Imaging device and method of manufacturing imaging device
To prevent the occurrence of a defect in an infrared-light attenuation filter and prevent a reduction in image quality. An imaging device includes a photoelectric converter, an on-chip lens, a color filter, the infrared-light attenuation filter, and a protective film. The photoelectric converter performs photoelectric conversion depending on incident light. The on-chip lens collects the incident light into the photoelectric converter. Infrared light and visible light of a specified wavelength from among the collected incident light are transmitted through the color filter. The infrared-light attenuation filter attenuates the infrared light from among the collected incident light, and visible light from among the collected incident light is transmitted through the infrared-light attenuation filter. The protective film is arranged adjacent to the infrared-light attenuation filter and protects the infrared-light attenuation filter.
1. An imaging device, comprising:
a photoelectric converter that performs photoelectric conversion depending on incident light;
an on-chip lens that collects the incident light into the photoelectric converter;
a color filter through which infrared light and visible light of a specified wavelength from among the collected incident light are transmitted;
an infrared-light attenuation filter that attenuates the infrared light from among the collected incident light and through which visible light from among the collected incident light is transmitted; and
a protective film that is arranged adjacent to the infrared-light attenuation filter and protects the infrared-light attenuation filter,
wherein the protective film is arranged adjacent to the color filter,
wherein the infrared-light attenuation filter attenuates the infrared light transmitted through the color filter, and
wherein the protective film has substantially a same refractive index as the color filter.
2. The imaging device according to claim 1 , wherein
the protective film protects the infrared-light attenuation filter when the color filter is formed.
3. The imaging device according to claim 1 , further comprising:
a pixel that includes the photoelectric converter, the on-chip lens, the color filter, the infrared-light attenuation filter, and the protective film; and
an infrared-light pixel that includes an infrared-light transmission filter through which the infrared light from among the collected incident light is transmitted, the photoelectric converter, and the on-chip lens, wherein
the protective film is further arranged on a face of the infrared-light attenuation filter that is adjacent to the infrared-light pixel.
4. The imaging device according to claim 1 , wherein
the protective film is made of an organic material.
5. The imaging device according to claim 1 , wherein
the protective film is made of an inorganic material.
6. The imaging device according to claim 1 , wherein
the protective film is formed by stacking an organic material and an inorganic material.
7. A method of manufacturing an imaging device, the method comprising:
forming a photoelectric converter that performs photoelectric conversion depending on incident light;
forming an on-chip lens that collects the incident light into the photoelectric converter;
forming a color filter through which infrared light and visible light of a specified wavelength from among the collected incident light are transmitted;
forming an infrared-light attenuation filter that attenuates the infrared light from among the collected incident light and through which visible light from among the collected incident light is transmitted; and
forming a protective film that is arranged adjacent to the infrared-light attenuation filter and protects the infrared-light attenuation filter,
wherein the protective film is arranged adjacent to the color filter,
wherein the infrared-light attenuation filter attenuates the infrared light transmitted through the color filter, and
wherein the protective film has substantially a same refractive index as the color filter.
8. An imaging device, comprising:
a photoelectric converter that performs photoelectric conversion depending on incident light;
an on-chip lens that collects the incident light into the photoelectric converter;
a color filter through which infrared light and visible light of a specified wavelength from among the collected incident light are transmitted;
an infrared-light attenuation filter that attenuates the infrared light from among the collected incident light and through which visible light from among the collected incident light is transmitted; and
a protective film that is arranged adjacent to the infrared-light attenuation filter and protects the infrared-light attenuation filter, wherein the protective film is formed by stacking an organic material and an inorganic material.
9. The imaging device according to claim 8 , wherein
the protective film is arranged adjacent to the color filter, and the infrared-light attenuation filter attenuates the infrared light transmitted through the color filter.
10. The imaging device according to claim 8 , wherein
the protective film has substantially a same refractive index as the color filter.