Integrated cooling device based on Peltier effect and manufacturing method thereof
Integrated cooling device based on Peltier effect and manufacturing method thereof are provided. The device comprises one or more first heat dissipation structures around a device area. Each first heat dissipation structure comprises first N-type deep doped regions and first P-type deep doped regions arranged alternately, first vias, and first metal interconnection layers. The first vias are respectively located on two ends of each first N-type and each first P-type deep doped region. The first metal interconnect layers connect the first vias and such that the first heat dissipation structures are connected as a first S-shaped structure. When the first S-shaped structure is turned on, heat in the first N-type deep doped regions and the first P-type deep doped regions flows from a side close to the device area to its other side away from the device area, so as to realize heat dissipation in the device area.
1. An integrated cooling device based on a Peltier effect, comprising:
one or more first heat dissipation structures around a device area, and each of the one or more first heat dissipation structures comprises:
multiple first N-type doped regions and multiple first P-type doped regions arranged alternately;
multiple first vias on both ends of each of the first N-type doped regions and each of the first P-type doped regions; and
first metal interconnect layers connecting the multiple first vias, such that each of the one or more first heat dissipation structures is connected as a first S-shaped heat dissipation structure;
wherein when the first S-shaped heat dissipation structure is turned on, heat in the first N-type doped regions and the first P-type doped regions flows from a side of each of the first N-type doped regions and the first P-type doped regions close to the device area to its other side away from the device area;
one or more second heat dissipation structures at a side of the one or more first heat dissipation structures away from the device area, and each of the one or more second heat dissipation structures comprises:
multiple second N-type doped regions and multiple second P-type doped regions, the multiple second N-type doped regions and the multiple second P-type doped regions are arranged alternately in a row direction and in a column direction, respectively;
first polysilicon gates on each of the second N-type doped regions, the first polysilicon gates are N-type doped and there is no gate oxide layer between the first polysilicon gates and the second N-type doped regions;
second polysilicon gates on each of the second P-type doped region, the second polysilicon gates are P-type doped and there is no gate oxide layer between the second polysilicon gates and the second P-type doped regions; and
multiple second vias on each of the first polysilicon gates and each of the second polysilicon gates; and
second metal interconnect layers connecting to the multiple second vias, such that each of the one or more second heat dissipation structures is connected as a second S-shaped structure;
wherein when the second S-shaped structure is turned on, heat in the second N-type doped regions flows to the first polysilicon gates, and heat in the second P-type doped regions flows to the second polysilicon gates.
2. The integrated cooling device based on the Peltier effect of claim 1 , wherein the first N-type doped regions and the first P-type doped regions are rectangular, and in a rectangle, a side not adjacent to the device area is greater than a side adjacent to the device area.
3. The integrated cooling device based on the Peltier effect of claim 1 , wherein a distance between the device area and the one or more first heat dissipation structures ranges from 10 microns to 20 microns.
4. The integrated cooling device based on the Peltier effect of claim 1 , wherein a shallow trench isolation is formed between the device area and the one or more first heat dissipation structures.
5. The integrated cooling device based on the Peltier effect of claim 1 , wherein a distance between the one or more second heat dissipation structures and the one or more first heat dissipation structures ranges from 10 microns to 20 microns.
6. A method for manufacturing the integrated cooling device based on the Peltier effect of claim 1 .
7. The method of claim 6 , wherein a distance between the device area and the one or more first heat dissipation structures ranges from 10 microns to 20 microns.
8. The method of claim 6 , wherein a distance between the one or more second heat dissipation structures and the one or more first heat dissipation structures ranges from 10 microns to 20 microns.