Resistive random-access memory (RRAM) device and forming method thereof
A RRAM (resistive random-access memory) device includes a bottom electrode line, a top electrode island and a resistive material. The bottom electrode line is directly on a first metal structure. The top electrode island is disposed beside the bottom electrode line. The resistive material is sandwiched by a sidewall of the bottom electrode line and a sidewall of the top electrode island. The present invention also provides a method of forming said RRAM device.
1. A resistive random-access memory (RRAM) device, comprising:
a bottom electrode line directly on a first metal structure;
a top electrode island disposed beside the bottom electrode line;
a resistive material sandwiched by a sidewall of the bottom electrode line and a sidewall of the top electrode island; and
a second metal structure directly contacting the resistive material and the top electrode island.
2. The resistive random-access memory (RRAM) device according to claim 1 , further comprising:
a dielectric layer disposed on the bottom electrode lines, wherein the resistive material penetrates through the dielectric layer.
3. The resistive random-access memory (RRAM) device according to claim 2 , wherein the dielectric layer comprises a silicon nitride layer.
4. The resistive random-access memory (RRAM) device according to claim 1 , wherein the resistive material comprises transition-metal-oxide (TMO).
5. The resistive random-access memory (RRAM) device according to claim 1 , further comprising:
a cap layer between the first metal structure and the bottom electrode line.
6. The resistive random-access memory (RRAM) device according to claim 5 , wherein the cap layer has openings for the bottom electrode line physically connecting to the first metal structure.
7. The resistive random-access memory (RRAM) device according to claim 5 , wherein the cap layer comprises a nitrogen containing silicon carbide (SiCN) layer.
8. The resistive random-access memory (RRAM) device according to claim 1 , wherein the resistive material has a U-shape cross-sectional profile.
9. The resistive random-access memory (RRAM) device according to claim 1 , wherein the top electrode island has an I-shape cross-sectional profile or a T-shape cross-sectional profile.
10. The resistive random-access memory (RRAM) device according to claim 1 , further comprising:
a via disposed beside the RRAM cell, wherein two ends of the via contact the first metal structure and the second metal structure respectively.