granted Patent US 12,006,221
Granted Patent B2
US 12,006,221 · App. 17/546,488 · Granted Jun 11, 2024

Direct graphene transfer and graphene-based devices

Inventors: Therese Francoise Arliguie (Corning, NY); Theresa Chang (Painted Post, NY); Miriam Marchena Martin-Francés (Barcelona, ES); Prantik Mazumder (Ithaca, NY); Valerio Pruneri (Castelldefels, ES); Frederic Christian Wagner (Lindley, NY)
Assignee: Corning Incorporated
C01B32/194B05D1/005B05D3/12B05D2350/60B05D2505/50C01B2204/22
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Quick Facts
Patent No.
US 12,006,221
App. No.
17/546,488
Granted
Jun 11, 2024
Kind
B2
Abstract

A method of forming a functionalized device substrate is provided that includes the steps of: forming a conductive layer on a growth substrate; applying a polymeric layer to a device substrate, wherein a coupling agent couples the polymeric layer to the device substrate; coupling the polymeric layer to the conductive layer on the growth substrate; and peeling the growth substrate from the conductive layer.

Claims (26)

1. A functionalized device substrate, comprising:

a substrate defining a surface;

a polyimide layer disposed over the surface of the substrate, wherein an aminosilane couples the polyimide layer to the surface; and

a graphene layer coupled to the polyimide layer, wherein the graphene layer has a sheet resistance of from about 100 Ohm/sq to about 600 Ohm/sq.

2. The device substrate of claim 1 , wherein the substrate comprises at least one of a silicon wafer, a polymeric material, a glass, a glass-ceramic and a ceramic.

3. The device substrate of claim 1 , wherein the aminosilane is dispersed within the polyimide layer, as derived from about 0.1 wt. % to 10 wt. % aminosilane in a precursor mixture of a polyimide and a solvent.

4. The device substrate of claim 1 , wherein the aminosilane is an aminosilane layer.

5. A functionalized device substrate, comprising:

a substrate defining a surface;

a polyimide layer disposed over the surface of the substrate, wherein an aminosilane couples the polyimide layer to the surface; and

a graphene layer coupled to the polyimide layer, wherein the graphene layer has a sheet resistance of from about 100 Ohm/sq to about 600 Ohm/sq, and wherein the graphene layer is as-pressed against the polyimide layer at a pressure of from about 150 psi to about 350 psi.

6. The device substrate of claim 5 , wherein the substrate comprises at least one of a silicon wafer, a polymeric material, a glass, a glass-ceramic and a ceramic.

7. The device substrate of claim 5 , wherein the aminosilane is dispersed within the polyimide layer, as derived from about 0.1 wt. % to 10 wt. % aminosilane in a precursor mixture of a polyimide and a solvent.

8. The device substrate of claim 5 , wherein the aminosilane is an aminosilane layer.

9. The device substrate of claim 5 , wherein the graphene layer is pressed against the polyimide layer at a temperature of from about 50° C. to about 200° C.

10. The device substrate of claim 5 , wherein the graphene layer is pressed against the polyimide layer at a temperature of from about 129° C. to about 190° C.

11. A functionalized device substrate, comprising:

a substrate defining a surface;

a polymer layer disposed over the surface of the substrate, wherein an aminosilane couples the polymer layer to the surface; and

a graphene layer coupled to the polymer layer, wherein the graphene layer has a sheet resistance of from about 100 Ohm/sq to about 600 Ohm/sq, and further wherein the polymer layer is composed of a polyimide or a polythiophene.

12. The device substrate of claim 11 , wherein the substrate comprises at least one of a silicon wafer, a polymeric material, a glass, a glass-ceramic and a ceramic.

13. The device substrate of claim 11 , wherein the aminosilane is dispersed within the polymer layer, as derived from about 0.1 wt. % to 10 wt. % aminosilane in a precursor mixture of a polyimide and a solvent.

14. The device substrate of claim 11 , wherein the aminosilane is an aminosilane layer.

15. The device substrate of claim 11 , wherein the graphene layer has a sheet resistance of from about 100 Ohm/sq to about 400 Ohm/sq.

16. The device substrate of claim 1 , wherein the graphene layer has a sheet resistance of from about 100 Ohm/sq to about 400 Ohm/sq.

17. The device substrate of claim 5 , wherein the graphene layer has a sheet resistance of from about 100 Ohm/sq to about 400 Ohm/sq.

Continuity (3)
Division 16763479
Provisional Application 62587840 · Nov 17, 2017
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